Thermally activated microelectromechanical systems actuator

• US 6,275,325 B1
• Filed: 04/07/2000
• Issued: 08/14/2001
• Est. Priority Date: 04/07/2000
• Status: Active Grant

• Current Assignee: Microsoft Technology Licensing LLC (Microsoft Corporation)
• Original Assignee: Microsoft Corporation
• Inventors: Sinclair, Michael J.
• Primary Examiner(s): MACK, RICKY LEVERN
• Application Number:
  US09/545,558
• Time in Patent Office: 494 Days
• Field of Search: 359/223, 359/224, 359/290, 359/291, 359/813, 359/822
• US Class Current: 359/291
• CPC Class Codes: B81B 2201/031 Thermal actuators
• CPC Class Codes: B81B 3/0024 Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators electric motors using thermal effects H02N10/00
• CPC Class Codes: G02B 26/0816 by means of one or more reflecting elements
• CPC Class Codes: H01H 2061/008 Micromechanical actuator with a cold and a hot arm, coupled together at one end

Abstract

A microelectrical mechanical system (MEMS) actuator having coupled members that undergo different amounts of thermal expansion is disclosed for moving micromechanical objects, such as a mirror, toward and away from a surface or a planar substrate. The actuator members are a first elongate member and a second elongate member that are coupled together at their respective distal ends. At their respective proximal ends, the members are mounted onto discrete electrical paths formed on the substrate. Thus, current applied to one electrical pathway is conducted along the first member to the second member, and to the other electrical path. The first member includes a metal conductor that provides a reduced resistivity for electrical current. Thus, when current is applied to the actuator, the second member generates more thermal energy due to its increased resistance and thereby thermally expands a greater amount than the first member. By thermally expanding the second member more than the first member, the distal ends of the first and second members are constrained to move away from the substrate. This movement is used to move a mirror out of the plane of the planar substrate. To accommodate the changing distance and angles between the actuator and the mirror, a sliding hinge is located between the actuator and the mirror.

Claims

1. A microelectrical mechanical actuator, comprising:

(a) a planar substrate;

(b) a first member having first and second ends and wherein the first end of the first member is coupled to the substrate and the first member has a first electrical conductivity;

(c) a second member having first and second ends and wherein the first end of the second member is coupled to the substrate and the second ends of the first and second member are coupled together and the second member has a second electrical conductivity; and

(d) wherein electrical current is conducted along the first member and the second member causing thermal expansion of the first and second members and the first and second members expand at different rates thereby causing the second ends of the members to move away from the substrate.

2. The microelectrical mechanical actuator of claim 1 wherein the first member includes a conductor material and a semiconductor material.

3. The microelectrical mechanical actuator of claim 1 wherein the first member includes a low resistivity layer coupled thereto along a length thereof.

4. The microelectrical mechanical actuator of claim 1 further comprising a first source of electrical energy and a second source of electrical energy wherein the first source of electrical energy provides a first current to the actuator so as to move the second ends of the members to a first position away from the substrate and the second source of electrical energy provides a second current so as to move the second ends of the members to a second position away from the substrate.

5. The microelectrical mechanical actuator of claim 1 further comprising a source of electrical energy that provides a first current and a second current wherein the first current moves the second ends of the members a first distance away from the substrate and the second current moves the second ends of the members a second distance away from the substrate.

6. The microelectrical mechanical actuator of claim 1 further comprising a third member and wherein the third member is substantially similar to the second member and includes a first end coupled to the substrate and a second end coupled to the first member.

7. The microelectrical mechanical actuator of claim 6 wherein the first, second and third members are elongate and the second and third members are arranged laterally outboard of the first member.

8. The microelectrical mechanical actuator of claim 1 further comprising a sliding hinge having a shank and stock captured in a shackle.

9. The microelectrical mechanical actuator of claim 1 further comprising a sliding hinge coupled to the second end of the second member.

10. The microelectrical mechanical actuator of claim 1 further comprising an object that is moved by the actuator and a sliding hinge that is coupled to the object and the actuator that can change length and angle to accommodate motion of the object relative to the actuator.

11. A microelectrical mechanical actuator, comprising:

(a) a planar substrate;

(b) a first member having first and second ends and a first elongate portion located there between, wherein the first end is fixedly coupled to the substrate and the first elongate portion is arranged to extend over the substrate such that the longitudinal axis of the first elongate portion is substantially parallel to the plane of the substrate and is located a first distance above the substrate; and

(c) a second member having first and second ends and a second elongate portion located there between, wherein the first end is fixedly coupled to the substrate and the second elongate portion is arranged to extend over the substrate such that the longitudinal axis of the second elongate portion is substantially parallel to the plane of the substrate and is located a second distance above the substrate, and the second ends of the first and second members are coupled so that electrical current can flow through the first member to and through the second member;

(d) wherein the first distance of the first elongate portion is not equal to the second distance of the second elongate portion; and

(e) wherein Joule heating occurs when electrical current flows through the first and second members and the first member undergoes a first amount of thermal expansion, and the second member undergoes a second amount of thermal expansion that is not equal to the first amount of thermal expansion of the first member, so that the coupled second ends of the first and second members move relative to the substrate.

12. The microelectrical mechanical actuator of claim 11 wherein the second elongate portion comprises a first and second leg and the first leg is located proximate a first side of the first member and the second leg is located proximate a second side of the first member.

13. The microelectrical mechanical actuator of claim 11 wherein the second elongate portion comprises a first and second leg and the first leg is located proximate and outboard a first side of the first member and the second leg is located proximate and outboard a second side of the first member.

14. The microelectrical mechanical actuator of claim 11 wherein the second ends of the first and second members move along an axis that extends from the plane of the substrate when the first and second members undergo thermal expansion.

15. The microelectrical mechanical actuator of claim 11 wherein the first member includes a low electrical resistance layer so that an electrical resistance of the first member is less than an electrical resistance of the second member whereby less Joule heating occurs in the first member than the second member when current is conducted along the first and second members.

16. The microelectrical mechanical actuator of claim 11 wherein the first member comprises conductor material and semiconductor material.

17. An actuator device, comprising:

(a) a planar substrate;

(b) a first and a second actuator; and

(c) a mirror having a first margin coupled to the first actuator and a second margin coupled to the second actuator so as to locate a first portion of the mirror at a first distance from the substrate;

(d) wherein the first and second actuators each include first and second members having first ends that are fixedly arranged on the substrate and second ends that are electrically and fixedly coupled, whereby current can be selectively applied to the first or second actuator to cause thermal expansion of the actuator members that moves the first portion of the mirror from the first distance to a second distance from the substrate and the first and second distances are not equal.

18. The actuator device of claim 17 further comprising third and fourth actuators and wherein the third actuator is coupled to a third margin of the mirror and the fourth actuator is coupled to a fourth margin of the mirror and wherein the third and fourth actuators include first and second members having first ends that are fixedly arranged on the substrate and second ends that are electrically and fixedly coupled, whereby current can be selectively applied to the first, second, third, or fourth actuator to cause thermal expansion of the members that moves the first mirror portion from the first distance to the second distance.

19. The actuator device of claim 18 wherein the first and second actuators can cause the mirror to rotate about a first axis of rotation and the third and fourth actuators can cause the mirror to rotate about a second axis of rotation.

20. The actuator device of claim 17 wherein the mirror is substantially planar and when the first mirror portion is located at the first distance the mirror is substantially parallel to the substrate and when the first mirror portion is at the second distance the mirror is oblique to the substrate.

21. The actuator device of claim 17 wherein the first members of the first and second actuators include a conductor portion and a semiconductor portion.

22. The actuator device of claim 17 further comprising a source of electrical energy that can be selectively coupled to the first and second actuator, wherein the source of electrical energy provides an elevating current that moves the first mirror portion from the first distance to the second distance and a deflecting current that moves the first mirror portion from the second distance to a third distance.

23. The actuator device of claim 17 wherein the mirror is planar and the first and second actuators suspend the mirror in a first orientation that is substantially parallel to the substrate and spaced from the substrate by the first distance, and both actuators may be activated so as to move the mirror to a second orientation that is substantially parallel to the substrate and spaced from the substrate by the second distance.

24. The actuator device of claim 17 further comprising sliding hinges and wherein the first and second actuator are coupled to the mirror by the sliding hinges so that a distance and angle between the actuators and mirror can change when the first or second actuator is activated by applied current.