Angular rate detecting device
First Claim
1. An angular rate detecting device comprising:
- an oscillation portion connected to a substrate via a supporting member and oscillatable over the substrate in directions of an X-axis and a Y-axis, the X and Y axes being perpendicular to one another;
a drive portion causing the oscillation portion to oscillate independently along the X-axis, the drive portion comprising a plurality of sectional drive portions spaced apart in the direction of the Y-axis, the sectional drive portions being capable of oscillating the oscillating portion independently in the direction of the X-axis;
a detection portion detecting oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis; and
an angular rate detector for detecting, based on oscillation of the oscillation portion in the direction of the Y-axis, an angular rate that is effective around a Z-axis, the Z axis being perpendicular to both the X-axis and the Y-axis, with the oscillation portion oscillating in the direction of the X-axis.
1 Assignment
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Accused Products
Abstract
An oscillator 20 and main frames 30-1 and 30-2, coupled to one another by beams 33-1 through 33-4, float above the upper face of a substrate 10. The main frames 30-1 and 30-2 are divided into a plurality of sections along a Y-axis. Drive electrode portions 51-1 through 51-4 drive the main frames 30-1 and 30-2 and the oscillator 20 in the direction of an X-axis. Due to an angular rate around a Z-axis perpendicular to the X and Y axes, the oscillator 20 oscillates in the direction of the Y-axis. The oscillation in the direction of the Y-axis is measured using a high-frequency signal applied to detection electrode portions 53-1 through 53-4, whereby the angular rate is detected. The main frame 30-1 is provided with drive electrode portions 51-1 and 51-2, while the main frame 30-2 is provided with drive electrode portions 51-3 and 51-4. Drive signals independent from one another are supplied to the drive electrode portions 51-1 through 51-4, whereby the main frames 30-1 and 30-2 are caused to oscillate precisely in the direction of the X-axis.
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Citations
32 Claims
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1. An angular rate detecting device comprising:
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an oscillation portion connected to a substrate via a supporting member and oscillatable over the substrate in directions of an X-axis and a Y-axis, the X and Y axes being perpendicular to one another;
a drive portion causing the oscillation portion to oscillate independently along the X-axis, the drive portion comprising a plurality of sectional drive portions spaced apart in the direction of the Y-axis, the sectional drive portions being capable of oscillating the oscillating portion independently in the direction of the X-axis;
a detection portion detecting oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis; and
an angular rate detector for detecting, based on oscillation of the oscillation portion in the direction of the Y-axis, an angular rate that is effective around a Z-axis, the Z axis being perpendicular to both the X-axis and the Y-axis, with the oscillation portion oscillating in the direction of the X-axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An angular rate detecting device comprising:
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a frame connected to a substrate through a driving beam and oscillatable with respect to the substrate in a direction of an X-axis, the frame being divided into a plurality of sections;
an oscillator connected to an inside of the frame via the driving beam and supported oscillatably with respect to the substrate in the direction of the X-axis and in a direction of a Y-axis, the Y-axis being perpendicular to the X-axis;
a drive portion causing the frame to oscillate with respect to the substrate in the direction of the X-axis;
a detection portion detecting oscillation of the oscillator with respect to the substrate in the direction of the Y-axis; and
an angular rate detector for detecting, based on oscillation of the oscillation portion in the direction of the Y-axis, an angular rate effective around a Z-axis, the Z-axis being perpendicular to both the X-axis and the Y-axis, wherein the flame and the oscillator oscillates in the direction of the X-axis. - View Dependent Claims (10)
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11. An angular rate detecting device comprising:
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a frame connected to a substrate via a driving beam, the frame being oscillatable with respect to the substrate in a direction of an X-axis, the driving beam comprising a pair of drive beams disposed symmetrically with respect to a central position of the frame in the direction of the X-axis and at least another drive beam provided between the pair of the drive beams;
an oscillator connected to an inside of the frame and supported oscillatably with respect to the substrate in the direction of the X-axis and in a direction of a Y-axis, the Y-axis being perpendicular to the X-axis;
a drive portion causing the frame to oscillate with respect to the substrate in the direction of the X-axis;
a detection portion detecting oscillation of the oscillator with respect to the substrate in the direction of the Y-axis; and
an angular rate detector detecting, based on oscillation of the oscillation portion in the direction of the Y-axis, an angular rate effective around a Z-axis, the Z-axis being perpendicular to both the X-axis and the Y-axis, wherein the flame and the oscillator oscillates in the direction of the X-axis. - View Dependent Claims (12)
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13. An angular rate detecting device comprising:
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a frame connected to a substrate via a driving beam and oscillatable with respect to the substrate in a direction of an X-axis;
an oscillator connected to the frame via the driving beam and supported oscillatably with respect to the substrate;
a drive portion causing the frame to oscillate with respect to the substrate in the direction of the X-axis;
a detection portion detecting oscillation of the oscillator with respect to the substrate in a direction of a Y-axis, the Y-axis being perpendicular to the X-axis;
an angular rate detector detecting, based on oscillation of the oscillator in the direction of the Y-axis, an angular rate effective around a Z-axis, the Z-axis being perpendicular to both the X-axis and the Y-axis, wherein the flame and the oscillator oscillates in the direction of the X-axis; and
a correction portion retrieving an oscillation component of the frame with respect to the substrate in the direction of the Y-axis. - View Dependent Claims (14, 15, 16, 17, 18)
