TFT CMOS logic circuit having source/drain electrodes of differing spacing from the gate electrode for decreasing wiring capacitance and power consumption

• US 6,255,695 B1
• Filed: 09/18/1997
• Issued: 07/03/2001
• Est. Priority Date: 09/20/1996
• Status: Expired due to Term

• Current Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.), Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.), Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Koyama, Jun, Kubota, Yasushi, Katoh, Kenichi
• Primary Examiner(s): Lee, Eddie C.
• Assistant Examiner(s): Baumeister, Bradley W
• Application Number:
  US08/936,472
• Time in Patent Office: 1,384 Days
• Field of Search: 257/340, 257/338, 257/347, 257/343, 257/344, 257/66, 257/369, 257/386, 257/401, 257/909, 257/350, 257/351, 257/368
• US Class Current: 257/351
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/1222 with a particular composition, shape or crystalline structure of the active layer
• CPC Class Codes: H01L 29/41733 for thin film transistors with insulated gate

Abstract

In a field-effect transistor, one of the distance between a gate electrode and a source electrode and the distance between the gate electrode and a drain electrode which one distance is on a side where a signal of a high frequency is applied is made longer than the other distance on a side where a signal of a low frequency is applied.

Claims

1. A semiconductor device comprising:

an n-channel field effect transistor and a p-channel field effect transistor both disposed over a substrate, each of said n-channel and p-channel field effect transistors comprising;

a source region, a drain region, and a channel forming region disposed between the source and drain regions;

a gate electrode disposed adjacent to the channel forming region through a gate insulating film; and

a source electrode connected to the source region,

wherein said n-channel and p-channel field effect transistors constitute an inverter circuit having an input terminal and an output terminal and a common drain electrode,

wherein said gate electrode of said n-channel field effect transistor is connected with said gate electrode of said p-channel field effect transistor, and said input terminal is connected with both of said gate electrodes of said n-channel and p-channel field effect transistors,

wherein said common drain electrode is connected to the drain regions of said n-channel and p-channel field effect transistors, and said output terminal is connected to said common drain electrode,

wherein in at least one of the n-channel and p-channel field-effect transistors, a distance between the gate electrode and the common drain electrode is longer than a distance between the gate electrode and the source electrode,

wherein said source electrode connected to the source region of said n-channel field effect transistor is connected to a ground potential, and

wherein said source electrode connected to the source region of said p-channel field effect transistor is connected to a power supply line.

2. A device according to claim 1, wherein each of the field-effect transistors is a thin-film transistor.

3. A device according to claim 2, wherein the thin-film transistor is disposed on a substrate having an insulating surface.

4. A device according to claim 2, wherein the thin-film transistor is disposed on a glass substrate.

5. A semiconductor device comprising:

an n-channel field effect transistor and a p-channel field effect transistor both disposed over a substrate, each of said n-channel and p-channel field effect transistors comprising;

a source region, a drain region, and a channel forming region disposed between the source and drain regions;

a gate electrode disposed adjacent to the channel forming region through a gate insulating film; and

a source electrode connected to the source region,

wherein said n-channel and p-channel field effect transistors constitute an inverter circuit having an input terminal and an output terminal and a common drain electrode,

wherein said gate electrode of said n-channel field effect transistor is connected with said gate electrode of said p-channel field effect transistor, and said input terminal is connected with both of said gate electrodes of said n-channel and p-channel field effect transistors,

wherein said common drain electrode is connected to the drain regions of said n-channel and p-channel field effect transistors, and said output terminal is connected to said common drain electrode,

wherein in at least one of the n-channel and p-channel field-effect transistors, a distance between the gate electrode and the common drain electrode is longer than a distance between the gate electrode and the source electrode,

wherein said source electrode connected to the source region of said n-channel field effect transistor is connected to a ground potential,

wherein said source electrode connected to the source region of said p-channel field effect transistor is connected to a power supply line, and

wherein an amplitude of an electrical signal applied between said input terminal and said output terminal is higher than an amplitude of an electrical signal applied between said input terminal and said power supply line.

