Method for fabrication of patterned carbon nanotube films

• US 6,277,318 B1
• Filed: 08/18/1999
• Issued: 08/21/2001
• Est. Priority Date: 08/18/1999
• Status: Expired due to Term

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.), Lucent Technologies, Inc. (Nokia Corporation), University of South Carolina
• Original Assignee: Agere Systems Guardian Corp. (Broadcom, Inc.), University of North Carolina At Chapel Hill (University of North Carolina System)
• Inventors: Zhu, Wei, Zhou, Otto, Bower, Christopher Andrew
• Primary Examiner(s): DIXON, MERRICK L
• Application Number:
  US09/376,457
• Time in Patent Office: 734 Days
• Field of Search: 313/346, 313/495, 264/446, 264/636, 264/235, 264/236, 264/346, 264/298, 264/299, 264/319, 264/336, 264/345, 264/348
• US Class Current: 264/346
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 2202/02 Single-walled nanotubes
• CPC Class Codes: C01B 32/16 Preparation
• CPC Class Codes: H01J 9/025 of field emission cathodes
• CPC Class Codes: Y10S 977/742 Carbon nanotubes, CNTs
• CPC Class Codes: Y10S 977/842 for carbon nanotubes or fullerenes
• CPC Class Codes: Y10S 977/844 Growth by vaporization or dissociation of carbon source using a high-energy heat source, e.g. electric arc, laser, plasma, e-beam
• CPC Class Codes: Y10T 428/24893 including particulate material

Abstract

A method for fabricating adherent, patterned carbon nanotube films is provided. According to the invention, a substrate is patterned with a carbide-forming material, a carbon-dissolving material, or a low melting point metal. Carbon nanotubes are then deposited onto the patterned substrate, but have relatively poor adhesion to either the substrate material or the patterned material. The substrate is then annealed, typically in vacuum, at a temperature dependent on the particular patterning material, e.g., a temperature at which carbide formation occurs, at which carbon dissolution occurs, or at which the low melting point metal melts. The annealing thereby provides an adherent nanotube film over the patterned areas, while the nanotubes deposited onto the non-patterned areas are easily removed, e.g., by blowing, rubbing, brushing and/or ultrasonication in a solvent such as methanol.

Claims

1. A process for fabricating a patterned, adherent carbon nanotube film, comprising the steps of:

providing a substrate;

providing a patterned material on the substrate, the material being selected from the group consisting of carbon-dissolving materials, carbide-forming materials, and low melting point metals;

depositing pre-formed carbon nanotubes onto the substrate;

annealing the substrate to promote adherence of the nanotubes to the patterned material; and

removing at least a portion of the nanotubes located on the non-patterned area of the substrate.

2. The process of claim 1, wherein the substrate material is selected from the group consisting of SiO₂, indium tin oxide, Al₂O₃, Cu, and Pt.

3. The process of claim 1, wherein the removing step is performed by at least one technique selected from the group consisting of blowing, brushing, rubbing, and ultrasonicating.

4. The process of claim 1, wherein the carbon-dissolving materials are selected from the group consisting of Ni, Fe, Co, and Mn, wherein the carbide-forming elements are selected from the group consisting of Si, Mo, Ti, Ta, W, Nb, Zr, V, Cr, and Hf, and wherein the low melting point metals are selected from the group consisting of Al, Sn, Cd, Zn, and Bi.

5. The process of claim 1, wherein the annealing is performed at a temperature sufficient to attain an effect selected from the group consisting of reaction of at least portion of the nanotubes with the carbon-dissolving material, reaction of at least a portion of the nanotubes with the carbide-forming material, and melting of at least a portion of the low melting point metals.

6. The process of claim 1, wherein the nanotubes are deposited on the substrate by suspension casting or spraying.

7. A device comprising:

a substrate;

a patterned material on the substrate; and

an adherent carbon nanotube film located on the patterned material, the film comprising pre-formed nanotubes adhered to the pattern material, wherein the patterned material is a carbon-dissolving material and a carbon-containing solid solution adheres to nanotubes to the patterned material, or the patterned material is a carbide-forming material and a carbide adheres the nanotubes to the patterned material, or the patterned material is a low melting point metal and at least a portion of the nanotubes are physically embedded in the patterned material.

8. The device of claim 7, wherein the carbon-dissolving materials are selected from the group consisting of Ni, Fe, Co, and Mn, wherein the carbide-forming elements are selected from the group consisting of Si, Mo, Ti, Ta, W, Nb, Zr, V, Cr, and Hf, and wherein the low melting point metals are selected from the group consisting of Al, Sn, Cd, Zn, and Bi.

9. The device of claim 7, wherein the nanotubes are single wall nanotubes.