Guardring DRAM cell

• US 6,266,178 B1
• Filed: 12/21/1999
• Issued: 07/24/2001
• Est. Priority Date: 12/28/1998
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Huffman, James D.
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): TRA, TUYEN Q
• Application Number:
  US09/468,595
• Time in Patent Office: 581 Days
• Field of Search: 359/305, 359/308, 359/320, 359/279, 359/244, 359/315, 359/285, 359/245, 359/248, 359/290, 359/291, 359/295, 359/292, 359/298, 356/356, 356/28, 356/28.5, 345/108, 345/84, 345/85, 345/771, 345/109, 345/32, 345/147, 257/98, 257/296, 385/18
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

An improved memory cell (600) for use in a high-intensity light environment. The memory (600) comprises a substrate (616) capable of generating photocarriers when exposed to radiant energy, at least one transistor (602), at least one capacitor (604), and address node (610) electrically connecting the transistor (602) and the capacitor (604), and an active collector region (626). The active collector region (626) is fabricated in the substrate (616) in a position to allow the active collector region (626) to recombine photocarriers traveling through the substrate (616) thus preventing the photocarriers from reaching the address node (610).

Claims

1. A micromirror device comprising:

a substrate, said substrate capable of generating photocarriers when exposed to radiant energy;

at least one memory cell fabricated on said substrate, said memory cell comprising;

at least one transistor;

at least one capacitor, said at least one capacitor comprising a first plate and a second plate

an active collector region fabricated in said substrate and forming said second plate, said active collector region positioned to prevent photocarriers traveling through said substrate from reaching an address node; and

said an address node electrically connecting said first plate of said at least one capacitor to said at least one transistor;

at least one address electrode formed on said substrate; and

at least one deflectable member supported by said substrate, said deflectable member operable to deflect when electrostatically attracted to at least one of said address electrodes by a voltage differential between said address electrode and said deflectable member.

2. The micromirror device of claim 1, wherein said active collector region encircles said address node.

3. The micromirror device of claim 1, wherein said active collector region is a doped semiconductor region.

4. The micromirror device of claim 1, wherein said active collector region is an n-doped semiconductor region.

5. The micromirror device of claim 1, wherein said active collector region is at least 1.5 μ

m deep.

6. The micromirror device of claim 1, wherein said active collector region is positively biased.

7. The micromirror device of claim 1, wherein said first plate is polysilicon.

8. The micromirror device of claim 1, wherein said first plate is negatively biased relative to said second plate.

9. The micromirror device of claim 1, wherein said second plate is an accumulation layer formed in said active collector region.

10. The micromirror device of claim 1, wherein said first plate encircles said address node.

11. The micromirror device of claim 1, said first plate comprising two polysilicon regions.

12. The micromirror device of claim 1, said address node electrically connected to at least one of said address electrodes.

13. The micromirror device of claim 1, said address node electrically connected to at least one of said deflectable members.

14. The micromirror device of claim 1, wherein said address node is located on said substrate directly beneath said deflectable member.

15. A image projection system comprising:

a light source for providing a beam of light along a light path;

a micromirror device on said light path for selectively reflecting portions of said beam of light along a second light path in response to image data signals;

a controller for providing image data signals to said micromirror device; and

a projection lens on said second light path for focusing said selectively reflected light onto an image plane;

said micromirror device comprising;

a substrate, said substrate capable of generating photocarriers when exposed to radiant energy;

at least one memory cell fabricated on said substrate, said memory cell comprising;

at least one transistor;

at least one capacitor, said at least one capacitor comprising a first plate and a second plate;

an active collector region fabricated in said substrate and forming said second plate, said active collector region positioned to prevent photocarriers traveling through said substrate from reaching said address node; and

an address node electrically connecting said first plate of said at least one capacitor to said at least one transistor;

at least one address electrode formed on said substrate; and

at least one deflectable member supported by said substrate, said deflectable member operable to deflect when electrostatically attracted to at least one of said address electrodes by a voltage differential between said address electrode and said deflectable member.