Method of manufacturing spatial light modulator and electronic device employing it
First Claim
1. A projector comprising:
- a light source that emits light;
at least one modulation device that modulates the light emitted from said light source, said modulation device comprising;
a plurality of micromirrors for reflecting the light;
a plurality of pillars for supporting said plurality of micromirrors; and
a plurality of electrodes for driving said plurality of micromirrors by means of a coulomb force;
a circuit substrate comprising a plurality of pairs of said electrodes, each pair positioned opposite a respective one of said plurality of micromirrors, and a circuit element for energizing said plurality of pairs of electrodes; and
a projection lens that projects the light modulated by said modulation device.
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Accused Products
Abstract
A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.
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Citations
5 Claims
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1. A projector comprising:
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a light source that emits light;
at least one modulation device that modulates the light emitted from said light source, said modulation device comprising;
a plurality of micromirrors for reflecting the light;
a plurality of pillars for supporting said plurality of micromirrors; and
a plurality of electrodes for driving said plurality of micromirrors by means of a coulomb force;
a circuit substrate comprising a plurality of pairs of said electrodes, each pair positioned opposite a respective one of said plurality of micromirrors, and a circuit element for energizing said plurality of pairs of electrodes; and
a projection lens that projects the light modulated by said modulation device. - View Dependent Claims (2, 3, 4, 5)
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Specification