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Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same

  • US 6,267,009 B1
  • Filed: 02/16/2000
  • Issued: 07/31/2001
  • Est. Priority Date: 12/14/1998
  • Status: Expired due to Fees
First Claim
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1. A capacitive pressure sensor cell comprising:

  • a ceramic substrate having a cylindrical surface, a first major surface and a second major surface, said second major surface being opposite said first major surface, said first major surface including a concave central area which, as the concave central area extends toward said cylindrical surface, merges into a convex surface having a vertex line, said convex surface forming a planar ring surface proximate to said vertex line, a first electrode located in said concave central area of said first major surface, and an electrical connection extending from said first electrode through said substrate to said second major surface; and

    a ceramic diaphragm having a planar inner surface, a second electrode located on said planar inner surface of said diaphragm, said planar inner surface of said diaphragm resting on said planar ring surface of said first major surface of said substrate, said diaphragm being joined to said substrate by an active brazing solder which is located in a circumferential wedge zone formed between said diaphragm and said substrate and between said planar ring surface and said cylindrical surface, the circumferential wedge zone being configured to inhibit the active brazing solder from entering the concave central area, a high-vacuum-tight sensing chamber being formed between said planar inner surface of said diaphragm and said first major surface of said substrate, and electrical connection to said second electrode being made through said circumferential wedge zone.

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