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System and method for detecting defects in a surface of a workpiece

  • US 6,266,138 B1
  • Filed: 10/12/1999
  • Issued: 07/24/2001
  • Est. Priority Date: 10/12/1999
  • Status: Expired due to Term
First Claim
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1. A surface inspection system for detecting defects on a surface of a workpiece, comprising:

  • a diffused light source for emitting an elongated line of light onto the surface of the workpiece;

    a movable member for translating the workpiece in relation to said light source;

    an imaging device for capturing two or more sets of image data representative of a portion of the surface of the workpiece, said imaging device having a field of observation and being positionable at a vantage point such that the line of light is within the field of observation;

    a data structure for storing model data indicative of a spatial relationship between said portion of the surface of the workpiece and the observation plane of said imaging device and;

    an anomaly detection subsystem adapted to receive at least a first set of image data and a second set of image data from said imaging device, said anomaly detection module identifying at least one potential surface defect in said first set of image data and said second set of image data; and

    a tracking subsystem connected to said data structure and said anomaly detection module for tracking the potential surface defect from said first set of image data to said second set of image data using said model data, thereby assessing if the potential surface defect constitutes a defect in the surface of the workpiece.

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