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19. An angular rate detecting device comprising:
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an oscillation portion connected to a substrate via a supporting member, the oscillation portion being oscillatable over the substrate in directions of an X-axis and a Y-axis, the X-axis and the Y-axis being perpendicular to one another;
a drive portion causing the oscillation portion to oscillate with respect to the substrate in the direction of the X-axis;
a detection portion detecting oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis;
an angular rate detector detecting, based on oscillation of the oscillation portion in the direction of the Y-axis, an angular rate effective around a Z-axis, the Z-axis being perpendicular to both the X-axis and the Y-axis, wherein the oscillation portion oscillates in the direction of the X-axis;
a servo portion restraining oscillation of the oscillation portion in the direction of the Y-axis;
a drive circuit causing the oscillation portion to oscillate with respect to the substrate in the direction of the X-axis with a predetermined amplitude, in cooperation with the drive portion;
a retrieval circuit retrieving a signal indicative of oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis, in cooperation with the detection portion;
a servo control circuit forming a servo control signal, based on the retrieved signal indicative of oscillation of the oscillation portion in the direction of the Y-axis, the servo control signal being supplied to the servo portion to restrain oscillation of the oscillation portion in the direction of the Y-axis; and
an output circuit outputting a signal corresponding to the formed servo control signal as a signal indicative of the angular rate. - View Dependent Claims (20, 21, 22, 23, 24)
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25. An angular rate detecting device comprising:
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an oscillation portion connected to a substrate via a supporting member, the oscillation portion being oscillatable over the substrate along an X-axis and a Y-axis, the X and Y axes being perpendicular to one another;
a drive portion causing the oscillation portion to oscillate with respect to the substrate in the direction of the X-axis;
a detection portion detecting oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis;
an angular rate detector for detecting, based on oscillation of the oscillation portion in the direction of the Y-axis, an angular rate effective around a Z-axis, the Z-axis being perpendicular to both the X-axis and the Y-axis, wherein the oscillation portion oscillates in the direction of the X-axis;
a servo portion restraining oscillation of the oscillation portion in the direction of the Y-axis;
a drive circuit causing the oscillation portion to oscillate with respect to the substrate in the direction of the X-axis with a predetermined amplitude, in cooperation with the drive portion;
a retrieval circuit retrieving a signal indicative of oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis, in cooperation with the detection portion;
a first servo control circuit forming a first servo control signal, based on the signal inputted from the retrieval circuit indicating oscillation of the oscillation portion in the direction of the Y-axis and a signal inputted from the drive circuit synchronous with oscillation of the oscillation portion caused by the angular rate, the first servo control signal being outputted to the servo portion to restrain oscillation of the oscillation portion in the direction of the Y-axis;
a second servo control circuit forming a second servo control signal, based on the signal that is inputted from the retrieval circuit and indicates oscillation of the oscillation portion in the direction of the Y-axis and a signal that is inputted from the drive circuit and is synchronous with the cross talk of the oscillation portion in the direction of the Y-axis caused by the driving thereof, the second servo control signal being supplied to the servo portion to restrain cross talk; and
an output circuit outputting a signal corresponding to the first servo control signal as a signal indicative of the angular rate. - View Dependent Claims (26, 27, 28)
the first servo control circuit comprises;
a first reference signal forming circuit controlling the amplitude of the signal inputted from the drive circuit synchronous with oscillation of the oscillation portion caused by the angular rate and forming a first reference signal of a predetermined amplitude;
a first synchronous detection circuit synchronously detecting the retrieved signal indicative of oscillation of the oscillation portion in the direction of the Y-axis with the signal inputted from the drive circuit synchronous with oscillation of the oscillation portion caused by the angular rate, the first synchronous detection circuit forming the first servo control signal proportional to a magnitude of oscillation of the oscillation portion in the direction of the Y-axis caused by the angular rate; and
a first servo control signal supplying circuit controlling the amplitude of the first reference signal in accordance with the first servo control signal and supplying the servo portion with the amplitude-controlled first reference signal to restrain oscillation of the oscillation portion in the direction of the Y-axis caused by the angular rate, and wherein the second servo control circuit comprises;
a second reference signal forming circuit controlling the amplitude of the signal inputted from the drive circuit synchronous with cross talk of the oscillation portion caused by the driving thereof, the second reference signal forming circuit forming a second reference signal of a predetermined amplitude;
a second synchronous detection circuit synchronously detecting the retrieved signal indicative of oscillation of the oscillation portion in the direction of the Y-axis with the signal inputted from the drive circuit synchronous with cross talk of the oscillation portion caused by the driving thereof, wherein the second synchronous detection circuit forms a second servo control signal proportional to the magnitude of oscillation of the oscillation portion in the direction of the Y-axis caused by the driving thereof; and
a second servo control signal supplying circuit controlling the amplitude of the second reference signal in accordance with the second servo control signal and supplying the servo portion with the amplitude-controlled second reference signal to restrain oscillation of the oscillation portion in the direction of the Y-axis caused by the driving thereof, and wherein the output circuit outputs the first servo control signal as a signal indicative of the angular rate.
