Process and system for separation and recovery of perfluorocompound gases
First Claim
1. A process for the separation and recovery of perfluorocompound gases from a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, said process comprising the steps of:
- (a) providing a first membrane having a feed side and a permeate side, the first membrane being permeable to the at least one carrier gas and being non-permeable to the at least one perfluorocompound gas;
(b) contacting the feed side of the first membrane with the gas mixture;
(c) withdrawing from the feed side of the first membrane a first non-permeate stream enriched in the at least one perfluorocompound gas;
(d) withdrawing from the permeate side of the first membrane a first permeate stream comprising primarily the at least one carrier gas;
(e) providing a second membrane having a feed side and a permeate side, the second membrane being permeable to the at least one carrier gas and being non-permeable to the at least one perfluorocompound gas;
(f) contacting the feed side of the second membrane with the first non-permeate stream;
(g) withdrawing from the feed side of the second membrane a second non-permeate stream enriched in the at least one perfluorocompound gas;
(h) withdrawing from the permeate side of the second membrane a second permeate stream comprising primarily the at least one carrier gas;
(i) passing the second non-permeate stream to a condensation process to liquefy at least a portion of the perfluorocompound gas; and
(j) recycling at least a portion of the second permeate stream to the feed side of the first membrane.
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Accused Products
Abstract
Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; b) providing at least one glassy polymer membrane having a feed side and a permeate side; c) contacting the feed side of the at least one membrane with the gas mixture; d) withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and e) withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.
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Citations
2 Claims
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1. A process for the separation and recovery of perfluorocompound gases from a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, said process comprising the steps of:
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(a) providing a first membrane having a feed side and a permeate side, the first membrane being permeable to the at least one carrier gas and being non-permeable to the at least one perfluorocompound gas;
(b) contacting the feed side of the first membrane with the gas mixture;
(c) withdrawing from the feed side of the first membrane a first non-permeate stream enriched in the at least one perfluorocompound gas;
(d) withdrawing from the permeate side of the first membrane a first permeate stream comprising primarily the at least one carrier gas;
(e) providing a second membrane having a feed side and a permeate side, the second membrane being permeable to the at least one carrier gas and being non-permeable to the at least one perfluorocompound gas;
(f) contacting the feed side of the second membrane with the first non-permeate stream;
(g) withdrawing from the feed side of the second membrane a second non-permeate stream enriched in the at least one perfluorocompound gas;
(h) withdrawing from the permeate side of the second membrane a second permeate stream comprising primarily the at least one carrier gas;
(i) passing the second non-permeate stream to a condensation process to liquefy at least a portion of the perfluorocompound gas; and
(j) recycling at least a portion of the second permeate stream to the feed side of the first membrane.
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2. A process for the separation and recovery of perfluorocompound gases from a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, said process comprising the steps of:
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(a) providing a first membrane having a feed side and a permeate side, the first membrane being permeable to the at least one carrier gas and being non-permeable to the at least one perfluorocompound gas;
(b) contacting the feed side of the first membrane with the gas mixture;
(c) withdrawing from the feed side of the first membrane a first non-permeate stream enriched in the at least one perfluorocompound gas;
(d) withdrawing from the permeate side of the first membrane a first permeate stream comprising primarily the at least one carrier gas;
(e) providing a second membrane having a feed side and a permeate side, the second membrane being permeable to the at least one carrier gas and being non-permeable to the at least one perfluorocompound gas;
(f) contacting the feed side of the second membrane with the first non-permeate stream;
(g) withdrawing from the feed side of the second membrane a second non-permeate stream enriched in the at least one perfluorocompound gas;
(h) withdrawing from the permeate side of the second membrane a second permeate stream comprising primarily the at least one carrier gas; and
(i) passing the second non-permeate stream to a condensation process to liquefy at least a portion of the perfluorocompound gas.
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Specification