Microelectromechanical devices including rotating plates and related methods
First Claim
1. An electromechanical device comprising:
- a frame having an aperture therein;
a plate suspended in said aperture having a reflective surface for reflecting a signal directed to said plate; and
a support structure connected between said frame and plate for supporting said plate along an axis relative to said frame, wherein said support structure has at least one rotational contact that allows said plate to rotate about the axis relative to said frame.
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Abstract
An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90° angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.
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Citations
15 Claims
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1. An electromechanical device comprising:
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a frame having an aperture therein;
a plate suspended in said aperture having a reflective surface for reflecting a signal directed to said plate; and
a support structure connected between said frame and plate for supporting said plate along an axis relative to said frame, wherein said support structure has at least one rotational contact that allows said plate to rotate about the axis relative to said frame. - View Dependent Claims (2, 3, 4, 5)
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6. A method for fabricating an electromechanical device having a reflective rotational surface, wherein said method comprises the steps of:
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defining a plate region on a face of a substrate;
defining a frame region on the face of the substrate, wherein the frame region surrounds the plate region and wherein the plate region and the frame region are separated by a sacrificial substrate region;
forming a structure which supports the plate region along an axis relative to the frame region, wherein the support structure has at least one rotational contact that allows the plate region to rotate about the axis relative to frame region;
creating a reflective surface on a surface of the plate region; and
removing the sacrificial substrate region so that the plate region may rotate about the axis relative to the frame region responsive to mechanical forces. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification