Vaporization and deposition apparatus

• US 6,258,170 B1
• Filed: 09/11/1997
• Issued: 07/10/2001
• Est. Priority Date: 09/11/1997
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Wang, Chris, Zhao, Jun, Ku, Vincent, Chang, Frank, Somekh, Sasson, Sajoto, Talex, Dornfest, Charles, Tang, Po, Selyutin, Leonid
• Primary Examiner(s): Tentoni, Leo B.
• Application Number:
  US08/927,700
• Time in Patent Office: 1,398 Days
• Field of Search: 118/715, 118/724, 118/726, 118/728, 156/345, 165/168, 165/169, 261/100, 261/103, 261/104, 261/106, 261/107, 261/142, 261/154, 261/DIG.65, 392/304, 392/342, 392/394, 392/399, 392/401
• US Class Current: 118/715
• CPC Class Codes: C23C 16/4401 Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
• CPC Class Codes: C23C 16/4409 characterised by sealing means
• CPC Class Codes: C23C 16/4412 Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
• CPC Class Codes: C23C 16/4481 by evaporation using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C23C 16/45561 Gas plumbing upstream of the reaction chamber
• CPC Class Codes: C23C 16/4557 Heated nozzles
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence
• CPC Class Codes: Y10S 261/65 Vaporizers
• CPC Class Codes: Y10T 137/87684 Valve in each inlet

Abstract

The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process for the deposition of a metal-oxide film, such as a barium, strontium, titanium oxide (BST) film, on a silicon wafer to make integrated circuit capacitors useful in high capacity dynamic memory modules.

Claims

1. A process chamber for depositing a film, comprising:

a) a chamber body forming an enclosure having one or more temperature controlled surfaces;

b) a lid movably mounted on the chamber body, the lid having a heated main body and an outer temperature controlled collar;

c) a heated gas distribution assembly comprising a gas manifold connected to a gas distribution member, the gas manifold adapted to deliver one or more gases into the gas distribution member, and;

d) an exhaust port connected to the chamber body, the exhaust port having a temperature controlled liner disposed therein.

2. The process chamber of claim 1 wherein the chamber body defines one or more gas passages therethrough.

3. The process chamber of claim 2 wherein the one or more gas passages comprise a channel formed in the chamber body and at least one of the passages comprise a temperature controlled feedthrough positionable within the channel, the temperature controlled feedthrough having a heating element disposed therein.

4. The process chamber of claim 3 wherein the main body of the lid is comprised of a thermally conductive material and a thermocouple is disposed in the main body of the lid to monitor the temperature of the lid and adjacent gas distribution assembly.

5. The chamber of claim 3 wherein the one or more gas passages comprise an inlet and an outlet and the outlet is adapted to form a sealed gas passage with a gas passage in the gas manifold.

6. The chamber of claim 4 wherein the main body of the lid is maintainable at a temperature greater than about 20°

C. and the outer collar is maintainable at a temperature less than about 250°

C.

7. The chamber of claim 6 further comprising a coolant channel formed in the outer collar.

8. The chamber of claim 7 further comprising a thermally isolatable seal disposed between the outer collar of the lid and the chamber body.

9. The chamber of claim 1 wherein the one or more temperature controlled surfaces comprise a liner positionable within the chamber.

10. The chamber of claim 9 wherein the liner is supported on one or more supports disposed on the lower portion of the liner.

11. The chamber of claim 10 wherein the liner is thermally floating in the chamber.

12. The chamber of claim 9 wherein the liner comprises a heating element disposed therein and the liner is supported in the chamber on one or more supports and the heating element is connected to a power source.

13. The chamber of claim 12 wherein the liner is comprised of a material selected from the group consisting of titanium, stainless steel, nickel, aluminum, aluminum oxide, barium strontium titanate, aluminum nitride, silicon carbide or combinations thereof.

14. The chamber of claim 13 wherein the liner is maintainable at a temperature of at least about 50°

C.

