Polymer microactuator array with macroscopic force and displacement

• US 6,255,758 B1
• Filed: 07/03/2000
• Issued: 07/03/2001
• Est. Priority Date: 12/29/1998
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Cabuz, Cleopatra, Horning, Robert D., Herb, William R.
• Primary Examiner(s): Ramirez, Nestor
• Assistant Examiner(s): Le, Dang Dinh
• Application Number:
  US09/609,726
• Time in Patent Office: 365 Days
• Field of Search: 310/309, 310/308, 29/253.5, 29/254.1, 295/921, 251/30.05, 251/30.02, 251/34.39, 251/41.65, 251/46
• US Class Current: 310/309
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electrodes associated with the array of unit cells. A source of electric potential operably connects the electrodes, whereby electrostatic forces are generated most intensely proximate the point where the gap between the sheets is smallest. Inlets and outlets for each cell permit displacement of fluid during generation of the electrostatic forces. In a preferred embodiment, the plurality of sheets forms a stack of layers of arrays of unit cells. The layers are configured such that bi-directional activation is caused by pairs of actuators working opposite each other. At least one of every pair of the sheets may be preformed into corrugations or into flaps to provide a predetermined mechanical bias between the pairs, or the sheets may form curved portions by an applied load to provide a displacement between the pairs. The sheets are preferably from about 1 μm to about 100 μm thick and the cells preferably have an individual displacement of from about 5 μm to about 200 μm.

Claims

1. A method of forming a microactuator array device, comprising the steps of:

depositing thin conductive and dielectric films on a plurality of sheets to locate and pattern a plurality of electrodes associated with an array of unit cells;

operably connecting a source of electric potential to said electrodes such that adjacent layers of electrodes are biased with respect to each other to form actuators, whereby electrostatic forces are generated most intensely proximate the point where the gap between said sheets is smallest; and

bonding a plurality of generally parallel thin flexible polymer sheets together in a predetermined pattern to form an array of unit cells on at least one layer;

connecting inlets and outlets for each cell to permit displacement of fluid during generation of said electrostatic forces.

2. The method of claim 1, wherein said plurality of sheets are stacked to a stack of at least one unit cell per layer.

3. The method of claim 2, wherein said layers are configured such that bidirectional activation is caused by pairs of actuators working opposite each other.

4. The method of claim 3, wherein at least one of every pair of said sheets are preformed into corrugations to provide a predetermined mechanical bias between said pairs.

5. The method of claim 4, wherein at least one of every pair of said sheets are preformed into flaps to provide a predetermined mechanical bias between said pairs.

6. The method of claim 1, wherein said plurality of sheets form curved portions by an applied load to provide a predetermined bias between said pairs.

7. The method of claim 1, wherein said plurality of sheets are formed from about 1 μ

m to about 100 μ

m thick and said cells are formed to have an individual displacement of from about 5 μ

m to about 200 μ

m.