6. A device according to claim 5, wherein each of the field-effect transistors is a thin-film transistor.

7. A semiconductor device comprising:

an n-channel field-effect transistor and a p-channel field effect transistor both disposed over a substrate, each of the n-channel and p-channel field-effect transistors comprising;

a source region, a drain region, and a channel forming region disposed between the source and drain regions;

a gate electrode disposed adjacent to the channel forming region through a gate insulating film; and

a source electrode connected to the source region;

wherein said n-channel and p-channel field effect transistors constitute an inverter circuit having an input terminal and an output terminal and a common drain electrode,

wherein said gate electrode of said n-channel field effect transistor is connected with said gate electrode of said p-channel field effect transistor, and said input terminal is connected with both of said gate electrodes of said n-channel and p-channel field effect transistors,

wherein said common drain electrode is connected to the drain regions of said n-channel and p-channel field effect transistors, and said output terminal is connected to said common drain electrode,

wherein in at least one of the n-channel and p-channel field-effect transistors, a distance between the gate electrode and the common drain electrode is longer than a distance between the gate electrode and the source electrode,

wherein said source electrode connected to the source region of said n-channel field effect transistor is connected to a ground potential, and

wherein said source electrode connected to the source region of said p-channel field effect transistor is connected to an interconnection having a positive potential.

8. A device according to claim 7, wherein a frequency of an electrical signal applied between said input terminal and said output terminal is higher than a frequency of an electrical signal applied between said input terminal and said interconnection.

9. A device according to claim 7, wherein each of the field-effect transistors is a thin-film transistor.

10. A device according to claim 9, wherein the thin-film transistor is disposed on a substrate having an insulating surface.

11. A device according to claim 9, wherein the thin-film transistor is disposed on a glass substrate.

12. A semiconductor device comprising:

a first n-channel field-effect transistor and a first p-channel field effect transistor and a second n-channel field effect transistor and a second p-channel field effect transistor all disposed over a substrate, each of the first n-channel field-effect transistor and the first p-channel field effect transistor and the second n-channel field effect transistor and the second p-channel field effect transistor comprising;

a source region, a drain region, and a channel forming region disposed between the source and drain regions;

a gate electrode disposed adjacent to the channel forming region through a gate insulating film; and

a source electrode connected to the source region;

wherein said first n-channel field effect transistor and said first p-channel field effect transistor and said second n-channel field effect transistor and said second p-channel field effect transistor constitute a buffer circuit having an input terminal and an output terminal and a first common drain electrode and a second common drain electrode,

wherein said drain regions of said first n-channel and first p-channel field effect transistors are connected with said first common drain electrode,

wherein said drain regions of said second n-channel and second p-channel field effect transistors are connected with said second common drain electrode,

wherein said gate electrode of said first n-channel field effect transistor is connected with said gate electrode of said first p-channel field effect transistor, and said input terminal is connected with both of said gate electrodes of said first n-channel and first p-channel field effect transistors,

wherein said gate electrode of said second n-channel field effect transistor is connected with said gate electrode of said second p-channel field effect transistor, and both of said gate electrodes of said second n-channel and second p-channel field effect transistors are connected with said first common drain electrode,

wherein said output terminal is connected with said second common drain electrode,

wherein in at least one of the first n-channel field effect transistor and the first p-channel field effect transistor, a distance between the gate electrode and the first common drain electrode is longer than a distance between the gate electrode and the source electrode,

wherein in at least one of the second n-channel field effect transistor and the second p-channel field effect transistor, a distance between the gate electrode and the second common drain electrode is longer than a distance between the gate electrode and the source electrode,

wherein said source electrode connected with the source region of said first n-channel field effect transistor is connected to a ground potential,

wherein said source electrode connected with the source region of said second n-channel field effect transistor is connected to said ground potential,

wherein said source electrode connected with the source region of said first p-channel field effect transistor is connected with a power supply line, and

wherein said source electrode connected with the source region of said second p-channel field effect transistor is connected to said power supply line.

13. A device according to claim 12, wherein each of the field-effect transistors is a thin-film transistor.

14. A device according to claim 13, wherein the thin-film transistor is disposed on a substrate having an insulating surface.