15. The chamber of claim 1 wherein the lid defines a channel between the main body of the lid and the outer temperature controlled collar to define a thermally restrictive conducting outer temperature controlled collar.

16. The chamber of claim 15 further comprising a support member disposed in the channel.

17. The chamber of claim 16 wherein the lid is comprised of aluminum and the support member is comprised of stainless steel.

18. The chamber of claim 17 wherein the lid further comprises a lower mounting surface on the outer collar having one or more cooling passages formed therein.

19. The chamber of claim 18 wherein the lid further comprises a heating element disposed adjacent the main body member.

20. The chamber of claim 19 wherein the lid further comprises a cooling plate disposed on the main body member.

21. The chamber of claim 1 wherein the chamber body further comprises one or more gas channels formed therethrough and connected to the one or more gas manifolds.

22. The chamber of claim 21 further comprising a vaporizer connected to at least one of the gas channels formed in the chamber body.

23. The chamber of claim 22 wherein the vaporizer comprises:

a) one or more inlets;

b) a temperature controlled body member defining a plurality of fluid passages having a plurality of vaporizing surfaces disposed therein; and

c) one or more outlets connected to the one or more fluid passages.

24. The chamber of claim 23 wherein the body member of the vaporizer includes one or more heating elements connected thereto.

25. The chamber of claim 24 wherein the vaporizer further comprises one or more thermocouples disposed therein to monitor the temperature of the vaporizer.

26. The chamber of claim 23 wherein the inlet comprises a nozzle and a circumferential fluid passage disposed around the nozzle and the plurality of vaporizing surfaces comprise a plurality of fins disposed along one or more fluid passages.

27. The chamber of claim 22 further comprising one or more pressurized ampules connected to the vaporizer.

28. The chamber of claim 27 wherein the one or more ampules have a tapered inner chamber lower portion.

29. The chamber of claim 28 wherein the ampule further comprises a volume detector.

30. The chamber of claim 29 wherein the volume detector comprises an ultra-sonic type detector.

31. The chamber of claim 27 wherein the ampule is chargeable up to about 500 psig.

32. The chamber of claim 23 further comprising a bypass line connected between the one or more outlets of the vaporizer and the one or more fluid channels formed in the chamber body.

33. The chamber of claim 32 wherein the bypass line is connected to an exhaust pump and a cold trap is disposed in the bypass line upstream from the exhaust pump.

34. The chamber of claim 33 further comprising a valve member disposed between the outlet, the fluid channels and the bypass line.

35. The chamber of claim 1 further comprising a substrate support member disposed in the chamber.

36. The chamber of claim 35 wherein the substrate support member comprises an electrode disposed therein and a power source connected to the electrode.

37. The chamber of claim 36 further comprising a shield ring disposed in the chamber around the edge of the substrate support member.

38. The chamber of claim 37 wherein the shield ring is comprised of a material having a coefficient of expansion approximately equal to that of the deposition material.

39. The chamber of claim 38 wherein the shield ring is comprised of a material selected from the group comprising titanium, aluminum oxide, or combinations thereof.

40. The chamber of claim 5 wherein the seal formed between the heated gas passages and the gas manifolds comprise a spring loaded seal.

41. The chamber of claim 40 wherein the spring loaded seal is comprised of Teflon.

42. The chamber of claim 1 further comprising first and second exhaust passages disposed in the exhaust port.

43. The chamber of claim 42 further comprising a high vacuum pump connected to the first exhaust passage and selectively isolatable therefrom by a valve member.

44. The chamber of claim 43 further comprising an exhaust pump connected to the second exhaust passage.

45. The chamber of claim 44 further comprising a removable cold trap disposed between the exhaust pump and the exhaust port.

46. The chamber of claim 43 wherein the valve member comprises a gate valve.

47. The chamber of claim 3 wherein the gas distribution assembly is mounted on the lid and forms a seal with the heated gas passages to provide sealed fluid flow therebetween.