Part-inspecting system

• US 6,259,960 B1
• Filed: 10/31/1997
• Issued: 07/10/2001
• Est. Priority Date: 11/01/1996
• Status: Expired due to Fees

• Current Assignee: JEOL Limited
• Original Assignee: JOEL Ltd.
• Inventors: Inokuchi, Masayuki
• Primary Examiner(s): Gordon, Paul P.
• Assistant Examiner(s): PATEL, RAMESH B
• Application Number:
  US08/962,585
• Time in Patent Office: 1,348 Days
• Field of Search: 364/468.02, 364/468.15, 364/468.16, 364/468.17, 250/306, 250/307, 250/310, 382/21, 382/27, 382/50, 382/52, 382/54, 382/56, 702/33-40
• US Class Current: 700/110
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10

Abstract

There is disclosed a part inspecting system that can be easily operated by a human operator. This system has an inspected part information database holding part search information, preliminary inspection information, and review information. The part search information contains information about the positions and sizes of defects present on inspected parts. The review information is obtained from a review apparatus that makes a detailed inspection of the inspected parts. Each inspected part is set on an inspected part-holding member. Apart kind discriminating means is provided to permit the user to enter the kind of the inspected part. A preliminary inspection reading fetches preliminary inspection information about the inspected part specified by the part kind discriminating from the inspected part information database. The user selects a desired one from defects contained in the fetched preliminary inspection information. The selected defect is reviewed, or undergone a detailed inspection. The resulting information is stored in the inspected part information database.

Claims

1. A part-inspecting system comprising:

(1) do computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying defects on an already preliminarily inspected part, and positional information about positions of defects present on said inspected part determined on a preliminary inspection apparatus, and

(b) a review information database for storing part search information useful in identifying said inspected part and review information obtained by a review inspection of said preliminarily inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member may be disposed;

(3) a review apparatus comprising;

(a) a microscope and said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for reading preliminary inspection information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information input means;

(4) a selecting means for selecting a defect to be reviewed from defects contained in said preliminary inspection information read in by said preliminary inspection reading means;

(5) a review information registration means for storing review information obtained by reviewing said selected defect in said inspected part information database;

(6) inspected part moving means for moving said XY-table to bring said inspected part held by said inspected part-holding member into target X- and Y-coordinates; and

(7) a misalignment correcting means having;

(a) set condition coordinate deviation amount detecting means for detecting amounts of deviations of x- and y-coordinates of a part position reference point on said preliminary inspection apparatus detected by said preliminary inspection apparatus from X- and Y-coordinates of said reference point on said review apparatus when said inspected part is set on said inspected part-holding member, and

(b) reference point coinciding moving means for causing said inspected part to move distances equal to said detected amounts of deviations to bring said x- and y-coordinates of said reference point into agreement with said X- and Y-coordinates.

2. The part-inspecting system of claim 1, wherein said review apparatus consists of a scanning electron microscope used for reviews, and wherein said scanning electron microscope comprises an electron beam scanning device for scanning said inspected portion in a scanned range according to the magnification set by said magnification setting means with an electron beam, a particle detecting means for detecting particles emitted from a surface of said inspected part scanned by said electron beam scanning device, and a scanned image photographing means for creating a scanned image within a plane scanned by said electron beam from a scanning position of said electron beam and from an output signal from said particle detecting means.

3. The part-inspecting system of claim 1, wherein said review apparatus consists of an optical microscope used for reviews, and wherein said optical microscope photographs an optical image in said desired inspection position.

4. The part-inspecting system of any one of claims 1-3, wherein said misalignment correcting means has a reference point coordinate calculating means for calculating X- and Y-coordinates of said part position reference point from X- and Y-coordinates of plural part position detection positions on an arc on said inspected part provided that said inspected part is an unpatterned bare wafer having arc-shaped fringes, said arc having a center point at which said part position reference point is established.

5. The part-inspecting system of any one of claims 1-3, wherein said misalignment correcting means brings said x- and y-coordinates of said part position reference point of said inspected part into agreement with the X- and Y-coordinates provided that said inspected part is a patterned wafer and that said part position reference point is established on a certain pattern on said inspected part.

