Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling

• US 6,262,946 B1
• Filed: 09/29/1999
• Issued: 07/17/2001
• Est. Priority Date: 09/29/1999
• Status: Expired due to Term

• Current Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Original Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Inventors: Khuri-Yakub, Butrus T., Degertekin, F. Levent
• Primary Examiner(s): Lobo, Ian J.
• Application Number:
  US09/408,156
• Time in Patent Office: 657 Days
• Field of Search: 367/174, 367/176, 367/153, 367/181, 381/174, 381/423, 381/424, 381/425, 381/191
• US Class Current: 367/181
• CPC Class Codes: B06B 1/0292 Electrostatic transducers, e.g. electret-type
• CPC Class Codes: G10K 11/002 Devices for damping, suppressing, obstructing or conducting sound in acoustic devices G10K1/06 - G10K1/10 take precedence; for electro-mechanical transducers for communication H04R3/002

Abstract

There is described a capacitive micromachined ultrasonic transducer array which is configured to minimize the excitation and propagation of plate waves traveling in the substrate and ultrasonic waves propagating at the interface between the array surface and the immersion fluid.

Claims

1. A capacitive micromachined ultrasonic transducer array comprising a plurality of spaced transducer elements, each including at least one membrane formed on a substrate,

said substrate having a thickness such that the critical angle of plate waves exceeds the desired acceptance angle of the ultrasonic transducer array elements to minimize the excitation and propagation of plate waves and to minimize the interaction of transducer elements with each other through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid, and

said membrane and its attachment to the substrate configured to minimize the excitation of plate waves and to minimize the interaction of transducer elements through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid.

2. A capacitive micromachined ultrasonic transducer array as in claim 1 in which each transducer element includes a slot in the substrate surrounding each transducer element to interrupt the propagation of plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid.

3. A capacitive micromachined ultrasonic transducer array as in claim 1 in which each transducer element includes a porous region in the substrate surrounding each transducer element to interrupt the propagation of plate waves.

4. A capacitive micromachined ultrasonic transducer array as in claim 1 in which the ratio of the length of membrane-supporting edge to the membrane area is minimized to minimize the transfer of ultrasonic energy from the membrane into the substrate.

5. A capacitive micromachined ultrasonic transducer array as in claim 1 in which the size of the membranes at the edge of the transducer element is reduced to minimize the slope of the membrane displacement along their edges to minimize the excitation and detection of ultrasonic waves propagating along the interface between the transducer array surface and the immersion fluid.

6. A capacitive micromachined ultrasonic transducer array as in claim 1 in which the membrane has a shape to minimize the slope of the membrane displacement along its edges to minimize the excitation and detection of ultrasonic waves propagating along the interface between the transducer array surface and the immersion fluid.

7. A capacitive micromachined ultrasonic transducer array as in claim 1 in which the electrode on the membrane is shaped to minimize the slope of the membrane displacement along its edges to minimize the excitation and detection of ultrasonic waves propagating along the interface between the transducer array surface and the immersion fluid.

8. A capacitive micromachined ultrasonic transducer array as in claim 1 or 7 in which the membranes and electrodes are rectangular.

9. A capacitive micromachined ultrasonic transducer array as in claim 8 in which the orientation of the membranes is varied from transducer element to transducer element to minimize the transfer of ultrasonic energy between the transducer elements through ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid.

10. A capacitive micromachined ultrasonic transducer array comprising a plurality of spaced transducer elements, each including at least one membrane formed on a substrate,

said substrate includes a slot in the substrate surrounding each transducer element to minimize the excitation and propagation of plate waves and to minimize the interaction of transducer elements with each other through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid, and

said membrane and its attachment to the substrate configured to minimize the excitation of plate waves and to minimize the interaction of transducer elements through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid.

11. A capacitive micromachined ultrasonic transducer array comprising a plurality of spaced transducer elements, each including at least one membrane formed on a substrate,

said substrate includes a porous region in the substrate surrounding each transducer element to minimize the excitation and propagation of plate waves and to minimize the interaction of transducer elements with each other through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid, and

said membrane and its attachment to the substrate configured to minimize the excitation of plate waves and to minimize the interaction of transducer elements through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid.

12. A capacitive micromachined ultrasonic transducer array comprising a plurality of spaced transducer elements, each including at least one membrane formed on a substrate,

said substrate configured to minimize the excitation and propagation of plate waves and to minimize the interaction of transducer elements with each other through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid, and

said membrane having the ratio of the length of membrane-supporting edge to the membrane area minimized to minimize the transfer of ultrasonic energy from the membrane into the substrate to minimize the excitation of plate waves and to minimize the interaction of transducer elements through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid.

13. A capacitive micromachined ultrasonic transducer array comprising a plurality of spaced transducer elements, each including at least one membrane formed on a substrate,

said substrate configured to minimize the excitation and propagation of plate waves and to minimize the interaction of transducer elements with each other through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid, and

said membranes having a reduced size at the edge of the transducer array to minimize the slope of the membrane displacement along their edges to minimize the excitation and detection of ultrasonic waves propagating along the interface between the transducer array surface and the immersion fluid and its attachment to the substrate configured to minimize the excitation of plate waves and to minimize the interaction of transducer elements through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid.

14. A capacitive micromachined ultrasonic transducer array comprising a plurality of spaced transducer elements, each including at least one membrane formed on a substrate,

said substrate configured to minimize the excitation and propagation of plate waves and to minimize the interaction of transducer elements with each other through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid, and

said membranes having a shape to minimize the slope of the membrane displacement along its edges to minimize the excitation and detection of ultrasonic waves propagating along the interface between the transducer array surface and the immersion fluid, and their attachment to the substrate configured to minimize the excitation of plate waves and to minimize the interaction of transducer elements through the plate waves.

15. A capacitive micromachined ultrasonic transducer array comprising a plurality of spaced transducer elements, each including at least one membrane formed on a substrate,

said substrate configured to minimize the excitation and propagation of plate waves and to minimize the interaction of transducer elements with each other through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid,

said membrane and its attachment to the substrate configured to minimize the excitation of plate waves and to minimize the interaction of transducer elements through the plate waves or ultrasonic waves propagating at the interface between the transducer array surface and the immersion fluid, and

electrodes on the membranes shaped to minimize the slope of the membranes'"'"' displacement along their edges to minimize the excitation and detection of ultrasonic waves propagating along the interface between the transducer array surface and the immersion fluid.