Galvano-mirror
First Claim
Patent Images
1. A galvano-mirror comprising:
- a mirror substrate including a frame, a mirror element and torsion bars rotatably connecting the mirror element to the frame, the mirror element being provided with a body having an obverse surface and a reverse surface, the mirror element being also provided with a mirror surface formed on the obverse surface and first electrodes formed on the reverse surface; and
an electrode substrate provided with second electrodes arranged in facing relation to the first electrodes;
wherein the electrode substrate is formed with a through-hole extending through a thickness thereof and facing the mirror element.
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Abstract
A galvano-mirror includes a mirror substrate provided with a frame, a mirror element and torsion bars rotatably connecting the mirror element to the frame. The mirror element is provided with a body having an obverse surface and a reverse surface. A mirror surface is formed on the obverse surface, while first electrodes are formed on the reverse surface. The galvano-mirror also includes an electrode substrate provided with second electrodes arranged in facing relation to the first electrodes. The electrode substrate is formed with a through-hole extending through a thickness thereof and facing the mirror element.
115 Citations
20 Claims
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1. A galvano-mirror comprising:
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a mirror substrate including a frame, a mirror element and torsion bars rotatably connecting the mirror element to the frame, the mirror element being provided with a body having an obverse surface and a reverse surface, the mirror element being also provided with a mirror surface formed on the obverse surface and first electrodes formed on the reverse surface; and
an electrode substrate provided with second electrodes arranged in facing relation to the first electrodes;
wherein the electrode substrate is formed with a through-hole extending through a thickness thereof and facing the mirror element. - View Dependent Claims (2, 3)
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4. A galvano-mirror comprising:
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a mirror substrate including a frame, a mirror element and torsion bars rotatably connecting the mirror element to the frame, the mirror element being provided with a body having an obverse surface and a reverse surface, the mirror element being also provided with a mirror surface formed on the obverse surface and first electrodes formed on the reverse surface;
an electrode substrate formed with second electrodes facing the first electrodes;
third electrodes formed on the obverse surface of the mirror element; and
a supporting structure provided with fourth electrodes facing the third electrodes. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification