Specialized metal profile for via landing areas
First Claim
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1. A method of manufacturing an interconnection structure in a semiconductor device, said method comprising:
- forming a first dielectric layer on a substrate;
forming a patterned first metal layer having gaps on the first dielectric layer, wherein the patterned metal layer comprises a first metal feature having a top surface, a bottom surface, and side surfaces tapering inwardly from the top surface to the bottom surface;
forming second dielectric layer on the patterned first metal layer;
forming a through-hole in the second dielectric layer;
filling the through-hole with a second metal layer; and
forming a second metal feature on the second metal layer, said second metal feature being electrically connected to the first metal feature via the through-hole with the second metal layer.
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Abstract
A metal feature, defined by gaps in a patterned metal layer, is formed with an inwardly tapering profile so that it is wider at the top than at the bottom. The metal feature advantageously presents a larger landing area for vias while maintaining the dimensions and intraline coupling capacitance required by design. The gaps in the patterned metal layer can be filled with a spin-on dielectric material such as spin-on glass (SOG) or hydrogen silsesquioxane (HSQ).
18 Citations
22 Claims
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1. A method of manufacturing an interconnection structure in a semiconductor device, said method comprising:
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forming a first dielectric layer on a substrate;
forming a patterned first metal layer having gaps on the first dielectric layer, wherein the patterned metal layer comprises a first metal feature having a top surface, a bottom surface, and side surfaces tapering inwardly from the top surface to the bottom surface;
forming second dielectric layer on the patterned first metal layer;
forming a through-hole in the second dielectric layer;
filling the through-hole with a second metal layer; and
forming a second metal feature on the second metal layer, said second metal feature being electrically connected to the first metal feature via the through-hole with the second metal layer.
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2. A method of manufacturing a semiconductor device, said method comprising:
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forming a first dielectric layer on a substrate;
forming a patterned metal layer having gaps on the first dielectric layer, wherein the patterned metal layer comprises a metal feature having a top surface, a bottom surface, and side surfaces tapering inwardly from the top surface to the bottom surface; and
forming second dielectric layer on the patterned metal layer, wherein the patterned metal layer is formed by;
depositing a lower metal layer;
depositing an intermediate layer of aluminum or an aluminum alloy;
depositing an upper anti-reflective coating;
etching to pattern the metal layer forming a plurality of gaps; and
filling the gaps with a dielectric material. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
etching to form a through-hole having an internal surface in the second dielectric layer and expose a portion of the top of the metal feature; and
depositing a layer of barrier material to line the internal surface of the through-hole.
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17. The method of claim 16, comprising depositing the layer of barrier material by chemical vapor deposition.
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18. The method of claim 16, comprising depositing the later of barrier material by sputtering.
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19. The method of claim 16, wherein the lower metal layer comprises titanium or tungsten;
- and the anti-reflective coating comprises titanium-titanium nitride.
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20. The method of claim 19, comprising filling the through-hole with a conductive material to form a via.
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21. The method of claim 20, wherein the conductive material comprises tungsten.
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22. The method of claim 16, comprising forming a second patterned metal layer on the second dielectric layer, wherein the second patterned metal layer comprises a second metal feature electrically connected to the metal feature through the via.
Specification