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Thermally activated microelectromechanical systems actuator

  • US 6,275,325 B1
  • Filed: 04/07/2000
  • Issued: 08/14/2001
  • Est. Priority Date: 04/07/2000
  • Status: Active Grant
First Claim
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1. A microelectrical mechanical actuator, comprising:

  • (a) a planar substrate;

    (b) a first member having first and second ends and wherein the first end of the first member is coupled to the substrate and the first member has a first electrical conductivity;

    (c) a second member having first and second ends and wherein the first end of the second member is coupled to the substrate and the second ends of the first and second member are coupled together and the second member has a second electrical conductivity; and

    (d) wherein electrical current is conducted along the first member and the second member causing thermal expansion of the first and second members and the first and second members expand at different rates thereby causing the second ends of the members to move away from the substrate.

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