Please download the dossier by clicking on the dossier button x
×

Method for coating insulating film and glass substrate for image display using the same

  • US 6,277,507 B1
  • Filed: 06/21/1999
  • Issued: 08/21/2001
  • Est. Priority Date: 07/06/1998
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method for coating a multilayer insulating film on a glass plate containing an alkali component, the method comprising coating an insulating film selected from the group consisting of SiO2, a silicon oxynitride, and a silicon nitride on the glass plate by reactive sputtering using one or more silicon targets in oxygen or/and nitrogen in a vacuum apparatus in which an atmosphere having a reduced pressure can be adjusted, such that the multilayer insulating film is formed,wherein one or more interfaces between layers of the insulating film function to trap the alkali component thermally diffusing from the e glass plate so that the concentration of alkali ions on the surface of the insulating film is about 0.2% or less of alkali ions in the glass plate.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×