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Method of manufacturing spatial light modulator and electronic device employing it

  • US 6,271,955 B1
  • Filed: 05/31/2000
  • Issued: 08/07/2001
  • Est. Priority Date: 12/01/1995
  • Status: Expired due to Fees
First Claim
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1. A projector comprising:

  • a light source that emits light;

    at least one modulation device that modulates the light emitted from said light source, said modulation device comprising;

    a plurality of micromirrors for reflecting the light;

    a plurality of pillars for supporting said plurality of micromirrors; and

    a plurality of electrodes for driving said plurality of micromirrors by means of a coulomb force;

    a circuit substrate comprising a plurality of pairs of said electrodes, each pair positioned opposite a respective one of said plurality of micromirrors, and a circuit element for energizing said plurality of pairs of electrodes; and

    a projection lens that projects the light modulated by said modulation device.

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