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27. The angular rate detecting device according to claim 26, further comprising an abnormality judging circuit coupled to a downstream side of a path of a signal indicative of oscillation of the oscillation portion in the direction of the Y-axis, the abnormality judging circuit supplying an upstream portion of the path with a dummy signal of a predetermined frequency, wherein the abnormality judging circuit superposes the dummy signal onto the signal indicative of oscillation of the oscillation portion in the direction of the Y-axis and judges whether there is an abnormality in the path based on whether the dummy signal is received.
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28. The angular rate detecting device according to claim 25, further comprising an abnormality judging circuit coupled to a downstream side of a path of a signal indicative of oscillation of the oscillation portion in the direction of the Y-axis, the abnormality judging circuit supplying an upstream portion of the path with a dummy signal of a predetermined frequency, wherein the abnormality judging circuit superposes the dummy signal onto the signal indicative of oscillation of the oscillation portion in the direction of the Y-axis and judges whether there is an abnormality in the path based on whether the dummy signal is received.
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29. An angular rate detecting device comprising:
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an oscillation portion connected to a substrate via a supporting member, the oscillation portion being oscillatable over the substrate in directions of an X-axis and a Y-axis, the X and Y axes being perpendicular to one another;
a drive portion causing the oscillation portion to oscillate with respect to the substrate in the direction of the X-axis;
a detection portion detecting oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis;
an angular rate detector detecting, based on oscillation of the oscillation portion in the direction of the Y-axis, an angular rate effective around a Z-axis, the Z-axis being perpendicular to both the X and Y axes, wherein the oscillation portion oscillates in the direction of the X-axis;
a servo portion restraining oscillation of the oscillation portion in the direction of the Y-axis;
a drive circuit causing the oscillation portion to oscillate with respect to the substrate in the direction of the X-axis with a predetermined amplitude, in cooperation with the drive portion;
a retrieval circuit for retrieving a signal indicative of oscillation of the oscillation portion with respect to the substrate in the direction of the Y-axis, in cooperation with the detection portion;
a first servo control circuit inputting from the drive circuit a signal synchronous with oscillation of the oscillation portion caused by the angular rate, and inputting from the retrieval circuit a signal indicative of oscillation of the oscillation portion in the direction of the Y-axis, wherein, based on the inputted signals, the first servo control circuit forms a first servo control signal restraining oscillation of the oscillation portion in the direction of the Y-axis in accordance with the angular rate and supplies the first servo control signal to the servo portion to restrain oscillation of the oscillation portion in the direction of the Y-axis in accordance with the angular rate;
a second servo control circuit inputting from the drive circuit a signal different in phase from the signal that is synchronous with oscillation of the oscillation portion caused by the angular rate, and inputting from the retrieval circuit a detection signal indicative of oscillation of the oscillation portion in the direction of the Y-axis, forming a second servo control signal which restrains an oscillation component of the oscillation portion in the direction of the Y-axis which component is synchronous with the signal different in phase, wherein the second servo control circuit supplies the formed second servo control signal to the servo portion to restrain the oscillation component of the oscillation portion in the direction of the Y-axis which component is synchronous with the signal different in phase; and
an output circuit for outputting a signal corresponding to the first servo control signal as a signal indicative of the angular rate. - View Dependent Claims (30, 31, 32)
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Specification