6. The part-inspecting system of claim 5, wherein said misalignment correcting means brings said x- and y-coordinates of said part position reference point of said inspected part into agreement with the X- and Y-coordinates provided that said inspected part is a wafer patterned into identical chips and that said part position reference point is established on a certain chip on said inspected part.

7. The part-inspecting system of claim 1, wherein said misalignment means is designed so that said part position reference point is established on a defect detected by said preliminary inspection apparatus for said inspected part.

8. A part-inspecting system comprising:

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information including part search information helpful in identifying defects on an already preliminarily inspected part, and positional information about positions of defects present on said inspected part, and information about sizes of said defects determined by a preliminary inspection apparatus, and

(b) a review information database for storing part search information helpful in identifying said inspected part and review information obtained by a review inspection of said preliminarily inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member may be disposed;

(3) a review apparatus comprising;

(a) a microscope and said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for reading information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information means;

(4) a selecting means for selecting a defect to be reviewed from defects contained in said preliminary inspection information read in by said preliminary inspection reading means;

(5) a review information registrations means for storing review information obtained by reviewing said selected defect in said inspected part information database;

(6) inspected part moving means for moving said XY-table to bring said inspected part held by said inspected part-holding member into target X- and Y-coordinates;

(7) set state coordinate deviation amount detecting means for detecting amounts of deviations of x- and y-coordinates of said part position reference point of said inspected part detected by said preliminary inspection apparatus from X- and Y-coordinates of said part position reference point on said review apparatus when said part is set on said inspected part-holding member; and

(8) target coordinate correcting means for correcting target coordinates of said part position reference point assumed after the movement of said inspected part according to said amounts of deviations of said inspected part.

9. The part-inspecting system of claim 8, further comprising a reference point coordinate calculating means for calculating X- and Y-coordinates of said part position reference point from X- and Y-coordinates of plural part position detection positions on an arc on said inspected part provided that said inspected part is an unpatterned bare wafer having arc-shaped fringes, said arc having a center point at which said part position reference point is established.

10. The part-inspecting system of claim 8, wherein said set state coordinate deviation amount detecting means are designed to detect amounts of deviations of said x- and y-coordinates of a pattern on said inspected part from X- and Y-coordinates of said pattern provided that said inspected part is a wafer patterned into fine lines and that said part position reference point is established on a given one of said fine lines.

11. The part-inspecting system of claim 10, wherein said set state coordinate deviation amount detecting means are designed to detect amounts of deviations of said x- and y-coordinates of a certain chip on said inspected part from X- and Y-coordinates of said pattern provided that said inspected part is a wafer patterned into identical chips and that part position reference points are established on certain chips of the inspected part.

12. The part-inspecting system of claim 8, wherein said part position reference point is established on a defect on said inspected part detected by said preliminary inspection apparatus, and wherein said set state coordinate deviation amount detecting means are designed to detect amounts of deviations of said x- and y-coordinates of said defect on said inspected part from X- and Y-coordinates of said defect on said review apparatus when said part is set in said inspected part-holding member.

13. A part-inspecting system comprising:

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying defects on a preliminarily inspected part, and positional information about positions of defects present on said inspected part, and information about sizes of said defects determined on a preliminary inspection apparatus, and

(b) a review information database for storing review information obtained by a review inspection of said preliminarily inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member may be disposed;

(3) a review apparatus comprising;

(a) a microscope and said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary inspection information reading means for reading information about a preliminary inspection of said inspected part from said inspected part information database according to said information entered by said part search information input means;

(4) a review information registration means for storing review information obtained by reviewing a defect in said inspected part information database, said defect being selected from defects contained in said preliminary inspection information read by said preliminary inspection information reading means;

(5) a rotating table capable of adjusting the angular position of said inspected part-holding member about an axis of rotation perpendicular to said X- and Y-axes;

(6) an angular position specifying means for specifying the angular position of said rotating table;

(7) a rotation control means for rotating said rotating table so that said inspected part held by said inspected part-holding member moves into a target angular position specified by said angular position specifying means within an X-Y plane;

(8) a set state angular position detecting means for detecting the angular position of said inspected part within the X-Y plane when said inspected part is set on said inspected part-holding member;

(9) an angular position deviation detecting means for detecting amounts of deviations of x- and y-coordinates of the angular position of said inspected part on said preliminary inspection apparatus detected by said preliminary inspection apparatus from X- and Y-coordinates of the angular position of said part when said part is set; and

(10) a misalignment correcting means having an angular position coinciding rotating means for rotating said rotating table through an angle equal to said detected amount of deviation so that the x- and y-coordinates of said angular position of said inspected part agree with the X- and Y-coordinates of the angular position when the part is set.

14. The part-inspecting system of claim 13, wherein said set state angular position detecting means comprises:

(a) a reference point coordinate calculating means for calculating X- and Y-coordinates of said part position reference point from X- and Y-coordinates of plural part position detection points on an arc on said inspected part provided that said inspected part is an unpatterned bare wafer having arc-shaped fringes, said arc having a center point at which said part position reference point is established, said arc having indicia indicating angular position detection points of said part;

(b) angular position detection point coordinate detecting means for detecting X- and Y-coordinates of said part angular position detection points; and

(c) means for detecting X- and Y-coordinates of the angular position of said inspected part from X- and Y-coordinates of said part position reference points and of said part angular position detection points when said inspected part is set on said inspected part-holding member.

15. The part-inspecting system of claim 13, wherein said set state angular position detecting means is designed to detect X- and Y-coordinates of part position detection points established on said inspected part where said inspected part is a patterned wafer and set on said inspected part-holding member and to determine the angular position of said wafer from the detected X- and Y-coordinates.

16. A part-inspecting system comprising:

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying defects on a preliminarily inspected part, positional information about positions of defects present on said inspected part, and information about sizes of said defects determined on a preliminary inspection apparatus, and

(b) a review information database for storing review information obtained by a review inspection of said preliminarily inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member is disposed;

(3) a review apparatus comprising;

(a) a microscope and said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part held on said inspected part-holding member into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for reading information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information input means;

(4) a review information registration means for storing review information obtained by reviewing a first defect in said inspected part information database, said first defect being selected from defects contained in said preliminary inspection information read by said preliminary information reading means;

(5) a rotating table capable of adjusting the angular position of said inspected part-holding member about an axis of rotation perpendicular to said X- and Y-axes;

(6) an angular position specifying means for specifying the angular position of said rotating table;

(7) a rotation control means for rotating said rotating table 0o that said inspected part held by said inspected part-holding member moves into X- and Y-coordinates of a target angular position corresponding to an angular position specified by said angular position specifying means;

(8) a set state angular position detecting means for detecting the X- and Y-coordinates of the angular position of said inspected part when said inspected part is set on said inspected part-holding member;

(9) an angular position deviation amount detecting means for detecting amounts of deviations of the x- and y-coordinates of the angular position of said inspected part on said preliminary inspection apparatus detected by said preliminary inspection apparatus from the X- and Y-coordinates of the angular position of said part when it is set; and

(10) target coordinate correcting means for correcting said target angular position of said inspected part during rotation of said inspected part according to the detected amounts of deviations.

17. A part-inspecting system comprising:

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying defects on a preliminarily inspected part, positional information about positions of defects present on said inspected part, and information about sizes of said defects determined by a preliminary inspection apparatus, and

(b) a review information database for storing review information obtained by a review inspection of said inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member may be disposed;

(3) a review apparatus comprising;

(a) a microscope and said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part held on said inspected part-holding member into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for reading information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information input means;

(4) a review information registration means for storing review information obtained by reviewing a first defect in said inspected part information database, said first defect being selected from defects contained in said preliminary inspection information;

said review information database holding information about an observational position set on said inspected part and observational information having amounts of features defined in terms of numerical values representing a reference image in said observational position, a magnification of said reference image, and features of images, said reference image being a normal microscope image in said observational position; and

(5) an automatic shape monitoring means for comparing an evaluation value determined by an amount of features of an actual microscope image in the observational position set on said inspected part with a reference evaluation value determined according to the amount of features of said reference image and judging said image to be defective if the evaluation value of said image differs from said reference evaluation value by more than a given value.

18. The part-inspecting system of claim 17, wherein said automatic shape monitoring means has an automatic tracking means for displaying an actual microscope image at the same magnification as said reference image according to information about the magnification of said reference image.

