Stage device, an exposure apparatus and a device manufacturing method using the same

• US 6,266,133 B1
• Filed: 04/27/1999
• Issued: 07/24/2001
• Est. Priority Date: 05/06/1998
• Status: Active Grant

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Miyajima, Yoshikazu, Takabayashi, Yukio, Takashima, Tsuneo
• Primary Examiner(s): Gray, David M.
• Assistant Examiner(s): NGUYEN, HUNG
• Application Number:
  US09/299,590
• Time in Patent Office: 819 Days
• Field of Search: 355/72-77, 355/53, 318/625, 318/628, 744/900.9, 310/12-14
• US Class Current: 355/72
• CPC Class Codes: G03B 27/58 Baseboards, masking frames, or other holders for the sensitive material G03B27/53 takes precedence ; for electrophotographic copiers G03G15/65
• CPC Class Codes: G03B 27/62 Holders for the original G03B27/53 takes precedence ; for electrophotographic copiers G03G15/60
• CPC Class Codes: G03F 7/70358 Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
• CPC Class Codes: G03F 7/70691 Handling of masks or workpieces

Abstract

A stage device includes a movable body, movable along a guide surface, for moving an element mounted on the movable body, a static pressure bearing, having at least one pad, for guiding the movable body along the guide surface, the at least one pad being attached to the movable body at a first position, and a linear motor, having a movable part and a relatively stationary part, for moving the movable body, the movable part of the linear motor being attached to the movable body at a second position. The movable body has a hollow structure at at least one of the first position and the second position. The hollow structure has an enclosure structure or a rib structure.

Claims

1. A stage device, comprising:

a movable body, movable along a guide surface, for moving an element mounted on the movable body;

a static pressure bearing, having at least one pad, for guiding said movable body along the guide surface, said at least one pad being attached to said movable body at a first position; and

a linear motor, having a movable part and a relatively stationary part, for moving said movable body, said movable part of said linear motor being attached to said movable body at a second position,

wherein said movable body has a hollow structure neighboring at least one of the first position and the second position.

2. A stage device according to claim 1, wherein said static pressure bearing supports said movable body on the guide surface in at least one of a vertical direction and a horizontal direction.

3. A stage device according to claim 1, further comprising a damping material, which fills the hollow structure.

4. A stage device according to claim 3, wherein said damping material comprises a material selected from the group consisting of a rubber, a resin, a liquid and a powder.

5. A stage device according to claim 1, wherein the hollow structure is enclosed.

6. A stage device according to claim 5, wherein the enclosed hollow structure has a plurality of compartments.

7. A stage device according to claim 1, wherein the hollow structure has a rib structure.

8. A stage device according to claim 1, further comprising a stationary base, having the guide surface, for supporting said movable body on the guide surface through said static pressure bearing.

9. A stage device according to claim 8, wherein said stationary base has a hollow structure.

10. A stage device according to claim 9, further comprising a damping material, which fills the hollow structure of the stationary base.

11. A stage device according to claim 1, wherein said movable body has a plurality of hollow portions extending along a vertical surface of said movable body.

12. A stage device according to claim 11, wherein the plurality of hollow portions have different hollow sizes.

13. A stage device according to claim 11, further comprising damping material, which fills each of the hollow portions.

14. A stage device according to claim 13, wherein the damping material for each of the hollow portions has a different specific gravity.

15. A stage device according to claim 1, wherein a center of gravity of said movable body of said stage device is at least of a same height as a point on said movable body at which a driving force is applied from said linear motor to said movable body.

16. A stage device according to claim 1, wherein at least a portion of said movable body is made of a ceramic material.

17. A stage device according to claim 1, further comprising a stage top for holding a substrate, said stage top being movable, precisely, in a plurality of directions, wherein the bottom of the stage top has a hollow structure.