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Advanced process control for semiconductor manufacturing

  • US 6,263,255 B1
  • Filed: 05/18/1998
  • Issued: 07/17/2001
  • Est. Priority Date: 05/18/1998
  • Status: Expired due to Term
First Claim
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1. A computer program product comprising:

  • a computer usable medium having computable readable code embodied therein, the computable readable code including instructions that implement a process control software system capable of controlling a process having a plurality of devices communicating in a network, the devices including a metrology machine, a processing machine, and a controller, the process control software system including;

    a metrology machine plan routine capable of controlling operations of the metrology machine, the metrology machine plan routine capable of generating a human readable text describing activities to be exercised by the metrology machine and data to be collected and analyzed by the metrology machine;

    a processing machine plan routine capable of controlling operations of the processing machine, the processing machine plan routine capable of generating a human readable text describing activities to be exercised by the processing machine and data to be collected and analyzed by the processing machine; and

    a strategy routine controlling operations of the controller, the strategy routine capable of coordinating activities of the metrology machine plan and the processing machine plan that span multiple processing steps of the process.

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