19. The part-inspecting system of claim 17 or 18, wherein said inspected part information database has a defective shape monitoring database and a defective image sorting-and-registration means which, if the actual microscope image is judged to be defective, gives a sort code indicating a fault to said actual microscope image, and registers it in said defective image monitoring database.

20. A part-inspecting system

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including:

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying defects on a preliminarily inspected part, positional information about positions of defects present on said inspected part, and information about sizes of said defects determined on a preliminary inspection apparatus, and

(b) a review information database for storing review information obtained by a review inspection of said preliminarily inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member may be disposed;

(3) a review apparatus comprising;

(a) a scanning beam microscope having an optical axis and said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part held on said inspected part-holding member into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for reading information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information input means;

(4) a review information registration means for storing review information obtained by reviewing a first defect in said inspected part information database, said first defect being selected from defects contained in said preliminary inspection information;

(5) observational information including identification information used to identify a portion whose dimensions should be measured; and

(6) an automatic length measuring means for measuring dimensions of said portion identified by said identification information on an actual microscope image in an observational position set on said inspected part.

21. The part-inspecting system of claim 20, further comprising:

(7) a tilt stage capable of adjusting a tilt position of said inspected part-holding member about a tilting axis perpendicular to the optical axis of said microscope;

(8) a tilt angle specifying means for specifying a tilt angle of said tilt stage; and

(9) a tilt control means for tilting said tilt stage according to a tilt angle specified by said tilt angle specifying means;

said observational information including information used to identify a portion whose dimension taken in the direction of thickness perpendicular to a plane scanned by the electron beam is to be measured;

said automatic length measuring means being designed to calculate the dimension taken in the direction of thickness from measured amounts of movement of two opposite measurement points across an actual microscope image made when said tilt stage is tilted, said two opposite measurement points being established on their respective opposite end surfaces having two opposite ends, respectively, of said portion whose dimension is to be measured.

22. A part-inspecting system comprising:

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying defects on a preliminarily inspected part, positional information about positions of defects present on said inspected part, and information about sizes of said defects determined on a preliminary inspection apparatus, and

(b) a review information database for storing review information obtained by a review, or detailed inspection, of said inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member is disposed;

(3) a review apparatus comprising;

(a) a microscope having an optical axis and said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part held on said inspected part-holding member into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for reading information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information input means;

(4) a review information registration means for storing review information obtained by reviewing a first defect in said inspected part information database, said first defect being selected from defects contained in said preliminary inspection information; and

(5) an automatic defect moving means for moving said XY-table according to the positional information contained in said preliminary inspection information about said selected defect to bring the selected defect into said review position.

23. A part-inspecting system comprising:

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying a preliminarily inspected part, positional information about positions of defects present on said inspected part, and information about sizes of said defects determined on a preliminary inspection apparatus, and

(b) a review information database for storing review information obtained by a review inspection of said inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member may be disposed;

(3) a review apparatus comprising;

(a) a microscope having an optical axis and said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part held on said inspected part-holding member into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for reading information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information means;

(4) a review information registration means for storing review information obtained by reviewing a first defect in said inspected part information database, said first defect being selected from defects contained in said preliminary inspection information; and

(5) an automatic centering means having a defect center deviation amount measuring means for measuring an amount of deviation of a center of said defect from a center of the microscope image of the defect in said review position and a defect center moving means for causing said defect to move a distance equal to said measured amount of deviation, thus bringing the defect into the center of the microscope image.

24. The part-inspecting system of claim 23, further comprising:

(6) a rotating table capable of adjusting an angular position of said inspected part-holding member about an axis of rotation perpendicular to said X- and Y-axes;

(7) an angular position specifying means for specifying an angular position of said rotating table;

(8) a tilt control means for tilting said tilt stage according to a tilt angle specified by said tilt angle specifying means; and

(9) a rotated image tracking means having a rotation control means for rotating said rotating table by tilting it by increments of angle until said table is rotated through an angle specified by said angular position specifying means, an incremental angle setting means for setting said increments of angle, and a rotated state centering operating means for operating said automatic centering means whenever said rotating table is rotated through said increment of angle.

