Method of manufacturing spatial light modulator and electronic device employing it

• US 6,271,955 B1
• Filed: 05/31/2000
• Issued: 08/07/2001
• Est. Priority Date: 12/01/1995
• Status: Expired due to Fees

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Yotsuya, Shinichi, Koeda, Hiroshi, Atobe, Mitsuro
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): Spector, David N.
• Application Number:
  US09/585,880
• Time in Patent Office: 433 Days
• Field of Search: 359/290, 359/291, 359/292, 359/223, 359/224, 359/295, 359/298, 359/855
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

Claims

1. A projector comprising:

a light source that emits light;

at least one modulation device that modulates the light emitted from said light source, said modulation device comprising;

a plurality of micromirrors for reflecting the light;

a plurality of pillars for supporting said plurality of micromirrors; and

a plurality of electrodes for driving said plurality of micromirrors by means of a coulomb force;

a circuit substrate comprising a plurality of pairs of said electrodes, each pair positioned opposite a respective one of said plurality of micromirrors, and a circuit element for energizing said plurality of pairs of electrodes; and

a projection lens that projects the light modulated by said modulation device.

2. The projector of claim 1, further comprising a color filter arranged between said light source and said modulation device.

3. The projector of claim 2, wherein said color filter is rotary color filter.

4. The projector of claim 1, further comprising a separating prism for separating the light into at least two wavelength regions.

5. The projector of claim 1, further comprising a torsion bar coupling said micromirrors, and wherein said pillars and said torsion bar are bonded.