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Control system

  • US 6,269,279 B1
  • Filed: 06/22/1998
  • Issued: 07/31/2001
  • Est. Priority Date: 06/20/1997
  • Status: Expired due to Term
First Claim
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1. A control system, comprising:

  • a plurality of controller units for individually controlling a plurality of processing units for carrying out predetermined processes to a substrate; and

    a control unit including a server unit having a storing section for storing the process data generated by each of the controller units, and a client unit having an editing section for reading the stored process data from the server unit and editing the process data, and a display section for displaying the edited data obtained by said editing section.

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