Electrostatic chuck and method of manufacture

• US 6,268,994 B1
• Filed: 07/09/1999
• Issued: 07/31/2001
• Est. Priority Date: 07/09/1999
• Status: Expired due to Term

• Current Assignee: FM Industries Inc. (NGK Insulators Limited)
• Original Assignee: Dorsey GAGE Company Incorporated
• Inventors: Tompkins, Robert, Logan, Joseph, Miller, John R.
• Primary Examiner(s): FLEMING, FRITZ M
• Application Number:
  US09/350,726
• Time in Patent Office: 753 Days
• Field of Search: 361/230-235, 298/25, 298/29, 279/128
• US Class Current: 361/234
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: H02N 13/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means

Abstract

An electrostatic chuck is formed by: providing a conductive base member; machining a pattern of ridges in the top surface of the base member; providing through holes in the base member; inserting insulated contact posts into through holes and joining same to the base member in such manner that the contact posts extend above the top surface of the base member; depositing a first insulating layer over the base member top surface, ridges and the contact posts, the thickness of the insulating layer being less than the height of the contact posts above the base member surface; removing the first insulative layer from the top of the contact posts and removing a portion of the contact posts in such manner that the contact posts are flush with the surrounding first insulating layer; depositing a conductive layer over the first insulating layer and the tops of the contact posts, the thickness of the conductive layer being approximately the height of the ridges; grinding the top surface of the base member flat to the point of exposing the first insulating layer over the ridges to form separate electrodes; depositing a second insulating layer over the conductive layer and first insulating layer; and, joining the conductive base member to a supporting frame.

Claims

1. The method of forming an electrostatic chuck that includes the steps of:

providing a conductive base member;

machining a pattern of ridges in the top surface of the base member;

providing through holes in the base member;

inserting contact posts into through holes and joining same to the base member in such manner that the contact posts extend above the top surface of the base member;

depositing a first insulating layer over the base member top surface, ridges and the contact posts, the thickness of the insulating layer being less than the height of the contact posts above the base member surface;

removing the first insulating layer from the top of the contact posts and removing a portion of contact posts in such manner that the contact posts are flush with the surrounding first insulating layer;

depositing a conductive layer over the first insulating layer and the tops of the contact posts, the thickness of the conductive layer being approximately the height of the ridges;

grinding the top surface of the base member flat to the point of exposing the first insulative layer over the ridges to form separate clamping electrodes; and

,

depositing a second insulating layer over the conductive layer and first insulating layer.

2. The method of claim 1 including joining the conductive base member to a supporting frame.

3. The method of claim 1 including forming the base member integral with a support which acts as a frame.

4. The product provided by the method of claim 1.

5. The product provided by the method of claim 2.

6. The product provided by the method of claim 3.