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Passivation for micromechanical devices

  • US 6,259,551 B1
  • Filed: 09/27/1999
  • Issued: 07/10/2001
  • Est. Priority Date: 09/30/1998
  • Status: Active Grant
First Claim
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1. A micromechanical device, comprising:

  • a. a structure with at least one moving element that comes into contact with other surfaces;

    b. a passivation layer on said moving element, said passivation layer comprised of materials with cross-linking capabilities; and

    c. a package containing said structure.

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