Liquid chromatograph on a chip

• US 6,258,263 B1
• Filed: 09/17/1999
• Issued: 07/10/2001
• Est. Priority Date: 09/17/1999
• Status: Expired due to Term

• Current Assignee: University of Cincinnati
• Original Assignee: University of Cincinnati
• Inventors: Henderson, H. Thurman, deGouvea-Pinto, Neville R.
• Primary Examiner(s): Therkorn, Ernest G.
• Application Number:
  US09/398,847
• Time in Patent Office: 662 Days
• Field of Search: 204/600, 204/601, 204/602, 204/603, 204/604, 204/605, 204/451, 204/452, 204/453, 204/454, 204/455, 204/456, 204/450, 210/635, 210/656, 210/659, 210/198.2, 422/68.1, 422/69, 422/70
• US Class Current: 210/198.2
• CPC Class Codes: G01N 30/466 with separation columns in parallel
• CPC Class Codes: G01N 30/60 Construction of the column
• CPC Class Codes: G01N 30/6043 in parallel
• CPC Class Codes: G01N 30/6095 Micromachined or nanomachined, e.g. micro- or nanosize

Abstract

A chromatograph fabricated using microelectromechanical techniques. The chromatograph includes a first layer superimposed over a second layer. At least one micro-channel is etched into the second layer to provide the separation column of the chromatograph. The surfaces of the micro-channel are chemically activated in order to separate the components of a sample flowing through the micro-channel by bonded phase chemistry. A third layer is placed in superimposed relationship with the second layer. At least one pair of electrodes is formed to the third layer with at least a portion of the electrodes internal to the micro-channel of the second layer. The electrodes detect separated components flowing through the micro-channel and identify them by their electrical conductivity. The depth of the micro-channel is greater than the width, thereby minimizing pressure drop across the device and allowing the chromatograph to operate with a high degree of speed, sensitivity and accuracy. Good resolution is obtained with narrow integrated electrodes for sensing the separated components of the sample.

Claims

1. A chromatograph comprising:

a first layer, having a thickness and a second layer having a thickness, said second layer having a top side and a bottom side, said first layer in a superimposed relationship with said top side of said second layer;

at least one micro-channel etched into said second layer having a depth into said second layer and a width, wherein the depth of said micro-channel is greater than the width of said micro-channel;

at least one pair of electrodes formed on the chromatograph, at least a portion of said pair of electrodes being exposed to an internal portion of said micro-channel;

a fluid inlet port disposed in said first layer and operatively connected to said micro-channel; and

a fluid outlet port disposed in said first layer and operatively connected to said micro-channel;

whereby fluid passing through said inlet port and into and through said micro-channel will be chromatographically separated into components and pass over said pair of electrodes and out of said micro-channel and to said outlet port.

2. The chromatograph of claim 1 further comprising a third layer having a thickness, said third layer in a superimposed relationship with said bottom side of said second layer.

3. The chromatograph of claim 2 wherein said at least one pair of electrodes is formed on said third layer.

4. The chromatograph of claim 2 wherein said third layer is annular.

5. The chromatograph of claim 4 wherein the diameter of said third layer is in the range of about 20 millimeters to about 150 millimeters.

6. The chromatograph of claim 5 wherein the thickness of said third layer is in the range of about 0.5 millimeters to about 0.75 millimeters.

7. The chromatograph of claim 6 wherein said third layer includes glass.

8. The chromatograph of claim 7 wherein said third layer is electrostatically bonded to said bottom side of said second layer.

9. The chromatograph of claim 1 includes wherein said second layer includes silicon.

10. The chromatograph of claim 9 wherein said second layer is annular.

11. The chromatograph of claim 10 wherein the diameter of said second layer is in the range of about 20 millimeters to about 150 millimeters.

12. The chromatograph of claim 11 wherein the thickness of said second layer is in the range of about 0.005 millimeters to about 100 millimeters.

13. The chromatograph of claim 1 wherein the width of said micro-channel is in the range of about 0.001 millimeters to about 0.250 millimeters.

14. The chromatograph of claim 13 wherein said micro-channel has an aspect ratio of about 5 to about 400.

15. The chromatograph of claim 1 wherein the surfaces of said micro-channel are chemically activated.

16. The chromatograph of claim 15 wherein said surfaces are chemically activated by 10-glycidoxypropyltrimethoxysilane.

17. The chromatograph of claim 15 wherein said surfaces are chemically activated by polyethyleneimine.

18. The chromatograph of claim 15 wherein said surfaces are chemically activated by polyethyleneimine in methanol.

19. The chromatograph of claim 1 wherein said at least one pair of electrodes includes gold.

20. The chromatograph of claim 19 wherein each electrode of said at least one pair of electrodes has an area in the range of about 0.000025 millimeters² to about 0.01 millimeters².

21. The chromatograph of claim 1 wherein said at least one pair of electrodes is operatively connected to a first bonding pad having an area in the range of about 0.001 millimeters² to about 1 millimeter².

22. The chromatograph of claim 21 wherein said at least one pair of electrodes is operatively connected to said first bonding pad by metal lines, said metal lines having a width in the range of about 0.005 millimeters to about 1 millimeter.

23. The chromatograph of claim 22 wherein said first bonding pad is operatively connected to an external second bonding pad having an area in the range of about 0.0001 millimeters² to about 1 millimeter².

24. The chromatograph of claim 1 wherein said first layer includes glass.

25. The chromatograph of claim 24 wherein said first layer is annular.

26. The chromatograph of claim 25 wherein the diameter of said first layer is in the range of about 22 millimeters to about 153 millimeters.

27. The chromatograph of claim 26 wherein the thickness of said first layer is about 0.6 millimeters to about 0.78 millimeters.

28. The chromatograph of claim 27 wherein said first layer is electrostatically bonded to said top side of said second layer.

29. The chromatograph of claim 1 further comprising a plurality of micro-channels and said inlet port is operatively connected to said micro-channels by fingers radiating from said inlet port through said first layer and to said micro-channels for transporting carrier from said inlet port to said channels.

30. The chromatograph of claim 29 further comprising a first nipple associated with said first layer and circumferential about said fluid inlet port, whereby said first nipple is operatively connected to an external pumping system for introducing a carrier through said first nipple and into said fluid inlet port.

31. The chromatograph of claim 30 wherein said outlet port is operatively connected to said micro-channels by fingers radiating from said outlet port through said first layer and to said micro-channels for transporting carrier from said micro-channels to said outlet port.

32. The chromatograph of claim 31 further comprising a second nipple associated with said first layer and circumferential about said fluid outlet port, whereby said second nipple is operatively connected to an external pumping system for depositing a carrier through said second nipple and out through said fluid outlet port.