Combined enhanced shock load capability and stress isolation structure for an improved performance silicon micro-machined accelerometer

• US 6,257,060 B1
• Filed: 11/02/1999
• Issued: 07/10/2001
• Est. Priority Date: 06/22/1999
• Status: Expired due to Term

• Current Assignee: Alliedsignal Inc. (Honeywell International Inc.)
• Original Assignee: Alliedsignal Inc. (Honeywell International Inc.)
• Inventors: Leonardson, Ronald B., Blake, Graeme A.
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US09/432,306
• Time in Patent Office: 616 Days
• Field of Search: 735/142.9, 738/625.9, 735/143.6, 735/143.7, 737/02, 737/04, 735/143.2, 735/141.5, 735/141.6, 735/143.5, 361/280
• US Class Current: 73/514.29
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends

Abstract

The present invention provides an acceleration sensor and an accelerometer having isolation structure formed using a bulk straight wall deep reactive ion etch process, whereby external stress sources are isolated from active accelerometer components.

Claims

1. An acceleration sensor comprising:

an outer frame member formed of a monocrystalline silicon substrate having essentially parallel opposing surfaces;

an acceleration sensing mechanism disposed within said outer frame member; and

a plurality of flexures suspending said acceleration sensing mechanism from said outer frame member, said flexures having essentially parallel opposing walls extending between said opposing surfaces of said substrate, and wherein said opposing walls of said flexures are disposed in a self-caging relationship to each of said outer frame member and said acceleration sensing mechanism.

2. The acceleration sensor recited in claim 1, wherein:

said outer frame member includes inner walls extending between said opposing surfaces of said substrate and formed essentially perpendicular thereto;

said acceleration sensing mechanism includes outer walls extending between said opposing surfaces of said substrate and formed essentially perpendicular thereto; and

ones of said opposing walls of said flexures are disposed essentially parallel to and spaced away from respective ones of said inner walls of said outer frame member and said outer walls of said acceleration sensing mechanism.

3. The acceleration sensor recited in claim 2, wherein:

a first of said opposing walls of said flexures is spaced away from said inner walls of said outer frame member by 50 micrometers or less; and

a second of said opposing walls of said flexures is spaced away from said outer walls of said acceleration sensing mechanism by 50 micrometers or less.

4. The acceleration sensor recited in claim 3, wherein:

said inner walls of said outer frame member extending between said opposing surfaces of said substrate are formed perpendicularly thereto within one degree; and

said outer walls of said acceleration sensing mechanism extending between said opposing surfaces of said substrate are formed perpendicularly thereto within one degree.

5. The acceleration sensor recited in claim 1, further comprising:

a bottom cover plate;

a top cover plate; and

first and second ones of said opposing surfaces of said outer frame member attached to respective ones of said bottom cover plate and said top cover plate.

6. The acceleration sensor recited in claim 5, wherein:

said bottom cover plate is formed of a monocrystalline silicon substrate and further comprises an outer frame portion suspended from a central mounting portion by a plurality of flexures; and

said first one of said opposing surfaces of said outer frame member having said acceleration sensing mechanism suspended therefrom is attached to said outer frame portion of said bottom cover plate.

7. The acceleration sensor recited in claim 6, wherein said flexures suspending said outer frame portion of said bottom cover plate from said central mounting portion are disposed in a self-caging relationship to each of said outer frame portion and said central mounting portion relative to a force generally perpendicular to opposing surfaces of said substrate.

8. The acceleration sensor recited in claim 6, wherein:

said top cover plate is formed of a monocrystalline silicon substrate and further comprises a plurality of flexures suspending a central plate portion from an outer frame portion; and

said second one of said opposing surfaces of said outer frame member having said acceleration sensing mechanism suspended therefrom is attached to said outer frame portion of said top cover plate.

9. The acceleration sensor recited in claim 8, further comprising an adhesive attaching said outer frame member having said acceleration sensing mechanism suspended therefrom to said each of said top cover plate and said bottom cover plate.

