Semiconductor device manufacturing apparatus having controller detecting function of filter

• US 6,254,767 B1
• Filed: 02/03/2000
• Issued: 07/03/2001
• Est. Priority Date: 02/09/1999
• Status: Expired due to Fees

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Shin, Sung-ki, Hah, Sang-rok
• Primary Examiner(s): Drodge, Joseph W.
• Application Number:
  US09/496,949
• Time in Patent Office: 516 Days
• Field of Search: 210/85, 210/86, 210/87, 210/167, 210/194, 210/195.1, 210/257.1, 210/258, 210/416.1, 210/97, 210/138, 210/143, 451/60, 451/446, 417/42, 417/44.9, 417/293, 417/44.2, 340/679
• US Class Current: 210/85
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring

Abstract

A semiconductor device manufacturing apparatus. The semiconductor device manufacturing apparatus includes: a tank having an inlet and an outlet, for storing a chemical solution; a pump interposed between the inlet and outlet of the tank, for circulating the chemical solution contained in the tank; a filter interposed between the pump and the inlet of the tank; at least one main body connected to an outlet of the filter; a pumping cycle sensor for changing the pumping operation of the pump into a pulse signal; and a controller for measuring the cycle time of the pulse signals generated by the pumping cycle sensor to determine the level of deterioration of the filter.

Claims

1. A conductor device manufacturing apparatus comprising:

a tank having an inlet and an outlet, for storing a chemical solution;

a pump interposed between the inlet and outlet of the tank, for circulating the chemical solution contained in the tank;

a filter interposed between the pump and the inlet of the tank;

at least one main body connected to an outlet of the filter;

a pumping cycle sensor for monitoring the pumping operation of the pump and generating a pulse signal indicative of a cycle time during the pumping operation; and

a controller for measuring the cycle time of the pulse signal to determine the level of deterioration of the filter.

2. A semiconductor device manufacturing apparatus, as recited in claim 1, wherein the chemical solution is a slurry.

3. A semiconductor device manufacturing apparatus, as recited in claim 1, wherein the at least one main body is a chemical mechanical polisher (CMP).

4. A semiconductor device manufacturing apparatus, as recited in claim 1, wherein the pump is a diaphragm pump having an air outlet and an air inlet.

18. A semiconductor device manufacturing apparatus, as recited in claim 1, further comprising at least one level sensor on the sidewall of the tank, the level sensor for sensing the level of the chemical solution contained in the tank.

19. A semiconductor device manufacturing apparatus, as recited in claim 18, wherein the level sensor is a low level sensor attached to the lower sidewall of the tank.

5. A semiconductor device manufacturing apparatus, comprising:

a tank having an inlet and an outlet, for storing a chemical solution;

a pump interposed between the inlet and outlet of the tank, for circulating the chemical solution contained in the tank;

a filter interposed between the pump and the inlet of the tank;

at least one main body connected to an outlet of the filter;

a pumping cycle sensor for monitoring the pumping operation of the pump and generating a pulse signal indicative of a cycle time during the pumping operation; and

a controller for measuring the cycle time of the pulse signal to determine the level of deterioration of the filter,

wherein the pump is a diaphragm pump having an air outlet and an air inlet, and

wherein the pumping cycle sensor comprises;

a switch installed in front of the air outlet of the pump, the switch having a button supported by a spring; and

a panel installed between the button of the switch and the air outlet of the pump, one end of the panel being connected to the body of the switch by a hinge.

6. A semiconductor device manufacturing apparatus, comprising:

a tank having an inlet and an outlet, for storing a chemical solution;

a pump interposed between the inlet and outlet of the tank, for circulating the chemical solution contained in the tank;

a filter interposed between the pump and the inlet of the tank;

at least one main body connected to an outlet of the filter;

a pumping cycle sensor for monitoring the pumping operation of the pump and generating a pulse signal indicative of a cycle time during the pumping operation; and

a controller for measuring the cycle time of the pulse signal to determine the level of deterioration of the filter, wherein the controller comprises;

a pumping cycle setting portion for storing the maximum allowable operating period of the pump;

a pumping cycle signal generator for outputting a toggle signal, the state of the toggle signal changing whenever a pulse signal is generated by the pumping cycle sensor;

a pumping cycle measuring portion for measuring the operating cycle time of the pump using the toggle signal output from the pumping cycle signal generator as an input signal;

a comparator for comparing a first output signal from the pumping cycle setting portion with a second output signal from the pumping cycle measuring portion;

a first switch interposed between the pumping cycle sensor and the pumping cycle signal generator;

a second switch interposed between the pumping cycle signal generator and the pumping cycle measuring portion;

an alarm unit for generating an alarm and simultaneously opening the first and second switches when the measured operating cycle time of the pump is equal to the maximum allowable operating period of the pump stored in the pumping cycle setting portion, to stop the operation of the pumping cycle signal generator and the pumping cycle measuring portion; and

a reset switch for initializing the pumping cycle signal generator and the pumping cycle measuring portion.

7. A semiconductor device manufacturing apparatus, as recited in claim 6, further comprising a multi-vibrator connected to an output port of the first switch, the multi-vibrator activating the alarm unit when the operating cycle time of the pump is longer than a predetermined duration.

8. A semiconductor device manufacturing apparatus, as recited in claim 7, wherein the multi-vibrator is a triggerable multi-vibrator.

9. A semiconductor device manufacturing apparatus, as recited in claim 6, wherein the pumping cycle setting portion comprises:

a first oscillator for generating successive first pulse signals;

a first counter for counting the number of first pulse signals generated by the first oscillator and generating a first pulse output signal;

a first decoder for changing the first pulse output signal into a first decimal output signal;

a first indicator for receiving the first decimal output signal and displaying a decimal number corresponding to the first pulse output signal from the first decoder; and

at least one counter switch interposed between the first oscillator and the first counter, for transferring a desired number of first pulse signals generated by the first oscillator to the first counter.

10. A semiconductor device manufacturing apparatus, as recited in claim 9, wherein the first counter is an up/down counter.

11. A semiconductor device manufacturing apparatus, as recited in claim 9, wherein the first indicator comprises at least one seven-segment display unit.

12. A semiconductor device manufacturing apparatus, as recited in claim 6, wherein the pumping cycle measuring portion comprises:

a second oscillator for generating successive second pulse signals with a predetermined cycle time when the toggle signal output from the pumping cycle signal generator is in a first state, and generating a signal of logic “

0”

when the toggle signal output from the pumping cycle signal generator is in a second state;

a second counter for counting the number of the second pulse signals output from the second oscillator and generating a second pulse output signal;

a second decoder for changing the second pulse output signal into a second decimal output signal; and

a second indicator for receiving the second decimal output signal and displaying a decimal number corresponding to the second pulse output signal from the second decoder.

13. A semiconductor device manufacturing apparatus, as recited in claim 12, wherein the second indicator comprises at least one seven-segment display.

14. A semiconductor device manufacturing apparatus, as recited in claim 12, further comprising a time delay circuit interposed between the reset switch and the second counter.

15. A semiconductor device manufacturing apparatus, as recited in claim 6, wherein the comparator outputs a signal at a first logic state when the output signal from the pumping cycle setting portion is equal to the output signal from the pumping cycle measuring portion, and outputs a signal at a second logic state when the output signal from the pumping cycle setting portion is different to the output signal from the pumping cycle measuring portion.

16. A semiconductor device manufacturing apparatus, as recited in claim 6, wherein the alarm unit comprises:

a first inverter connected to an output port of the comparator, for outputting a first compared signal controlling the on/off state of the first and second switches;

a second inverter connected to the output port of the first inverter for outputting a second compared signal;

a relay switch connected to the output port of the second inverter, the relay switch comprising first and second relay switches that can be operated at the same time;

a buzzer connected to the first relay switch; and

an end cycle switch interposed between the second relay switch and the at least one main body.

17. A semiconductor device manufacturing apparatus, as recited in claim 16, further comprising a pumping cycle sensing lamp interposed between the second inverter and the relay switch.

