Multi-layered coaxial interconnect structure

• US 6,281,587 B1
• Filed: 03/09/2000
• Issued: 08/28/2001
• Est. Priority Date: 08/10/1998
• Status: Expired due to Term

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Nogami, Takeshi, Lopatin, Sergey, Pramanick, Shekhar
• Primary Examiner(s): Chaudhuri, Olik
• Assistant Examiner(s): Rao, Shrinivas H.
• Application Number:
  US09/522,148
• Time in Patent Office: 537 Days
• Field of Search: 257/758, 257/759, 257/760, 257/761, 438/622
• US Class Current: 257/758
• CPC Class Codes: H01L 21/76885 By forming conductive members before deposition of protective insulating material, e.g. pillars, studs
• CPC Class Codes: H01L 23/5222 Capacitive arrangements or effects of, or between wiring layers other capacitive arrangements H01L23/642
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A method of forming a multi-layered interconnect structure is provided. A first conductive pattern is formed over an insulation layer. A first dielectric material is deposited over the first conductive pattern, and plugs are formed in the first dielectric material. A second conductive pattern is formed over the first dielectric material and plugs so as to form the multi-layered interconnect structure in part. Then, the first dielectric material is stripped away to leave the multi-layered interconnect structure exposed to air. A thin layer of second dielectric material is deposited so as to coat at least a portion of the interconnect structure. Next, a thin layer of metal is deposited so as to coat the at least a portion of the interconnect structure coated with the thin layer of second dielectric material. A third dielectric material is deposited over the interconnect structure to replace the stripped away first dielectric material.

Claims

1. A semiconductor device comprising:

a substrate;

an insulating layer formed on the substrate; and

an interconnect structure including;

a first conductive pattern formed on the insulating layer, the conductive pattern including at least two conductive lines adjacent one another;

a first dielectric material selected from at least one of;

polyimides, Teflon, and aerogels and formed over the conductive pattern, the first dielectric material filling a space between the at least two conductive lines;

at least one plug formed in the first dielectric material;

a second conductive pattern formed over the first dielectric material and the at least one plug;

wherein at least a portion of the first and the second conductive patterns associated with the interconnect structure is coaxial in nature; and

a second dielectric material formed over the interconnect structure, the second dielectric material having a dielectric constant less than about 3.0.

2. The semiconductor device of claim 1, wherein the at least coaxial portion of the interconnect structure includes a central conductor, an outer conductor and an insulating material interposed between the central conductor and outer conductor.

3. The semiconductor device of claim 2, the insulating material circumferentially surrounding the central conductor.

4. The semiconductor device of claim 2, the outer conductor circumferentially surrounding the insulating material.

5. The semiconductor device of claim 1, the first dielectric material having a dielectric constant less than about 2.5.

6. The semiconductor device of claim 1, the first dielectric material having a dielectric constant less than about 2.0.

7. The semiconductor device of claim 1, the second dielectric material including at least one of SiO₂, Si₃N₄, and silicon oxynitride.

8. The semiconductor device of claim 1, the outer metal conductor including tantalum nitride.

9. A semiconductor device comprising:

a substrate;

an insulating layer formed on the substrate;

a first conductor line formed on at least a portion of the insulating layer and having a top surface facing away from the insulating layer;

a conductive plug having a lower end connected with a first portion of the top surface of the first conductor line, an upper end facing away from the first conductor line, and at least one side between the upper and lower ends;

a second conductor line spaced from the first conductor line and having a bottom surface, a top surface and a side surface, a first portion of the bottom surface of the second conductor line being connected to the upper end of the plug;

an insulator coating formed on a second portion of the top surface of the first conductor line, the at least one side of the plug, and the remainder surface of the second conductor line;

a conductive coating formed on the insulator coating, wherein at least a portion of the conductive coating circumferentially surrounds at least a portion of the second conductor line; and

a dielectric material selected from at least one of;

polyimides, Teflon, and aerogels and formed on the conductive coating, wherein the dielectric material has a dielectric constant less, than about 3.0.

10. The semiconductor device of claim 9, wherein the insulator coating is formed on at least a second portion of the bottom surface of the second conductor line.

11. The semiconductor device of claim 10, further comprising a dielectric material formed on the conductive coating.

12. The semiconductor device of claim 11, wherein the conductive coating and the second conductor line are generally coaxial.

13. The semiconductor device of claim 9, wherein the conductive coating and the second conductor line are generally coaxial.

14. The semiconductor device of claim 9, wherein the insulator coating comprises a dielectric material.

15. A semiconductor device comprising:

a substrate;

a first conductor line having a top surface facing away from the substrate;

a conductive plug having a lower end connected with a first portion of the top surface of the first conductor line, an upper end facing away from the first conductor line, and at least one side between the upper and lower ends;

a second conductor line spaced from the first conductor line and having a bottom surface thereof connected to the upper end of the plug, and a top surface and a side surface;

an insulator coating formed on a second portion of the top surface of the first conductor line, the at least one side of the plug, and the remainder surface of the second conductor line;

a conductive coating formed on the insulator coating, wherein at least a portion of the conductive coating circumferentially surrounds at least a portion of the second conductor line; and

a dielectric material selected from at least one of;

polyimides, Teflon, and aerogels and formed on the conductive coating, wherein the dielectric material has a dielectric constant less than about 3.0.