10. A monolithic micro-machined accelerometer having improved shock survivability and external stress de-coupling characteristics, the accelerometer comprising:

an accelerometer mechanism die formed of a first monocrystalline silicon substrate having essentially parallel opposing surfaces, said mechanism die comprising

an integral outer frame member,

an integral acceleration sensing mechanism disposed within said outer frame member, and

a plurality of integral flexures pliantly suspending said acceleration sensing mechanism from said outer frame member, said flexures having essentially parallel opposing surfaces extending between and perpendicular to said opposing surfaces of said substrate, and wherein said opposing surfaces of said flexures are disposed in a self-caging relationship to each of said outer frame and said acceleration sensing mechanism;

a top cover plate formed of a second monocrystalline silicon substrate, said top cover plate including a peripheral bond area adhesively bonded to a first surface of said outer frame member; and

a bottom cover plate formed of a third monocrystalline silicon substrate, said bottom cover plate including a peripheral bond area adhesively bonded to a second surface of said outer frame member opposite said top cover plate.

11. The accelerometer recited in claim 10, wherein said bottom cover plate further comprises an integral outer frame member suspended in a self-caging relationship from an integral inner cover portion formed of said third substrate.

12. The accelerometer recited in claim 11, wherein said self-caging relationship between said outer frame member and said inner cover portion of bottom cover plate is developed by a plurality of flexures connected to and disposed between said outer frame member and said inner cover portion, a first surface of said each of said flexures in close proximity to said outer frame member and a second surface of each of said flexures in close proximity to said inner cover portion.

13. The accelerometer recited in claim 12, wherein said top cover plate further comprises an integral outer frame member suspended in a self-caging relationship from an integral inner cover portion formed of said third substrate, said self-caging relationship developed by a plurality of flexures connected to and disposed between said top cover plate outer frame member and said top cover plate inner cover portion, a first surface of each of said top cover plate flexures in close proximity to said top cover plate outer frame member and a second surface of each of said top cover plate flexures in close proximity to said top cover plate inner cover portion.

14. The accelerometer recited in claim 13, wherein said plurality of integral flexures pliantly suspending said acceleration sensing mechanism from said outer frame member are formed by a deep reaction ion etching process.

15. The accelerometer recited in claim 13, wherein said acceleration sensing mechanism further comprises:

an accelerometer frame member;

a proof mass suspended from said accelerometer frame member by one or more flexures; and

one or more mechanical resonators extending between said accelerometer frame member and said proof mass.

16. A method for sensing force, the method comprising:

providing an acceleration sensing mechanism formed in a monocrystalline silicon substrate having essentially parallel opposing surfaces;

isolating said acceleration sensing mechanism in a self-caging relationship from an outer frame member formed in said substrate.

17. The method recited in 16, wherein said isolating further comprises suspending said acceleration sensing mechanism from said outer frame member by one or more flexures formed in said substrate having essentially parallel opposing walls extending between and essentially perpendicularly to said opposing surfaces of said substrate.

18. The method recited in 17, wherein said isolating further comprises forming said flexures in close proximity to opposing surfaces of each of said acceleration sensing mechanism and said outer frame member.

19. The method recited in 18, further comprising attaching one of said opposing surfaces of said outer frame member to a bottom cover plate and attaching a second of said opposing surfaces of said outer frame member to a top cover plate.

20. The method recited in 19, wherein said attaching one of said opposing surfaces of said outer frame member to a bottom cover plate further comprises attaching said surface of said outer frame member to an outer frame portion of said bottom cover plate isolated in a self-caging relationship from an inner cover portion.

21. The method recited in 20, wherein said outer frame portion of said bottom cover plate is isolated from said inner cover portion by one or more flexures formed in said bottom cover plate having essentially parallel opposing walls extending between and essentially perpendicularly to opposing surfaces of said bottom cover plate.

22. The method recited in 20, wherein said attaching second of said opposing surfaces of said outer frame member to a top cover plate further comprises attaching said surface of said outer frame member to an outer frame portion of said top cover plate isolated in a self-caging relationship from an inner cover portion.

23. The method recited in 22, further comprising bonding a surface of said inner cover portion of said bottom cover plate to an accelerometer mounting plate.

24. The method recited in 23, wherein said bonding a surface of said inner cover portion of said bottom cover plate to an accelerometer mounting plate further comprises disposing a bonding adhesive over essentially the entire interface between said inner cover portion of said bottom cover plate and said accelerometer mounting plate.