Spin processing apparatus

• US 6,269,548 B1
• Filed: 10/14/1998
• Issued: 08/07/2001
• Est. Priority Date: 06/27/1997
• Status: Expired due to Fees

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation
• Inventors: Maeda, Kazuaki, Yoshioka, Junichiro, Hongo, Akihisa, Shinozaki, Hiroyuki
• Primary Examiner(s): WILSON, PAMELA ANNE
• Application Number:
  US09/172,147
• Time in Patent Office: 1,028 Days
• Field of Search: 34/58, 343/12, 343/17, 34/92, 342/02
• US Class Current: 34/58
• CPC Class Codes: F16C 2300/62 low pressure, e.g. elements operating under vacuum conditions
• CPC Class Codes: H01L 21/68792 characterised by the construction of the shaft

Abstract

A spin processing apparatus can prevent contamination of workpieces by wear particles, and can operate at high efficiency while lowering the noise level associated with the operation of the apparatus. The spin processing apparatus includes a chamber, a spin holder disposed inside the chamber for holding workpieces, and driver device for rotating the spin holder. A supporting device is provided for rotatably supporting the spin holder in a non-contact manner through a magnetically-operated mechanism.

Claims

1. A spin processing apparatus for processing workpieces while rotating the workpieces, said apparatus comprising:

a chamber;

a spin holder, disposed in said chamber, for holding workpieces, said spin holder including two side plates, and a plurality of rods, connecting said two side plates, for supporting the workpieces;

at least one rotational shaft extending from one of said plates and defining a rotational axis of said spin holder;

a driver device for rotating said rotational shaft, and thereby said spin holder, about said rotational axis;

a supporting device, including a magnetically operated mechanism, for rotatably supporting said rotational shaft in a non-contact manner; and

anti-vibration positioning means for controlling vibrational movement of said spin holder upon stopping of said spin holder.

2. An apparatus as claimed in claim 1, wherein said magnetically operated mechanism comprises a radial magnetic bearing device providing radial support for said rotational shaft, and an axial magnetic bearing device.

3. An apparatus as claimed in claim 1, further comprising a magnetic coupler joining said rotational shaft to said driver device in non-contact manner.

4. An apparatus as claimed in claim 3, further comprising a partition between said rotation shaft and said driver member and providing a hermetic seal therebetween.

5. An apparatus as claimed in claim 1, further comprising a fluid supply for introducing a fluid medium into said chamber.

6. An apparatus as claimed in claim 1, further comprising a fluid discharge for discharging a fluid medium from said chamber.

7. An apparatus as claimed in claim 1, further comprising a pressure control for controlling a pressure within said chamber over a pressure range from atmospheric pressure to a high vacuum.

8. An apparatus as claimed in claim 1, further comprising a gas supply for supplying a purge gas through said magnetically operated mechanism to eliminate particles in said mechanism.

9. An apparatus as claimed in claim 1, wherein said at least one rotational shaft comprises two rotational shafts extending in opposite directions from respective said two side plates, and said magnetically operated mechanism comprises respective passive magnetic bearings supporting said two rotational shafts in a non-contact manner.

10. An apparatus as claimed in claim 1, wherein said at least one rotational shaft comprises a single rotational shaft extending from said one side plate, and said magnetically operated mechanism comprises plural active magnetic bearings supporting said single rotational shaft in a non-contact manner.

11. A spin processing apparatus for processing workpieces while rotating the workpieces, said apparatus comprising:

a chamber;

a spin holder, disposed in said chamber, for holding workpieces, said spin holder including two side plates, and a plurality of rods, connecting said two side plates, for supporting the workpieces;

at least one rotational shaft extending from one of said plates and defining a rotational axis of said spin holder;

a driver device for rotating said rotational shaft, and thereby said spin holder, about said rotational axis;

a supporting device, including a magnetically operated mechanism, for rotatably supporting said rotational shaft in a non-contact manner; and

a pressure control for controlling a pressure within said chamber over a pressure range from atmospheric pressure to a high vacuum.

12. An apparatus as claimed in claim 11, wherein said magnetically operated mechanism comprises a radial magnetic bearing device providing radial support for said rotational shaft, and an axial magnetic bearing device.

13. An apparatus as claimed in claim 11, further comprising a magnetic coupler joining said rotational shaft to said driver device in a non-contact manner.

14. An apparatus as claimed in claim 13, further comprising a partition between said rotational shaft and said driver member and providing a hermetic seal therebetween.

15. An apparatus as claimed in claim 11, further comprising a fluid supply for introducing a fluid medium into said chamber.

16. An apparatus as claimed in claim 11, further comprising a fluid discharge for discharging a fluid medium from said chamber.

17. An apparatus as claimed in claim 11, further comprising a gas supply for supplying a purge gas through said magnetically operated mechanism to eliminate particles in said mechanism.

18. An apparatus as claimed in claim 11, wherein said at least one rotational shaft comprises two rotational shafts extending in opposite directions from respective said two side plates, and said magnetically operated mechanism comprises respective passive magnetic bearings supporting said two rotational shafts in a non-contact manner.

19. An apparatus as claimed in claim 11, wherein said at least one rotational shaft comprises a single rotational shaft extending from said one side plate, and said magnetically operated mechanism comprises plural active magnetic bearings supporting said single rotational shaft in non-contact manner.