Stage device, an exposure apparatus and a device manufacturing method using the same
First Claim
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1. A stage device, comprising:
- a movable body, movable along a guide surface, for moving an element mounted on the movable body;
a static pressure bearing, having at least one pad, for guiding said movable body along the guide surface, said at least one pad being attached to said movable body at a first position; and
a linear motor, having a movable part and a relatively stationary part, for moving said movable body, said movable part of said linear motor being attached to said movable body at a second position, wherein said movable body has a hollow structure neighboring at least one of the first position and the second position.
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Abstract
A stage device includes a movable body, movable along a guide surface, for moving an element mounted on the movable body, a static pressure bearing, having at least one pad, for guiding the movable body along the guide surface, the at least one pad being attached to the movable body at a first position, and a linear motor, having a movable part and a relatively stationary part, for moving the movable body, the movable part of the linear motor being attached to the movable body at a second position. The movable body has a hollow structure at at least one of the first position and the second position. The hollow structure has an enclosure structure or a rib structure.
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Citations
17 Claims
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1. A stage device, comprising:
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a movable body, movable along a guide surface, for moving an element mounted on the movable body;
a static pressure bearing, having at least one pad, for guiding said movable body along the guide surface, said at least one pad being attached to said movable body at a first position; and
a linear motor, having a movable part and a relatively stationary part, for moving said movable body, said movable part of said linear motor being attached to said movable body at a second position, wherein said movable body has a hollow structure neighboring at least one of the first position and the second position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification