Compliant bond structure for joining ceramic to metal

• US 6,280,584 B1
• Filed: 07/29/1998
• Issued: 08/28/2001
• Est. Priority Date: 07/29/1998
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kumar, Ananda H., Shamouilian, Shamouil, Narendrnath, Kadthala R.
• Primary Examiner(s): DIAMOND, ALAN D
• Application Number:
  US09/124,317
• Time in Patent Office: 1,126 Days
• Field of Search: 204/298.15, 204/298.06, 204/192.1, 204/192.11, 204/192.12, 118/666, 118/723.R, 118/728, 118/69, 427/569, 361/234, 228/122.1, 228/56.3
• US Class Current: 204/298.15
• CPC Class Codes: H02N 13/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

Abstract

A compliant bond structure 20 comprising wire mesh 25 strands 50 surrounded by compliant metal 40 is useful for bonding a ceramic surface 30 to a metal surface 35. The wire mesh 25 comprises interlocking strands 50 having longitudinal axes that are oriented substantially parallel to the ceramic and metal surfaces 30, 35. More preferably, the wire mesh 25 comprises strands having a coefficient of thermal expansion that is about 0.4 to about 1.6 times the average of the coefficients of thermal expansion of the metal and ceramic surfaces 30, 35.

Claims

1. A support assembly capable of supporting a substrate in a process chamber, the support assembly comprising:

(a) an electrostatic chuck comprising a ceramic having an electrode therein, the electrostatic chuck having an upper surface capable of receiving the substrate and a lower surface;

(b) a support having a support surface capable of supporting the lower surface of the electrostatic chuck; and

(c) a bond between the lower surface and the support surface, the bond comprising a wire mesh.

2. The support assembly of claim 1 wherein the wire mesh comprises strands substantially parallel to the lower surface and the support surface.

3. The support assembly of claim 1 wherein the wire mesh comprises interlocking strands.

4. The support assembly of claim 3 wherein the strands comprise copper, aluminum, or steel.

5. The support assembly of claim 3 wherein the interlocking strands are oriented relative to one another.

6. The support assembly of claim 3 wherein the interlocking strands are randomly oriented.

7. The support assembly of claim 1 wherein the wire mesh comprises strands that are woven or felted.

8. The support assembly of claim 1 wherein the wire mesh comprises a metal, ceramic or polymer.

9. The support assembly of claim 1 wherein the wire mesh is in a metal.

10. The support assembly of claim 9 wherein the metal comprises one or more of indium, lead, magnesium, tin, bismuth, aluminum, copper, silver, zinc, and nickel.

11. The support assembly of claim 9 wherein the wire mesh comprises copper and the metal comprises indium.

12. The support assembly of claim 1 further comprising a surface wetting compound applied on one or more of the lower surface and the support surface.

13. The support assembly of claim 1 wherein the wire mesh comprises a thickness of from about 25 microns to about 2000 microns.

14. The support assembly of claim 1 wherein the support comprises a metal support having heat transfer fluid circulating channels capable of circulating heat transfer fluid therethrough.

15. A support assembly capable of supporting a substrate in a process chamber, the support assembly comprising:

(a) a ceramic having a surface;

(b) a support having a support surface capable of receiving the surface of the ceramic; and

(c) a bond between the ceramic surface and the support surface, the bond comprising a wire mesh in a metal.

16. The support assembly of claim 15 wherein the wire mesh comprises copper, aluminum, or steel.

17. The support assembly of claim 15 wherein the metal comprises one or more of indium, lead, magnesium, tin, bismuth, aluminum, copper, silver, zinc, and nickel.

18. The support assembly of claim 15 wherein the wire mesh comprises copper and the metal comprises indium.

19. The support assembly of claim 15 further comprising a surface wetting compound applied on one or more of the ceramic surface and the support surface.

20. The support assembly of claim 15 wherein the support comprises channels capable of circulating heat transfer fluid therethrough.

21. The support assembly of claim 15 wherein the ceramic comprises an electrode therein.

22. The support assembly of claim 15 wherein the support comprises a metal.

23. The support assembly of claim 15 wherein the wire mesh comprises interlocking strands substantially parallel to the lower surface and the support surface.

24. The support assembly of claim 15 wherein the wire mesh comprises interlocking strands.

25. The support assembly of claim 24 wherein the interlocking strands are oriented relative to one another.

26. The support assembly of claim 24 wherein the interlocking strands are randomly oriented.

27. The support assembly of claim 15 wherein the wire mesh comprises strands that are woven or felted.

28. The support assembly of claim 15 wherein the wire mesh comprises a metal, ceramic or polymer.

29. A support assembly capable of supporting a substrate in a process chamber, the support assembly comprising:

(a) an electrostatic chuck comprising a ceramic having an electrode therein, the electrostatic chuck having an upper surface capable of receiving the substrate and a lower surface;

(b) a support having a surface capable of receiving the lower surface of the electrostatic chuck; and

(c) a bond between the lower surface and the support surface, the bond comprising a wire mesh in a compliant material.

