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Polymer microactuator array with macroscopic force and displacement

  • US 6,255,758 B1
  • Filed: 07/03/2000
  • Issued: 07/03/2001
  • Est. Priority Date: 12/29/1998
  • Status: Expired due to Fees
First Claim
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1. A method of forming a microactuator array device, comprising the steps of:

  • depositing thin conductive and dielectric films on a plurality of sheets to locate and pattern a plurality of electrodes associated with an array of unit cells;

    operably connecting a source of electric potential to said electrodes such that adjacent layers of electrodes are biased with respect to each other to form actuators, whereby electrostatic forces are generated most intensely proximate the point where the gap between said sheets is smallest; and

    bonding a plurality of generally parallel thin flexible polymer sheets together in a predetermined pattern to form an array of unit cells on at least one layer;

    connecting inlets and outlets for each cell to permit displacement of fluid during generation of said electrostatic forces.

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