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Method for damping ribbon elements in a micromechanical grating device by selection of actuation waveform

  • US 6,282,012 B1
  • Filed: 12/10/1999
  • Issued: 08/28/2001
  • Est. Priority Date: 12/10/1999
  • Status: Expired due to Fees
First Claim
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1. A method for damping electro-mechanical ribbon elements having a resonant period and being suspended over a channel defining a bottom surface and having a bottom conductive layer formed below said bottom surface, the method comprising the steps of:

  • providing at least one constant amplitude voltage pulse to at least one ribbon element; and

    providing at least one braking pulse to said ribbon element wherein said braking pulse is separated by a narrow temporal gap from said constant amplitude voltage pulse.

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