25. The part-inspecting system of claim 23, further comprising:

(6) a tilt stage capable of adjusting a tilt position of said inspected part-holding member about a tilting axis perpendicular to the optical axis of said microscope;

(7) a tilt angle specifying means for specifying a tilt angle of said tilt stage; and

(8) a rotated image tracking means having a tilt control means for tilting said rotating table by tilting it by increments of angle until said table is rotated through an angle specified by said tilt angle specifying means, an incremental angle setting means for setting said increments of angle, and a rotated state centering operating means for operating said automatic centering means whenever said rotating table is rotated through said increment of angle.

26. A part-inspecting system comprising:

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying defects on a preliminarily inspected part, positional information about positions of defects present on said inspected part, and information about sizes of said part determined on a preliminary inspection apparatus, and

(b) a review information database for storing review information obtained by a review inspection of said inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member may be disposed;

(3) a review apparatus comprising;

(a) a microscope having an optical axis said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part held on said inspected part-holding member into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for reading information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information input means;

(4) a review information registration means for storing review information obtained by reviewing a first defect in said inspected part information database, said first defect being selected from defects contained in said preliminary inspection information; and

(5) an automatic field of view adjusting means comprising an automatic field of view adjustment commanding means for commanding automatic field of view adjustment so that a defect is displayed in appropriate size on said microscope image and said microscope magnification setting means for adjusting the magnification of the microscope image according to the size of the defect where the automatic field of view adjustment is commanded.

27. A part-inspecting system comprising:

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying defects on a preliminarily inspected part, positional information about positions of defects present on said inspected part, and information about sizes of said defects, and

(b) a review information database for storing review information obtained by a review inspection of said inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member may be disposed;

(3) a review apparatus comprising;

(a) a microscope having an optical axis and said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part held on said inspected part-holding member into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for reading information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information input means;

(4) a review information registration means for storing review information obtained by reviewing a first defect in said inspected part information database, said first defect being selected from defects contained in said preliminary inspection information;

said inspected part information database holding microscope images of defects produced on said inspected part together with sort codes representing kinds of the defects; and

(5) a defect image sorting database holding amounts of features represented in terms of numerical values associated with sizes and shapes of said defects.

28. The part-inspecting system of claim 27, wherein said defect image sorting database holds numerical values associated with luminances of defects and representing amounts of features of the defects.

29. The part-inspecting system of claim 27 or 28, further comprising:

(6) an evaluation value calculating means for calculating an evaluation value from the amount of features of the microscope image of a defect on the inspected part before a sort code is given to the defect, said evaluation value being determined according to said amount of features; and

(7) a defect sorting means for giving the same sort code to the defect to which said sort code is not yet given as the code given to a defect that produces a small difference in evaluation value between the microscope image of a sort-coded defect stored in the defect image sorting database and the microscope image of the uncoded defect.

30. The part-inspecting system of claim 27 or 28, further comprising:

(6) an evaluation calculating means for calculating an evaluation value from the amount of features of the microscope image of an uncoded defect on the inspected part, said evaluation value being determined according to said amount of features; and

(7) similar image finding means for searching said defect image sorting database for images having evaluation values producing small differences with the evaluation value of the microscope image of the uncoded defect registered in the defect image sorting database and for displaying the found images, said small differences lying in a given range.

31. A part-inspecting system comprising:

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying defects on a preliminarily inspected part, positional information about positions of defects present on said inspected part, and information about sizes of said defects determined on a preliminary inspection apparatus and

(b) a review information database for storing review information obtained by a review inspection of said inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member may be disposed;

(3) a review apparatus comprising;

(a) a microscope having an optical axis said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part held on said inspected part-holding member into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for reading information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information input means;

(4) a review information registration means for storing review information obtained by reviewing a first defect in said inspected part information database, said first defect being selected from defects contained in said preliminary inspection information; and

(5) an intelligent defect information processing means for automatically selecting a defect to be reviewed from said preliminary inspection information.

32. The part-inspecting system of claim 31, wherein said intelligent defect information processing means has a condition validity judging means for judging whether a defect represented by said preliminary inspection information satisfies certain conditions and a review defect selecting means for selecting defects satisfying the certain conditions as defects to be reviewed.

33. The part-inspecting system of claim 31, wherein said intelligent defect information processing means is designed to select defects having sizes represented by said preliminary inspection information as defects required to be reviewed.

