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Angular rate detecting device

  • US 6,267,008 B1
  • Filed: 10/19/1999
  • Issued: 07/31/2001
  • Est. Priority Date: 10/23/1998
  • Status: Expired due to Term
First Claim
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1. An angular rate detecting device comprising:

  • an oscillation portion connected to a substrate via a supporting member and oscillatable over the substrate in directions of an X-axis and a Y-axis, the X and Y axes being perpendicular to one another;

    a drive portion causing the oscillation portion to oscillate independently along the X-axis, the drive portion comprising a plurality of sectional drive portions spaced apart in the direction of the Y-axis, the sectional drive portions being capable of oscillating the oscillating portion independently in the direction of the X-axis;

    a detection portion detecting oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis; and

    an angular rate detector for detecting, based on oscillation of the oscillation portion in the direction of the Y-axis, an angular rate that is effective around a Z-axis, the Z axis being perpendicular to both the X-axis and the Y-axis, with the oscillation portion oscillating in the direction of the X-axis.

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