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Combined enhanced shock load capability and stress isolation structure for an improved performance silicon micro-machined accelerometer

  • US 6,257,060 B1
  • Filed: 11/02/1999
  • Issued: 07/10/2001
  • Est. Priority Date: 06/22/1999
  • Status: Expired due to Term
First Claim
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1. An acceleration sensor comprising:

  • an outer frame member formed of a monocrystalline silicon substrate having essentially parallel opposing surfaces;

    an acceleration sensing mechanism disposed within said outer frame member; and

    a plurality of flexures suspending said acceleration sensing mechanism from said outer frame member, said flexures having essentially parallel opposing walls extending between said opposing surfaces of said substrate, and wherein said opposing walls of said flexures are disposed in a self-caging relationship to each of said outer frame member and said acceleration sensing mechanism.

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