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Artificial latticed multi-layer film deposition apparatus

  • US 6,270,633 B1
  • Filed: 10/28/1999
  • Issued: 08/07/2001
  • Est. Priority Date: 02/14/1997
  • Status: Expired due to Fees
First Claim
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1. An artificial latticed multi-layer film deposition apparatus comprising:

  • a target;

    a magnetron magnet disposed on a lower side of said target;

    a chimney put in place covering said target, said chimney having an end left open formed at an end thereof situated opposite to said target;

    a disc shaped dome disposed above said chimney; and

    a substrate disposed on a lower surface of said disc shaped dome, wherein a plasma ring is generated from an upper surface of said target by an excitation of said magnetron magnet;

    said disc shaped dome is disposed in such a way as allowed to pass over said target a multiple number of times;

    a configuration of said plasma ring has a straight line section perpendicular to the moving direction of said substrate; and

    molecules sputtered by said plasma ring are deposited on said substrate, wherein said plasma ring is substantially trapezoidal in shape on said upper surface of said target.

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