Apparatus and method for pulsed plasma processing of a semiconductor substrate

• US 6,253,704 B1
• Filed: 09/17/1999
• Issued: 07/03/2001
• Est. Priority Date: 10/13/1995
• Status: Expired due to Fees

• Current Assignee: Mattson Technology, Inc. (Beijing Economic & Technology Development Area)
• Original Assignee: Mattson Technology, Inc. (Beijing Economic & Technology Development Area)
• Inventors: Savas, Stephen E.
• Primary Examiner(s): Mills, Gregory
• Assistant Examiner(s): HASSANZADEH, PARVIZ
• Application Number:
  US09/398,553
• Time in Patent Office: 655 Days
• Field of Search: 118/723.I, 118/723.AN, 156/345, 315/111.51, 315/111.21
• US Class Current: 118/723.00I
• CPC Class Codes: H01J 2237/004 Charge control of objects or beams
• CPC Class Codes: H01J 2237/3345 anisotropy
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32706 Polarising the substrate

Abstract

Apparatus and method for an improved etch process. A power source alternates between high and low power cycles to produce and sustain a plasma discharge. Preferably, the high power cycles couple sufficient power into the plasma to produce a high density of ions (≳10¹¹cm⁻³) for etching. Preferably, the low power cycles allow electrons to cool off to reduce the average random (thermal) electron velocity in the plasma. Preferably, the low power cycle is limited in duration as necessary to prevent excessive plasma loss to the walls or due to recombination of negative and positive ions. It is an advantage of these and other aspects of the present invention that average electron thermal velocity is reduced, so fewer electrons overcome the plasma sheath and accumulate on substrate or mask layer surfaces. A separate power source alternates between high and low power cycles to accelerate ions toward the substrate being etched. In one embodiment, a strong bias is applied to the substrate in short bursts. Preferably, multiple burst occur during the average transit time for an ion to cross the plasma sheath and reach the substrate surface. Ions are pulsed toward the surface for etching. These ions are not deflected into sidewalls as readily as ions in conventional low energy etch processes due to reduced charge buildup and the relatively low duty cycle of power used to pulse ions toward the substrate surface.

Claims

1. A plasma processing system for processing a semiconductor substrate, the a system comprising:

a processing chamber for producing the plasma;

an induction coil surrounding at least a portion of the processing chamber;

a first pulse power source coupled to the induction coil such that the induction coil couple power into the plasma using both high power cycles and low power cycles;

a substrate support for supporting the substrate the substrate support being positioned adjacent to the plasma; and

a second pulse power source coupled to the substrate support for applying a bias to the substrate;

wherein the second pulse power source is configured to alternate between high and low power cycles with a frequency ranging from about 500 kHz to 60 MHz.

2. The plasma reactor of claim 1 wherein the plasma has a potential and an ion density, the potential of the plasma is substantially larger during the high power cycles than during the low power cycles, and the ion density of the plasma during the high power cycles is within an order of magnitude of the ion density of the plasma during the low power cycles.

3. The processing chamber of claim 1, wherein the first pulse power source is configured such that the high and low power cycles of the inductively coupled power produce and sustain a plasma discharge.

4. The processing chamber of claim 3, wherein the first pulse power source is configured such that the high power cycles produce a high density of ions for etching, and the low power cycles reduce the average electron thermal velocity in the plasma.

5. The processing chamber of claim 4, wherein the first pulse power source is configured such that during the low power cycles, fewer electrons overcome the plasma sheath to accumulate on insulated surfaces of the substrate than would have accumulated without low power cycles.

6. The processing chamber of claim 1, wherein the first pulse power source is configured such that the duration of the high power cycles ranges from about 5 to 100 microseconds.

7. The processing chamber of claim 1, wherein the first pulse power source is configured such that the duration of the low power cycles ranges from about 30 to 1000 microseconds.

8. The processing chamber of claim 1, wherein the first pulse power source is configured such that the duration of the high power cycles is less than or equal to the duration of the low power cycles.

9. The processing chamber of claim 1, wherein the first pulse power source is configured such that the duty cycle of the high power cycles ranges from about 5 to 30 percent.

10. The processing chamber of claim 1, wherein the first pulse power source is configured such that the duty cycle of the high power cycles is about 10 percent.

11. The processing chamber of claim 1, wherein the first pulse power source is configured such that the magnitude of the high power cycles is less than about 10 kilowatts.

12. The processing chamber of claim 1, wherein the first pulse power source is configured such that the average power of the high power cycles ranges from about 200 watts to 2 kilowatts.

13. The processing chamber of claim 1, wherein the first pulse power source is configured such that the power of the low power cycles is at least 10 to 100 times less than the power of the high power cycles.

14. The processing chamber of claim 1, wherein the first pulse power source is configured such that the frequency of the inductively coupled power ranges from about 2 kHz to 40.68 MHz.

15. The processing chamber of claim 1, wherein the first pulse power source is configured such that the frequency of the inductively coupled power is 13.56 MHz.

16. The processing chamber of claim 1, wherein the second pulse power source is configured such that ions are accelerated toward the substrate only when high power cycles are being applied to the substrate support.

17. The processing chamber of claim 1, wherein the second pulse power source is configured such that during the low power cycles, ions retain their anisotropic motion toward the substrate.

18. The processing chamber of claim 1, wherein the second pulse power source is configured such that the frequency of alternating between high and low power cycles is such that at least two negative voltage pulses of high power cycles are applied to the substrate support during the average transit time for an ion to cross a plasma sheath.

19. The processing chamber of claim 18, wherein the second pulse power source is configured such that the duration of each negative voltage pulse of high power cycles ranges from about 1 to 10 percent of the average transit time for an ion to cross the plasma sheath.

20. The processing chamber of claim 19, wherein the second pulse power source is configured such that the duration of each negative voltage pulse of high power cycles ranges from about 0.02 to 0.2 microseconds.

21. The processing chamber of claim 1, wherein the second pulse power source is further configured such that the second pulse power source alternates between high and low power cycles with a frequency ranging from about 1 to about 5 MHz.

22. The processing chamber of claim 1, wherein the second pulse power source is configured such that the duty cycle of the high power cycles ranges from about 5 to 50 percent.

23. The processing chamber of claim 22, wherein the second pulse power source is configured such that the duty cycle of the high power cycles ranges from about 10 to 20 percent.

24. The processing chamber of claim 1, wherein the second. power source is configured such that the high power cycles comprises a DC signal.

25. The processing chamber of claim 24, wherein the second pulse power source is configured such that the amplitude of the DC signal ranges from about negative 100 to about negative 300 volts.

26. The processing chamber of claim 1, wherein the substrate support comprises an electrode for supporting and biasing the substrate.