Control system
First Claim
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1. A control system, comprising:
- a plurality of controller units for individually controlling a plurality of processing units for carrying out predetermined processes to a substrate; and
a control unit including a server unit having a storing section for storing the process data generated by each of the controller units, and a client unit having an editing section for reading the stored process data from the server unit and editing the process data, and a display section for displaying the edited data obtained by said editing section.
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Abstract
A control system structured by a plurality of controller units for individually controlling a plurality of processing units for performing predetermined processes to a substrate, and a control unit including a server unit having a memory for reading and storing the process data generated by each control unit and a client unit having an editing section for reading the stored process data from the server unit and editing this process data and a display section for displaying the edited data.
48 Citations
18 Claims
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1. A control system, comprising:
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a plurality of controller units for individually controlling a plurality of processing units for carrying out predetermined processes to a substrate; and
a control unit including a server unit having a storing section for storing the process data generated by each of the controller units, and a client unit having an editing section for reading the stored process data from the server unit and editing the process data, and a display section for displaying the edited data obtained by said editing section. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A control system, comprising:
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a plurality of controller units divided into a plurality of groups and for individually controlling a plurality of processing units for carrying out predetermined processes to a substrate in relation to a host computer; and
a control unit including a plurality of server units each provided corresponding to each predetermined group of the processing units and having a storage section for reading and storing all the process data generated by each of the controller units, and a client unit having an editing section for reading the stored process data from the server unit and editing the process data, and a display section for displaying the edited data. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A control system, comprising:
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a plurality of controller units divided into a plurality of groups including a plurality of processing units each being set at the same process conditions and for individually controlling the plurality of processing units for carrying out predetermined processes to a substrate in association with a host computer; and
a control unit including a client unit provided corresponding to each group and having means for reading and editing process data and means for displaying converted data.
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14. A control system, comprising:
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a plurality of controller units for individually controlling a plurality of processing units for carrying out predetermined processes to a substrate;
a host computer for controlling the controller units based on process data generated by each of the controller units; and
a control unit including a plurality of server units each provided corresponding to each group of the processing units to which the same process conditions are set and having means for reading and storing the process data generated by each of the controller units, a client unit for reading the stored process data from the server units and editing the process data and a client unit having means for displaying the edited data.
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15. A control system, comprising:
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a plurality of controller units for individually controlling a plurality of processing units for carrying out predetermined processes to a substrate;
a host computer for controlling each of the controller units based on process data received from each of the controller units; and
a control unit having means for collecting the process data received from each of the controller units, means for analyzing the collected process data and means for outputting a result of the analysis, wherein each of the controller units has means for generating process data, means for transmitting a preset part of the process data from among the generated process data to the host computer and means for transmitting the generated process data to the control unit. - View Dependent Claims (16)
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17. A control system, comprising:
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a plurality of controller units for individually controlling a plurality of processing units for carrying out predetermined processes to a substrate;
a host computer for controlling each of the controller units based on process data received from each of the controller units; and
a control unit having means for collecting the process data received from each of the controller units, means for analyzing the collected process data and means for updating process conditions of each processing unit based on a result of the analysis, wherein each of the controller units has means for generating process data, means for transmitting a preset part of the process data from among the generated process data to the host computer and means for transmitting all the generated process data to the control unit. - View Dependent Claims (18)
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Specification