Linear motor coil for exposure apparatus

• US 6,265,793 B1
• Filed: 11/12/1999
• Issued: 07/24/2001
• Est. Priority Date: 11/12/1998
• Status: Active Grant

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Korenaga, Nobushige
• Primary Examiner(s): Ramirez, Nestor
• Assistant Examiner(s): JONES, JUDSON
• Application Number:
  US09/438,524
• Time in Patent Office: 620 Days
• Field of Search: 310/12, 310/42, 310/45, 335/282
• US Class Current: 310/12.06
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H02K 15/045 Form wound coils
• CPC Class Codes: H02K 3/04 Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
• CPC Class Codes: H02K 41/03 Synchronous motors; Motors moving step by step; Reluctance motors H02K41/035 takes precedence

Abstract

A conductive foil is wound into a roll to provide a roll coil, and the roll coil is cut along wire paths, whereby a flat coil with a level difference is produced. Similarly, a flat coil without a level difference is sliced from the roll coil. The flat coil with a level difference and the flat coil without a level difference are then disposed with partial overlapping, while magnet side faces of the coils become coplanar with each other, to provide a unit coil. A plurality of unit coils can be placed juxtaposed with each other, to provide a stator for a linear motor. The number of working operations is reduced significantly, and the reliability of the coil itself is improved.

Claims

1. A method of producing a coil with a level difference, comprising the steps of:

winding a conductive foil into a roll to provide a roll coil; and

slicing, by wire cutting, the roll coil so that a coil having a level difference formed thereon is produced.

2. A method according to claim 1, wherein the roll coil is sliced so that, in a coil produced by the slicing, a straight portion and a bent portion, for defining the level difference, have the same thickness.

3. A method according to claim 1 or 2, wherein the roll coil is sliced so that, in a coil produced by the slicing, the magnitude of the level difference formed is larger than the coil thickness.

4. A method according to any one of claims 1-2, further comprising etching a section of a coil produced by the slicing.

5. A method according to any one of claims 1-2, further comprising providing an insulating material at a section of a coil produced by the slicing.

6. A method according to any one of claims 1-2, further comprising providing an insulating material at a portion of a coil, of coils produced by the slicing, which portion is to be opposed to another coil.

7. A method according to claim 5, wherein the insulating material is provided through one of applying an insulating material, adhesion of an insulating tape and insertion of an insulating plate.

8. A coil with a level difference, said coil comprising:

a straight portion and a portion with the level difference, in which a conductive material for the coil has a shape defined by winding a conductive foil.

9. A coil with a level difference according to claim 8, wherein the coil is produced by slicing a roll coil provided by winding the conductive foil.

10. A coil with a level difference according to claim 9, wherein a section of the coil produced by the slicing is processed by etching.

11. A coil with a level difference according to claim 9 or 10, further comprising an insulating material provided at the section of the coil produced by the slicing.

12. A coil with a level difference according to claim 11, wherein the insulating material is provided through one of applying an insulating material, adhesion of an insulating tape and insertion of an insulating plate.

13. A coil with a level difference according to claim 12, wherein an insulating material is provided to prevent an electric short circuit between layers of the conductive foil.

14. A linear motor comprising a coil with a level difference as recited in claim 13.

15. A linear motor according to claim 14, further comprising a unit coil including at least two coils, each having a level difference, which are disposed with partial overlapping.

16. A linear motor according to claim 15, further comprising an insulating material provided at a portion where coils of the unit coil are opposed to each other.

17. A linear motor according to claim 16, wherein the coil unit is fixed to a yoke, and wherein an insulating material is provided between the coil and the yoke.

18. A linear motor according to claim 14, wherein a magnet is provided at a movable element side thereof while the coil is provided at a stator side thereof.

19. A linear motor according to claim 15, wherein a magnet is provided at a movable element side thereof while the coil is provided at a stator side thereof.

20. A linear motor according to claim 16, wherein a magnet is provided at a movable element side thereof while the coil is provided at a stator side thereof.

21. A linear motor according to claim 17, wherein a magnet is provided at a movable element side thereof while the coil is provided at a stator side thereof.

22. A stage system having a linear motor as recited in claim 18.

23. A stage system having a linear motor as recited in claim 19.

24. A stage system having a linear motor as recited in claim 20.

25. A stage system having a linear motor as recited in claim 21.

26. An exposure apparatus having a stage system as recited in claim 22, and being used for at least one of a reticle stage and a wafer stage.

27. An exposure apparatus having a stage system as recited in claim 23, and being used for at least one of a reticle stage and a wafer stage.

28. An exposure apparatus having a stage system as recited in claim 24, and being used for at least one of a reticle stage and a wafer stage.

29. An exposure apparatus having a stage system as recited in claim 25, and being used for at least one of a reticle stage and a wafer stage.

30. A device manufacturing method, comprising the steps of:

providing an exposure apparatus as recited in claim 26; and

transferring a pattern formed on a reticle onto a wafer by use of the exposure apparatus.

31. A device manufacturing method, comprising the steps of:

providing an exposure apparatus as recited in claim 27; and

transferring a pattern formed on a reticle onto a wafer by use of the exposure apparatus.

32. A device manufacturing method, comprising the steps of:

providing an exposure apparatus as recited in claim 28; and

transferring a pattern formed on a reticle onto a wafer by use of the exposure apparatus.

33. A device manufacturing method, comprising the steps of:

providing an exposure apparatus as recited in claim 29; and

transferring a pattern formed on a reticle onto a wafer by use of the exposure apparatus.