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Method of determining the planar inclination of a surface

  • US 6,259,519 B1
  • Filed: 08/31/1999
  • Issued: 07/10/2001
  • Est. Priority Date: 08/31/1999
  • Status: Expired due to Fees
First Claim
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1. A method of determining the planar inclination of a surface comprising the steps of:

  • modulating each of three lasers positioned within a sensor body with a different sine wave frequency based on stored values within a wave-table by superimposing onto the emitted light beam from each laser the respective sine wave frequency;

    emitting the light beam from each laser onto a surface to be analyzed;

    scattering the light beam emitted from each laser onto a respective position sensitive detector formed from a semiconductor chip that is positioned within the sensor body;

    demodulating each light beam by;

    producing electrical signals from each respective position sensitive detector corresponding to the position of the scattered light beam, and integrating the electrical signals by values in the wave-table to obtain demodulated values; and

    calculating the planar inclination of the surface based on the demodulated values.

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