Low cost mixed memory integration with FERAM
First Claim
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1. A semiconductor memory device, comprising:
- a FERAM cell structure;
a SRAM cell structure, and a DRAM cell structure;
wherein said FERAM structure, said SRAM cell structure and said DRAM cell structure are on the same substrate and have gate surfaces which are substantially coplanar.
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Abstract
A semiconductor memory device including at least three different types of memory cell structures. The types include an NVRAM cell structure, an FERAM cell structure, a DRAM cell structure, and an SRAM cell structure. The cell structures are disposed on the same substrate.
77 Citations
7 Claims
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1. A semiconductor memory device, comprising:
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a FERAM cell structure;
a SRAM cell structure, and a DRAM cell structure;
wherein said FERAM structure, said SRAM cell structure and said DRAM cell structure are on the same substrate and have gate surfaces which are substantially coplanar. - View Dependent Claims (2, 3, 4)
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5. A semiconductor memory device, comprising:
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a FERAM cell structure;
a SRAM cell structure, and a NVRAM cell structure;
wherein all of said cell structures are on the same substrate and include gate surfaces which are substantially coplanar.- View Dependent Claims (6)
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7. A semiconductor memory device, comprising:
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a DRAM cell structure;
an NVRAM cell structure;
SRAM cell structure, and a FERAM cell structure;
wherein all of said cell structures are on the same substrate and have sate surfaces which are substantially coplanar.
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Specification