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Exposure apparatus having reaction frame

  • US 6,271,640 B1
  • Filed: 11/10/1999
  • Issued: 08/07/2001
  • Est. Priority Date: 04/01/1994
  • Status: Expired due to Term
First Claim
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1. An exposure apparatus that transfers an image onto an object, comprising:

  • a support structure;

    an exposure device, supported on the support structure, to expose the image onto the object;

    a stage movably supported by the support structure;

    a reaction frame that is dynamically isolated from the support structure; and

    a drive, connected at least partly to the reaction frame, to move the stage, wherein a reaction force caused by the movement of the stage is transferred substantially to the reaction frame.

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