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Chemical delivery systems and methods of delivery

  • US 6,269,975 B2
  • Filed: 05/11/2000
  • Issued: 08/07/2001
  • Est. Priority Date: 12/30/1998
  • Status: Expired due to Term
First Claim
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1. A method of liquid chemical delivery in a system comprising a multi-reservoir load cell assembly, including a main reservoir, a buffer reservoir, at least one load cell, and a logic device which triggers a refill sequence, comprising:

  • isolating the buffer reservoir from the main reservoir;

    reducing pressure in the main reservoir to draw liquid chemical into the main reservoir;

    weighing liquid chemical by the multi-reservoir load cell assembly;

    supplying the main reservoir with inert gas; and

    transporting liquid chemical from the main reservoir to the buffer reservoir.

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