Wafer level package
First Claim
1. A wafer level package, comprising:
- a silicon chip having at least one integrated circuit device;
an insulation layer covering the integrated circuit device;
a plurality of bonding pads above the insulation layer and distributed along the edges of the silicon chip, wherein each bonding pad is electrically connected to a terminal of the integrated circuit device;
a passivation layer covering the insulation layer and a portion of the bonding pad, wherein the passivation layer has a plurality of openings each exposing a portion of the bonding pad;
a metallic layer covering the interior side walls of the opening, the exposed bonding pad and the passivation layer surrounding the opening, and a portion of the metallic layer even extends from the opening to the edge of the silicon chip;
a packaging layer over the passivation layer outside the area with metallic layer; and
a plurality of metallic bumps over the metallic layer above each opening wherein the metallic bumps are located next to the edge of the silicon chip so that both a top surface and an outer surface of the metallic bump can act as a contacting area for external connections.
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Accused Products
Abstract
A wafer level package structure. The method of forming the wafer level package structure includes covering a silicon chip having a plurality of integrated circuit devices thereon with an insulation layer. Next, a plurality of bonding pads is formed on the periphery of the silicon chip above the insulation layer. The bonding pads are formed such that each bonding pad is electrically connected to the terminal of an integrated circuit device. Thereafter, a passivation layer is deposited over the insulation layer and the bonding pads, and then openings that expose a portion of the bonding pad are formed. Subsequently, a metallic layer is formed on the sidewalls and the exposed bonding pad area. The metallic layer also extends over the passivation layer in the neighborhood of the opening and towards the edge of the wafer chip. Next, a layer of packaging material is deposited over the passivation layer. Finally, a metallic bump is formed over the exposed metallic layer lying above each opening.
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Citations
21 Claims
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1. A wafer level package, comprising:
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a silicon chip having at least one integrated circuit device;
an insulation layer covering the integrated circuit device;
a plurality of bonding pads above the insulation layer and distributed along the edges of the silicon chip, wherein each bonding pad is electrically connected to a terminal of the integrated circuit device;
a passivation layer covering the insulation layer and a portion of the bonding pad, wherein the passivation layer has a plurality of openings each exposing a portion of the bonding pad;
a metallic layer covering the interior side walls of the opening, the exposed bonding pad and the passivation layer surrounding the opening, and a portion of the metallic layer even extends from the opening to the edge of the silicon chip;
a packaging layer over the passivation layer outside the area with metallic layer; and
a plurality of metallic bumps over the metallic layer above each opening wherein the metallic bumps are located next to the edge of the silicon chip so that both a top surface and an outer surface of the metallic bump can act as a contacting area for external connections. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A silicon wafer structure for producing wafer level package, comprising:
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a silicon wafer made up of a plurality of silicon chips with each chip having at least an integrated circuit device, and furthermore two neighboring silicon chips are connected by a scribe line section;
an insulation layer covering the silicon wafer;
a plurality of bonding pads distributed around the edges of each silicon chip, and each bonding pad is electrically connected to a terminal of the integrated circuit device;
a plurality of circuits for chip testing formed on the scribe line sections, and the circuits are electrically connected to the integrated circuit device and bonding pad of a neighboring silicon chip;
a plurality of contacting points leading to the circuit on each scribe line section;
a passivation layer formed over the insulation layer and a portion of each bonding pad such that a plurality of openings that expose the respective bonding pads is formed;
a metallic layer covering the interior side walls of the opening, the exposed bonding pad and the passivation layer surrounding the opening, and a portion of the metallic layer even extends from the opening to the edge of the silicon chip;
a packaging layer over the passivation layer outside the area with metallic layer; and
a plurality of metallic bumps over the metallic layer above each opening wherein the metallic bumps are located next to the edge of the silicon chip so that both a top surface and an outer surface of the metallic bump can act as a contacting area for external connections. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A stack-up structure of wafer level packages, comprising:
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a wafer level packages carrier having at least a bottom panel and a plurality of vertical side panels attached to the edges of the bottom panel, wherein the bottom panel has a plurality of first contacting points on the upper side of the bottom panel and a plurality of second contacting points on the lower side of the bottom panel such that each first contacting point is electrically coupled to a second contacting point, furthermore, the vertical side panel also has a plurality of conductive lines along its surface with each line electrically coupled to one of the first contacting points; and
a plurality of wafer level packages, each of these wafer level packages comprising;
a silicon chip having at least one integrated circuit device;
an insulation layer covering the integrated circuit device;
a plurality of bonding pads above the insulation layer and distributed along the edges of the silicon chip, wherein each bonding pad is electrically connected to a terminal of the integrated circuit device;
a passivation layer covering the insulation layer and a portion of the bonding pad, wherein the passivation layer has a plurality of openings each exposing a portion of the bonding pad;
a metallic layer covering the interior side walls of the opening, the exposed bonding pad and the passivation layer surrounding the opening, and a portion of the metallic layer even extends from the opening to the edge of the silicon chip;
a packaging layer over the passivation layer outside the area with metallic layer; and
a plurality of metallic bumps over the metallic layer above each opening, wherein the wafer level packages stack up from the bottom panel such that the metallic bumps of the package closest to the bottom panel is able to contact the first contacting points of the carrier whereas the metallic bumps of other packages contact the conductive lines along the vertical side panels of the carrier. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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Specification