Method for damping ribbon elements in a micromechanical grating device by selection of actuation waveform
First Claim
1. A method for damping electro-mechanical ribbon elements having a resonant period and being suspended over a channel defining a bottom surface and having a bottom conductive layer formed below said bottom surface, the method comprising the steps of:
- providing at least one constant amplitude voltage pulse to at least one ribbon element; and
providing at least one braking pulse to said ribbon element wherein said braking pulse is separated by a narrow temporal gap from said constant amplitude voltage pulse.
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Abstract
A method for damping electro-mechanical ribbon elements over a channel defining a bottom surface and having a bottom conductive layer formed below the bottom surface includes the steps of: providing at least one constant amplitude voltage pulse to at least one ribbon element wherein the actuation pulse causes the ribbon element to contact the bottom surface of the channel; and providing at least one braking pulse to the ribbon elements wherein the braking pulse is separated by a narrow temporal gap from the constant amplitude voltage pulse. Furthermore, the method can also provide a sophisticated damping for ribbon elements which are actuated so that they do not contact the bottom of the channel.
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Citations
21 Claims
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1. A method for damping electro-mechanical ribbon elements having a resonant period and being suspended over a channel defining a bottom surface and having a bottom conductive layer formed below said bottom surface, the method comprising the steps of:
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providing at least one constant amplitude voltage pulse to at least one ribbon element; and
providing at least one braking pulse to said ribbon element wherein said braking pulse is separated by a narrow temporal gap from said constant amplitude voltage pulse. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for damping electro-mechanical ribbon elements having a resonant period and being suspended over a channel defining a bottom surface and having a bottom conductive layer formed below said bottom surface, the method comprising the steps of:
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providing at least one constant amplitude voltage pulse to at least one ribbon element wherein said constant amplitude voltage pulse causes said ribbon element to contact the bottom surface of the channel; and
providing at least one braking pulse to said ribbon element wherein said braking pulse is separated by a narrow temporal gap from said constant amplitude voltage pulse. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A method for damping electro-mechanical ribbon elements having a resonant period and being suspended over a channel defining a bottom surface and having a bottom conductive layer formed below said bottom surface, the method comprising the steps of:
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providing at least one constant amplitude voltage pulse to at least one ribbon element wherein said constant amplitude voltage pulse causes said ribbon element to be drawn into the channel wherein said ribbon element is in a suspended actuated state above the bottom of the channel; and
providing at least two braking pulses to said ribbon element wherein an initial braking pulse immediately precedes said constant amplitude voltage pulse and a final braking pulse follows said constant amplitude voltage pulse. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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Specification