×

Parallel plate structure provided with PZT thin-film bimorph and method of fabrication thereof

  • US 6,262,516 B1
  • Filed: 08/23/1999
  • Issued: 07/17/2001
  • Est. Priority Date: 07/04/1997
  • Status: Expired due to Fees
First Claim
Patent Images

1. A parallel plate structure including a pair of parallel bimorphs (2), and a spacer (3) for connecting the bimorphs (2), wherein each bimorph (2) has a titanium substrate (4), the titanium substrate (4) having a first surface and a second surface, which is located on the opposite side of the first surface, and a PZT thin-film (5) formed on each of the first and second surfaces, wherein the parallel plate structure is characterized by:

  • a plurality of spaced electrodes (6) formed on each PZT thin-film (5) and extending in the same direction.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×