Chemically enhanced anneal for removing trench stress resulting in improved bipolar yield
First Claim
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1. A method of substantially reducing stress in a trench comprising:
- (a) forming at least one trench in a substrate, said substrate having a surface;
(b) filling the at least one trench with a trench dielectric material;
(c) planarizing the filled trench stopping on said surface of said substrate; and
(d) subjecting the planarized trench to an anneal step so as to substantially reduce stress at corner regions that exist between the planarized trench and said substrate, said anneal step is carried out under rapid thermal conditions at a temperature of about 800°
C. or above and in the presence of an atmosphere comprising hydrogen.
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Abstract
A method of substantially reducing stress in a trench comprising forming at least one trench in a substrate, said substrate having a surface; filling the at least one trench with a trench dielectric material; planarizing the filled trench stopping on said surface of said substrate; and subjecting the planarized trench to an anneal step, said anneal step being carried out under rapid thermal conditions at a temperature of about 800° C. or above and in the presence of an atmosphere comprising hydrogen.
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Citations
30 Claims
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1. A method of substantially reducing stress in a trench comprising:
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(a) forming at least one trench in a substrate, said substrate having a surface;
(b) filling the at least one trench with a trench dielectric material;
(c) planarizing the filled trench stopping on said surface of said substrate; and
(d) subjecting the planarized trench to an anneal step so as to substantially reduce stress at corner regions that exist between the planarized trench and said substrate, said anneal step is carried out under rapid thermal conditions at a temperature of about 800°
C. or above and in the presence of an atmosphere comprising hydrogen.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification