Conductive ball attaching apparatus and method
First Claim
1. A conductive ball attaching apparatus for picking up and conveying a plurality of conductive balls and attaching the conductive balls onto electrodes of a substrate, said conductive ball attaching apparatus comprising:
- a first positional recognition mark on said substrate;
a second positional recognition mark on said substrate, wherein said first and second positional recognition marks are spaced distant from each other;
a conductive ball attaching section where the substrate is to be placed;
a conductive ball supply section where the conductive balls are provided;
a suction head movable between the conductive ball attachment section and the conductive ball supply section along an imaginary horizontal plane;
a first camera associated with the suction head and movable, along the imaginary horizontal plane, to a position above the first positional recognition mark of the substrate placed at the conductive ball attaching section; and
a second camera associated with the suction head and movable, along the imaginary horizontal plane, to a position above the second positional recognition mark of the substrate placed at the conductive ball attaching section.
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Abstract
An apparatus and a method for attaching conductive balls by which the tact time necessary for the positional recognition of a substrate before the conductive balls are attached onto a substrate can be greatly reduced. A first camera and a second camera are moved together a suction head. After the suction head picks up the conductive balls in a conductive ball supply section, the suction head is moved to a position above a flux supply section so that flux can be attached to the conductive balls 10, and concurrently the first camera recognizes a positional recognition mark on a substrate. Then, during when the suction head is moved to a position above the substrate, the second camera recognizes another positional recognition mark on the substrate. In accordance with the positional recognition conducted above, the suction head is positioned accurately with respect to the substrate, and then the conductive balls are attached onto the electrodes on the substrate.
23 Citations
27 Claims
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1. A conductive ball attaching apparatus for picking up and conveying a plurality of conductive balls and attaching the conductive balls onto electrodes of a substrate, said conductive ball attaching apparatus comprising:
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a first positional recognition mark on said substrate;
a second positional recognition mark on said substrate, wherein said first and second positional recognition marks are spaced distant from each other;
a conductive ball attaching section where the substrate is to be placed;
a conductive ball supply section where the conductive balls are provided;
a suction head movable between the conductive ball attachment section and the conductive ball supply section along an imaginary horizontal plane;
a first camera associated with the suction head and movable, along the imaginary horizontal plane, to a position above the first positional recognition mark of the substrate placed at the conductive ball attaching section; and
a second camera associated with the suction head and movable, along the imaginary horizontal plane, to a position above the second positional recognition mark of the substrate placed at the conductive ball attaching section. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
a moving table for moving the suction head along the imaginary horizontal plane.
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3. A conductive ball attaching apparatus according to claim 2, wherein the moving table includes:
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a first table movable in a first direction along the imaginary horizontal plane, and supporting the first camera; and
a second table supported by the first table and movable relative to the first table in a second direction perpendicular to the first direction along the imaginary horizontal plane, the second table supporting the suction head.
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4. A conductive ball attaching apparatus according to claim 3, wherein when said first table is moved in the first direction to move the suction head in the first direction, the first camera is moved in the first direction together with the suction head.
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5. A conductive ball attaching apparatus according to claim 3, wherein the second camera is mounted on the suction head.
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6. A conductive ball attaching apparatus according to claim 3, wherein the second camera is supported by the first table.
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7. A conductive ball attaching apparatus according to claim 2, wherein the first and second cameras are mounted on the suction head.
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8. A conductive ball attaching apparatus according to claim 7, wherein when the suction head is moved in a first direction along the imaginary horizontal plane by the moving table, the first camera is moved in the first direction together with the suction head, and when the suction head is moved in a second direction perpendicular to the first direction along the imaginary horizontal plane by the moving table, the first camera is moved in the second direction together with the suction head.
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9. A conductive ball attaching apparatus according to claim 3, wherein the first camera is supported by the first table through a first camera moving mechanism.
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10. A conductive ball attaching apparatus according to claim 9, wherein the second camera is supported by the first table through a second camera moving mechanism.
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11. A conductive ball attaching apparatus according to claim 1, further comprising:
a conveyor for conveying the substrate.
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12. A conductive ball attaching apparatus comprising:
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a conveyer for conveying a substrate having two positional recognition marks distant from each other;
a conductive ball supply section arranged adjacent to the conveyor for supplying conductive balls;
a suction head for vacuum-absorbing and picking up the conductive balls accommodated in the conductive ball supply section, and conveying and attaching the conductive balls onto the substrate;
a moving table for moving the suction head along an imaginary horizontal plane; and
first and second cameras for observing the two positional recognition marks, each of said first and second cameras being movable in at least one direction along the imaginary horizontal plane together with the suction head when the suction head is driven by the moving table. - View Dependent Claims (13, 14, 15, 16)
a first table movable in a first direction along the imaginary horizontal plane; and
a second table supported by the first table and movable relative to the first table in a second direction perpendicular to the first direction along the imaginary horizontal plane, the second table supporting the suction head.
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14. A conductive ball attaching apparatus according to claim 13, wherein the first camera is supported by the first table, and the second camera is mounted on the suction head.
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15. A conductive ball attaching apparatus according to claim 13, wherein the first and second cameras are supported by the first table.
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16. A conductive ball attaching apparatus according to claim 13, wherein the first and second cameras are mounted on the suction head.
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17. A conductive ball attaching apparatus for picking up and conveying a plurality of conductive balls and attaching the conductive balls onto electrodes of a substrate, said conductive ball attaching apparatus comprising:
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a first positional recognition mark on said substrate;
a second positional recognition mark on said substrate, wherein said first and second positional recognition marks are spaced distant from each other;
a conductive ball attaching section where the substrate is to be placed;
a conductive ball supply section where the conductive balls are provided;
a suction head movable between the conductive ball attachment section and the conductive ball supply section;
a first camera associated with the suction head and movable to a position above the first positional recognition mark of the substrate placed at the conductive ball attaching section; and
a second camera associated with the suction head and movable to a position above the second positional recognition mark of the substrate placed at the conductive ball attaching section. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
a first table and a second table, said first table being movable in a first direction and supporting said first camera, said second table being supported by the first table and being movable relative to the first table in a second direction transverse to the first direction, said second table supporting the suction head.
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24. A conductive ball attaching apparatus according to claim 23, wherein, when the first table is moved in the first direction to move the suction head in the first direction, the first camera is moved in the first direction together with the suction head.
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25. A conductive ball attaching apparatus according to claim 24, wherein the second camera is supported by the first table.
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26. A conductive ball attaching apparatus according to claim 24, wherein the second camera is secured to the suction head.
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27. A conductive ball attaching apparatus according to claim 23, wherein the first camera is supported by the first table via a first camera moving mechanism and the second camera is supported by the first table via a second camera moving mechanism.
Specification