Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher

• US 6,261,155 B1
• Filed: 03/16/2000
• Issued: 07/17/2001
• Est. Priority Date: 05/28/1997
• Status: Expired due to Fees

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Pecen, Jiri, Chadda, Saket, Krusell, Wilbur C., Cutini, Jerauld J., Engdahl, Erik H., Jairath, Rahul
• Primary Examiner(s): Hail, III, Joseph J.
• Assistant Examiner(s): NGUYEN, GEORGE BINH MINH
• Application Number:
  US09/527,171
• Time in Patent Office: 488 Days
• Field of Search: 451/6, 451/9, 451/10, 451/41, 451/285-289, 451/296, 451/307, 451/303
• US Class Current: 451/41
• CPC Class Codes: B24B 21/04 for grinding plane surfaces
• CPC Class Codes: B24B 37/013 Devices or means for detecting lapping completion
• CPC Class Codes: B24B 49/04 involving measurement of the workpiece at the place of grinding during grinding operation
• CPC Class Codes: B24D 7/12 with apertures for inspecting the surface to be abraded
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32

Abstract

A linear polishing belt for use in chemical-mechanical polishing (CMP) of a substrate comprises an opening and a flexible monitoring window secured to the belt to close the opening and to create a monitoring channel in the belt. A plurality of monitoring channels can also be used. A film thickness monitor comprising an interferometer can be disposed alongside the belt or at least partially within a region bound by it. The monitoring channel and the film thickness monitor can be used in the CMP process to determine the end point of the CMP process, determine removal rate at any given circumference of a substrate, determine average removal rate across a substrate surface, determine removal rate variation across a substrate surface, and optimize removal rate and uniformity.

Claims

1. A chemical mechanical polishing element comprising a belt comprising a layer of polishing material, the belt formed in a closed loop and being at least partially comprised of a layer of material substantially transparent to light within a selected range of optical wavelengths and adapted to flex as the belt moves in use.

2. The invention of claim 1 wherein the layer of material is substantially transparent to light within the range of about 200 nm to about 2000 nm.

3. The invention of claim 1, wherein the belt comprises a surface comprising polishing agent transport channels.

4. The invention of claim 1, wherein the layer of polishing material comprises a plurality of fillers dispersed throughout the layer of polishing material, the fillers having an average particle size less than about 100 microns.

5. The invention of claim 1, wherein the layer of polishing material comprises a plurality of abrasive particles dispersed throughout the layer of polishing material, the abrasive particles having an average particle size less than about 100 microns.

6. The invention of claim 1, wherein the layer of material substantially transparent to light comprises urethane.

7. In a linear chemical mechanical polishing device of the type comprising:

at least two rollers;

a belt comprising a layer of polishing material and mounted to extend between the rollers such that rotation of the rollers drives the belt; and

a substrate carrier positioned adjacent the belt to press a substrate into contact with the belt intermediate the rollers;

the improvement comprising the belt being at least partially comprised of a layer of material substantially transparent to light within a selected range of optical wavelengths and adapted to flex as the belt moves around and between the rollers in use.

8. The invention of claim 7, wherein the layer of material is substantially transparent to light within the range of about 200 nm to about 2000 mn.

9. The invention of claim 7, wherein the belt comprises a surface comprising polishing agent transport channels.

10. The invention of claim 7, wherein the layer of polishing material comprises a plurality of fillers dispersed throughout the layer of polishing material, the fillers having an average particle size less than about 100 microns.

11. The invention of claim 7, wherein the layer of polishing material comprises a plurality of abrasive particles dispersed throughout the layer of polishing material, the abrasive particles having an average particle size less than about 100 microns.

12. The invention of claim 7, wherein the layer of material substantially transparent to light comprises urethane.

16. The invention of claim 7 further comprising a film thickness monitor secured with respect to the rollers.

17. The invention of claim 16, wherein the film thickness monitor is disposed at least partially within a region bounded by the belt.

18. The invention of claim 16, wherein the polishing device further comprises a platen stationary with respect to the belt and having an opening formed therein, and wherein the film thickness monitor is disposed at least partially within the opening formed in the platen.

19. The invention of claim 16, wherein the film thickness monitor comprises an interferometer.

13. A method of optimizing a chemical-mechanical polishing process comprising:

(a) providing a belt having an opening formed therein and a monitoring window secured to the belt to close the opening and to create a monitoring channel in the belt the monitoring window comprising a flexible material adapted to flex with the belt as the belt moves in use;

(b) determining a removal rate of a substrate undergoing chemical-mechanical polishing by the belt; and

then

(c) adjusting polishing process parameters to optimize the removal rate.

14. The invention of claim 13 further comprising:

(d) determining removal rate variation; and

then

(e) adjusting polishing process parameters to optimize uniformity.

15. The invention of claim 13, wherein the flexible material comprises urethane.

20. The invention of claim 13, wherein removal rate is determined in (b) using a film thickness monitor disposed adjacent the belt.