34. A part-inspecting system comprising:

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying defects on a preliminarily inspected part, positional information about positions of defects present on said inspected part, and information about sizes of said defects determined on a preliminary inspection apparatus, and

(b) a review information database for storing review information obtained by a review inspection of said inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member may be disposed;

(3) a review apparatus comprising;

(a) a microscope having an optical axis and said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part held on said inspected part-holding member into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for reading information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information input means;

(4) a review information registration means for storing review information obtained by reviewing a first defect in said inspected part information database, said first defect being selected from defects contained in said preliminary inspection information;

said review apparatus having a cassette placement portion mounted adjacent to said vacuum inspection chamber and an inspected part-transporting device for taking an inspected part from a cassette placed on said cassette placement portion, transporting the taken part to said inspected part-holding member, and transporting the part undergone an inspection from said inspected part-holding member to said cassette; and

(5) a part search information input means having a search information detection device for detecting search information permitting a search for preliminary inspection information about the inspected part inside said cassette when the cassette having said search information in a detectable form is placed on said cassette placement portion.

35. The part-inspecting system of claim 34, wherein said search information detection device is made of a bar code reader for reading a bar code from a label stuck on an outer surface of said cassette, said bar code representing said search information.

36. A. part-inspecting system comprising:

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying defects on a preliminarily inspected part, positional information about positions of defects present on said inspected part, and information about sizes of said defects determined on a preliminary inspection apparatus, and

(b) a review information database for storing review information obtained by a review inspection of said inspected part;

(2) a vacuum inspection chamber in which an inspected part-holding member may be disposed;

(3) a review apparatus comprising;

(a) a microscope and said vacuum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendicular to each other to bring a desired portion of said inspected part held on said inspected part-holding member into a review position,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for reading information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information input means;

(4) a review information registration means for storing review information obtained by reviewing a first defect in said inspected part information database, said first defect being selected from defects contained in said preliminary inspection information;

(5) an X-ray analyzer incorporated in said review apparatus and acting to make an X-ray analysis of an inspected part in said review position;

(6) an X-ray analysis execution judging means for judging whether execution of an X-ray analysis is specified; and

(7) an automatic X-ray analysis execution means for automatically executing an X-ray analysis if execution of an X-ray analysis is specified.

37. An automated part-inspecting system comprising:

(1) a computer implemented defect image filing system having a memory storing an inspected part information database including;

(a) a preliminary inspection information database for storing preliminary inspection information having part search information helpful in identifying defects on a preliminary inspected part, and positional information about positions of defects present on said inspected part determined on a preliminary inspection apparatus, and

(b) a review information database for storing part search information useful in identifying said inspected part and review information obtained by a review inspection of said preliminary inspected part;

(2) a vacum inspection chamber in which an inspected part-holding member may be disposed;

(3) a computer directed review apparatus comprising;

(a) a microscope and said vacum inspection chamber,

(b) an XY-table for moving said inspected part-holding member in X- and Y-directions perpendiculr to each other to bring a desired portion of said inspected part into a review postion,

(c) a microscope image photographing means for creating a microscope image at a magnification set by a magnification setting means,

(d) a part search information input means for entering information about a search for said inspected part set on said inspected part-holding member,

(e) a part search information storage means for storing said information entered by said part search information input means, and

(f) a preliminary information reading means for automatically reading preliminary inspection information about a preliminary inspection of said inspected part from said inspected part database according to said information entered by said part search information input means;

(4) a selecting means for automatically selecting a defect to be reviewed from defects contained in said preliminary inspection information read in by said preliminary inspection reading means; and

(5) a review information registration means for storing review information obtained by reviewing said selected defect in said inspected part information database.

38. The part-inspected system of claim 37, wherein said review apparatus consists of a scanning electron microscope used for reviews, and wherein said scanning electron microscope comprises an electron beam scanning device for scanning said inspected portion in a scanned range according to the magnification set by said magnification setting means with an electron beam, a particle detecting means for detecting particles emitted from a surface of said inspected part scanned by said electron beam scanning device, and a scanned image photographing means for creating a scanned image within a plane scanned by said electron beam from a scanning position of said electron beam and from an output signal from said particle detecting means.

39. The part-inspecting system of of claim 37, wherein said review apparatus consists of an optical microscope used for reviews, and wherin said optical microscope photographs an optical image in said desired inspection position.