30. The support assembly of claim 29 wherein the wire mesh comprises a metal, ceramic, or polymer.

31. The support assembly of claim 29 wherein the wire mesh comprises a perforated metal sheet.

32. The support assembly of claim 29 wherein the wire mesh comprises a bundle of strands that are woven or felted, the bundle of strands having multiple apertures.

33. The support assembly of claim 29 wherein the wire mesh comprises interlocking strands.

34. The support assembly of claim 33 wherein the interlocking strands are oriented relative to one another.

35. The support assembly of claim 33 wherein the interlocking strands are randomly oriented.

36. A support assembly capable or supporting a substrate in a process chamber, the support assembly comprising:

(a) an electrostatic chuck comprising a dielectric and an electrode, the electrostatic chuck having a lower surface;

(b) a support having a support surface capable of receiving the lower surface of the electrostatic chuck; and

(c) a bond between the lower surface of the electrostatic chuck and the support surface, the bond comprising a wire mesh.

37. The support assembly of claim 36 wherein the bond comprises the wire mesh in a material.

38. The support assembly of claim 36 wherein the bond comprises the wire mesh in a metal.

39. The support assembly of claim 36 wherein the dielectric comprises ceramic.

40. The support assembly of claim 36 wherein the dielectric comprises a monolithic ceramic.

41. The support assembly of claim 36 wherein the wire mesh comprises a metal, ceramic, or polymer.

42. The support assembly of claim 36 wherein the wire mesh comprises interlocking strands.

43. The support assembly of claim 42 wherein the interlocking strands are oriented relative to one another.

44. The support assembly of claim 42 wherein the interlocking strands are randomly oriented.

45. The support assembly of claim 36 wherein the wire mesh comprises strands that are woven or felted.

46. A process chamber capable of processing a substrate, the process chamber comprising:

(a) an electrostatic chuck comprising a ceramic having an electrode therein, the electrostatic chuck having an upper surface capable of receiving the substrate, and the electrostatic chuck having a lower surface;

(b) a support having a support surface capable of receiving the lower surface of the electrostatic chuck;

(c) a bond between the lower surface of the electrostatic chuck and the support surface, the bond comprising a wire mesh;

(d) a gas distributor capable of introducing process gas into the process chamber; and

(e) a gas energizer capable of energizing the process gas.

47. The process chamber of claim 46 wherein the wire mesh is in a metal.

48. The process chamber of claim 47 wherein the metal comprises one or more of indium, lead, magnesium, tin, bismuth, aluminum, copper, silver, zinc, and nickel.

49. The process chamber of claim 46 wherein the wire mesh comprises a coefficient of thermal expansion that is from about 0.4 to about 1.6 times the average coefficient of thermal expansion of the ceramic and the support.

50. The process chamber of claim 46 wherein the wire mesh comprises a metal, ceramic, or polymer.

51. The process chamber of claim 46 wherein the wire mesh comprises a perforated metal sheet.

52. The process chamber of claim 46 wherein the support comprises channels capable of circulating heat transfer fluid therethrough.

53. A method of using the process chamber of claim 52, the method comprising the steps of:

(1) supplying a voltage to the electrode of the electrostatic chuck to electrostatically hold the substrate to the upper surface of the ceramic of the electrostatic chuck;

(2) forming a plasma from process gas introduced into the process chamber; and

(3) regulating the temperature of the substrate held on the electrostatic chuck by circulating heat transfer fluid through the channels in the support.

54. The process chamber of claim 46 wherein the wire mesh comprises interlocking strands.

55. The process chamber of claim 54 wherein the interlocking strands are oriented relative to one another.

56. The process chamber of claim 54 wherein the interlocking strands are randomly oriented.

57. The process chamber of claim 46 wherein the wire mesh comprises strands that are woven or felted.

58. A support assembly capable of supporting a substrate in a process chamber, the support assembly comprising:

a surface capable of receiving the substrate; and

a bond below the surface, the bond comprising a wire mesh in indium.

59. The support assembly of claim 58 wherein the wire mesh comprises copper, aluminum, or steel.

60. The support assembly of claim 58 wherein the wire mesh comprises interlocking strands.

61. The support assembly of claim 60 wherein the interlocking strands are oriented relative to one another.

62. The support assembly of claim 60 wherein the interlocking strands are randomly oriented.

63. The support assembly of claim 58 wherein the wire mesh comprises strands that are woven or felted.

64. The support assembly of claim 58 wherein the wire mesh comprises a metal, ceramic, or polymer.