15. A device according to claim 13, wherein the thin-film transistor is disposed on a glass substrate.

16. A semiconductor device comprising:

a first n-channel field-effect transistor and a first p-channel field effect transistor and a second n-channel field effect transistor and a second p-channel field effect transistor all disposed over a substrate, each of the first n-channel field-effect transistor and the first p-channel field effect transistor and the second n-channel field effect transistor and the second p-channel field effect transistor comprising;

a source region, a drain region, and a channel forming region disposed between the source and drain regions;

a gate electrode disposed adjacent to the channel forming region through gate insulating film;

a source electrode connected to the source region,

wherein said first n-channel field effect transistor and said first p-channel field effect transistor and said second n-channel field effect transistor and said second p-channel field effect transistor constitute a buffer circuit having an input terminal and an output terminal and a first common drain electrode and a second common drain electrode,

wherein said drain regions of said first n-channel and first p-channel field effect transistors are connected with said first common drain electrode,

wherein said drain regions of said second n-channel and second p-channel field effect transistors are connected with said second common drain electrode,

wherein said gate electrode of said first n-channel field effect transistor is connected with said gate electrode of said first p-channel field effect transistor, and said input terminal is connected with both of said gate electrodes of said first n-channel and first p-channel field effect transistors,

wherein said gate electrode of said second n-channel field effect transistor is connected with said gate electrode of said second p-channel field effect transistor, and both of said gate electrodes of said second n-channel and second p-channel field effect transistors are connected with said first common drain electrode,

wherein said output terminal is connected with said second common drain electrode,

wherein in at least one of the first n-channel field effect transistor and the first p-channel field effect transistor, a distance between the gate electrode and the first common drain electrode is longer than a distance between the gate electrode and the source electrode,

wherein in at least one of the second n-channel field effect transistor and the second p-channel field effect transistor, a distance between the gate electrode and the second common drain electrode is longer than a distance between the gate electrode and the source electrode,

wherein said source electrode connected with the source region of said first n-channel field effect transistor is connected to a ground potential,

wherein said source electrode connected with the source region of said second n-channel field effect transistor is connected to said ground potential,

wherein said source electrode connected with the source region of said first p-channel field effect transistor is connected with an interconnection having a positive potential, and

wherein said source electrode connected with the source region of said second p-channel field effect transistor is connected to said interconnection having the positive potential.

17. A device according to claim 16, wherein each of the field-effect transistors is a thin-film transistor.

18. A device according to claim 17, wherein the thin-film transistor is disposed on a substrate having an insulating surface.

19. A device according to claim 17, wherein the thin-film transistor is disposed on a glass substrate.

20. A semiconductor device comprising:

a semiconductor region comprising a source region and a drain region and a channel provided between said source region and said drain region;

a gate electrode provided adjacent to said channel through a gate insulating film;

a source electrode connected with said source region; and

a drain electrode connected with said drain region,

wherein a frequency of an electric signal applied between said gate electrode and one of said source electrode and said drain electrode is higher than a frequency of an electric signal applied between said gate electrode and the other of said source electrode and said drain electrode, and

wherein a distance between said gate electrode and said one of said source electrode and said drain electrode between which the electric signal is applied at the higher frequency is longer than a distance between said gate electrode and the other of said source electrode and said drain electrode between which the electric signal is applied at the lower frequency.

21. A semiconductor device comprising:

a semiconductor region comprising a source region and a drain region and a channel provided between said source region and said drain region;

a gate electrode provided adjacent to said channel through a gate insulating film;

a source electrode connected with said source region; and

a drain electrode connected with said drain region,

wherein an amplitude of an electric signal applied between said gate electrode and one of said source electrode and said drain electrode is larger than an amplitude of an electric signal applied between said gate electrode and the other of said source electrode and said drain electrode, and

wherein a distance between said gate electrode and said one of said source electrode and said drain electrode between which the electric signal is applied at the larger amplitude is longer than a distance between said gate electrode and the other of said source electrode and said drain electrode between which the electric signal is applied at the smaller amplitude.