Guardring DRAM cell
First Claim
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1. A micromirror device comprising:
- a substrate, said substrate capable of generating photocarriers when exposed to radiant energy;
at least one memory cell fabricated on said substrate, said memory cell comprising;
at least one transistor;
at least one capacitor, said at least one capacitor comprising a first plate and a second plate an active collector region fabricated in said substrate and forming said second plate, said active collector region positioned to prevent photocarriers traveling through said substrate from reaching an address node; and
said an address node electrically connecting said first plate of said at least one capacitor to said at least one transistor;
at least one address electrode formed on said substrate; and
at least one deflectable member supported by said substrate, said deflectable member operable to deflect when electrostatically attracted to at least one of said address electrodes by a voltage differential between said address electrode and said deflectable member.
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Accused Products
Abstract
An improved memory cell (600) for use in a high-intensity light environment. The memory (600) comprises a substrate (616) capable of generating photocarriers when exposed to radiant energy, at least one transistor (602), at least one capacitor (604), and address node (610) electrically connecting the transistor (602) and the capacitor (604), and an active collector region (626). The active collector region (626) is fabricated in the substrate (616) in a position to allow the active collector region (626) to recombine photocarriers traveling through the substrate (616) thus preventing the photocarriers from reaching the address node (610).
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Citations
15 Claims
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1. A micromirror device comprising:
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a substrate, said substrate capable of generating photocarriers when exposed to radiant energy;
at least one memory cell fabricated on said substrate, said memory cell comprising;
at least one transistor;
at least one capacitor, said at least one capacitor comprising a first plate and a second plate an active collector region fabricated in said substrate and forming said second plate, said active collector region positioned to prevent photocarriers traveling through said substrate from reaching an address node; and
said an address node electrically connecting said first plate of said at least one capacitor to said at least one transistor;
at least one address electrode formed on said substrate; and
at least one deflectable member supported by said substrate, said deflectable member operable to deflect when electrostatically attracted to at least one of said address electrodes by a voltage differential between said address electrode and said deflectable member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A image projection system comprising:
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a light source for providing a beam of light along a light path;
a micromirror device on said light path for selectively reflecting portions of said beam of light along a second light path in response to image data signals;
a controller for providing image data signals to said micromirror device; and
a projection lens on said second light path for focusing said selectively reflected light onto an image plane;
said micromirror device comprising;
a substrate, said substrate capable of generating photocarriers when exposed to radiant energy;
at least one memory cell fabricated on said substrate, said memory cell comprising;
at least one transistor;
at least one capacitor, said at least one capacitor comprising a first plate and a second plate;
an active collector region fabricated in said substrate and forming said second plate, said active collector region positioned to prevent photocarriers traveling through said substrate from reaching said address node; and
an address node electrically connecting said first plate of said at least one capacitor to said at least one transistor;
at least one address electrode formed on said substrate; and
at least one deflectable member supported by said substrate, said deflectable member operable to deflect when electrostatically attracted to at least one of said address electrodes by a voltage differential between said address electrode and said deflectable member.
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Specification