20. A semiconductor device manufacturing apparatus, comprising:

a tank having an inlet and an outlet, for storing a chemical solution;

a pump interposed between the inlet and outlet of the tank, for circulating the chemical solution contained in the tank;

a filter interposed between the pump and the inlet of the tank;

at least one main body connected to an outlet of the filter;

a pumping cycle sensor for monitoring the pumping operation of the pump and generating a pulse signal indicative of a cycle time during the pumping operation;

at least one level sensor on the sidewall of the tank, the level sensor for sensing the level of the chemical solution contained in the tank; and

a controller for measuring the cycle time of the pulse signal to determine the level of deterioration of the filter, wherein the controller comprises;

a pumping cycle setting portion for storing the maximum allowable operating period of the pump;

a pumping cycle signal generator for outputting a toggle signal, the state of the toggle signal changing whenever a pulse signal is generated by the pumping cycle sensor;

a pumping cycle measuring portion for measuring the operating cycle time of the pump using the toggle signal output from the pumping cycle signal generator as an input signal;

a comparator for comparing a first output signal from the pumping cycle setting portion to a second output signal from the pumping cycle measuring portion;

a first switch interposed between the pumping cycle sensor and the pumping cycle signal generator;

a second switch interposed between the pumping cycle signal generator and the pumping cycle measuring portion; and

an alarm unit for generating an alarm and simultaneously opening the first and second switches when the measured operating cycle time of the pump is equal to the maximum allowable operating period stored in the pumping cycle setting portion, to stop the operation of the pumping cycle signal generator and the pumping cycle measuring portion, and for generating an alarm when the level of the chemical solution in the tank is lower than the height of the low level sensor.

21. A semiconductor device manufacturing apparatus, as recited in claim 20, further comprising a multi-vibrator connected to a first output port of the first switch, the multi-vibrator operating the alarm unit when the operating cycle time of the pump is longer than a predetermined duration.

22. A semiconductor device manufacturing apparatus, as recited in claim 21, wherein the multi-vibrator is a triggerable multi-vibrator.

23. A semiconductor device manufacturing apparatus, as recited in claim 20, wherein the alarm unit comprises:

a first inverter connected to the output port of the comparator, for outputting a first compared signal controlling the on/off state of the first and second switches;

a second inverter connected to the output port of the first inverter, for outputting a second compared signal;

a relay switch connected to the output port of the second inverter, the relay switch comprising first and second relay switches that may be operated at the same time;

a buzzer connected to the first relay switch;

an end cycle switch interposed between the second relay switch and the at least one main body; and

at least one low level sensing switch interposed in parallel between the relay circuit and a power source, the low level sensing switch being controlled by a signal from the at least one level sensor.

24. A semiconductor device manufacturing apparatus, as recited in claim 23, further comprising a pumping cycle sensing lamp interposed between the second inverter and the relay switch.

25. A semiconductor device manufacturing apparatus, as recited in claim 24, further comprising at least one chemical solution sensing lamp interposed in parallel between at least one of the low level sensing switches and the relay switch.

26. A semiconductor device manufacturing apparatus comprising:

a plurality of tanks for storing a plurality of chemical solutions, each tank having an outlet and an inlet;

a plurality of pumps, each interposed between the inlet and outlet of a corresponding one of the plurality of tanks, for circulating the chemical solutions contained in the tanks;

a plurality of filters, each interposed between the outlet of each of a corresponding one of the plurality of pumps and the inlet of a corresponding one of the plurality of tanks;

a plurality of main bodies, each connected to the outlet of a corresponding one of the filters;

a plurality of pumping cycle sensors for changing the pumping operation of a corresponding pump into a plurality of pulse signals; and

a controller for measuring cycle times of the plurality of pulse signals generated by the plurality of pumping cycle sensors to determine the level of deterioration of the plurality of filters.

27. A semiconductor device manufacturing apparatus, as recited in claim 26, wherein the chemical solution is a slurry.

28. A semiconductor device manufacturing apparatus, as recited in claim 26, wherein each main body is a chemical mechanical polisher (CMP).

29. A semiconductor device manufacturing apparatus, as recited in claim 26, wherein each of the plurality of pumps is a diaphragm pump having an air outlet and an air inlet.

30. A semiconductor device manufacturing apparatus, as recited in 29, wherein each pumping cycle sensor comprises:

a switch installed in front of the air outlet of one of the plurality of pumps, the switch having a button supported by a spring; and

a panel installed between the button of the switch and the air outlet of the one of the plurality of pumps, one end of the panel being connected to the body of the switch by a hinge.

31. A semiconductor device manufacturing apparatus, comprising:

a plurality of tanks for storing a plurality of chemical solutions, each tank having an outlet and an inlet;

a plurality of pumps, each interposed between the inlet and outlet of a corresponding one of the plurality of tanks, for circulating the chemical solutions contained in the tanks;

a plurality of filters, each interposed between the outlet of each of a corresponding one of the plurality of pumps and the inlet of a corresponding one of the plurality of tanks;

a plurality of main bodies, each connected to the outlet of a corresponding one of the filters;

a plurality of pumping cycle sensors for changing the pumping operation of a corresponding pump into a plurality of pulse signals; and

a controller for measuring cycle times of the plurality of pulse signals generated by the plurality of pumping cycle sensors to determine the level of deterioration of the plurality of filters, wherein the controller comprises;

a pumping cycle setting portion for storing the maximum allowable operating period of each pump;

a first switching portion for outputting in sequence the plurality of pulse signals generated by the plurality of pumping cycle sensors;

a pumping cycle signal generator for outputting a toggle signal, the state of the toggle signal changing whenever a pulse signal is input from the first switching portion;

a pumping cycle measuring portion for measuring the operating cycle time of each pump using the toggle signal output from the pumping cycle signal generator as an input signal;

a comparator for comparing an output signal from the pumping cycle setting portion with an output signal from the pumping cycle measuring portion;

a second switching portion interposed between the pumping cycle signal generator and the pumping cycle measuring portion;

a reset switch for initializing the first switching portion, the pumping cycle signal generator and the pumping cycle measuring portion; and

an alarm unit for generating an alarm and simultaneously turning off the first switching portion and the second switching portion when the measured operating cycle time of the pump is equal to the maximum allowable operating period stored in the pumping cycle setting portion, to stop the operation of the pumping cycle signal generator and the pumping cycle measuring portion.

32. A semiconductor device manufacturing apparatus, as recited in claim 31, further comprising a pump state sensor for operating the alarm unit when at least one of the pulse signals output from the plurality of pumping cycle sensors has a cycle time longer than a predetermined time.

33. A semiconductor device manufacturing apparatus, as recited in claim 32, wherein the pump state sensor is initialized by the reset switch.

35. A semiconductor device manufacturing apparatus, as recited in claim 31, wherein the first switching portion comprises:

a plurality of signal switches connected one-to-one with each of the pumping cycle sensors;

a first decoder for outputting a pulse signal whenever the one of the plurality of pulse signals output via one of the plurality of signal switches in a closed state is input at least two times; and

a second decoder for outputting a control signal turning on in sequence all of the plurality of signal switches by turning off a currently-closed one of the signal switches using one of the plurality of pulse signals output from the first decoder as an input signal and by simultaneously turning on another one of the plurality of signal switches.

36. A semiconductor device manufacturing apparatus, as recited in claim 35, wherein the plurality of signal switches of the first switching portion are turned off completely when the maximum allowable operating period stored in the pumping cycle setting portion is equal to the pumping cycle time measured by the pumping cycle measuring portion.

34. A semiconductor device manufacturing apparatus, as recited in 32, wherein the pump state sensor comprises:

a plurality of state sensor switches connected one-to-one with each of the pumping cycle sensors;

a decoder, using one of the plurality of pulse signals output via one of the plurality of state sensor switches as an input signal, for turning off one of the plurality of state sensor switches and simultaneously turning on another switch, so as to turn on in sequence all of the plurality of state sensor switches; and

a triggerable multi-vibrator for outputting a signal operating the alarm unit when one of the plurality of pulse signals received from one of the plurality switches has a cycle time longer than a predetermined time.