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Micromembrane pump

  • US 6,261,066 B1
  • Filed: 11/10/1999
  • Issued: 07/17/2001
  • Est. Priority Date: 05/12/1997
  • Status: Expired due to Term
First Claim
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1. A micromembrane pump comprising:

  • a pump membrane which is adapted to be moved to a first and a second position with the aid of a drive means; and

    a pump body connected to said pump membrane so as to define a pump chamber between these two components, said pump body being defined by two semiconductor plates having each formed therein a valve seat and a valve flap which are formed integrally with the respective semiconductor plate, the two semiconductor plates being connected in such a way that a respective passive non-return valve is defined by a valve seat of one semiconductor plate and by a valve flap of the other semiconductor plate, one of said passive non-return valves being arranged in an inlet opening penetrating both semiconductor plates, whereas the other of said non-return valves is arranged in an outlet opening penetrating both semiconductor plates, said pump membrane increasing the volume of the pump chamber substantially by a stroke volume when moving from the first to the second position and reducing the volume of the pump chamber substantially by a stroke volume when moving from the second to the first position, wherein when the pump membrane is at the first position, the ratio ε

    of the stroke volume to the volume of the pump chamber satisfies the following equation;

    ɛ



    (p0p0-

    Δ







    pcrit


    )
    1γ

    -1
    wherein p0 is the atmospheric pressure, Γ

    the adiabatic coefficient, and Δ

    pcrit the maximum pressure value which depends on the valve geometry and on the wetting of the valves and which is required for opening the valves.

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