Apparatus for storing and moving a cassette

• US 6,283,692 B1
• Filed: 12/01/1998
• Issued: 09/04/2001
• Est. Priority Date: 12/01/1998
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Perlov, Ilya, Gantvarg, Evgueni, Belitsky, Victor
• Primary Examiner(s): Keenan, James W.
• Application Number:
  US09/201,737
• Time in Patent Office: 1,008 Days
• Field of Search: 414/217.1, 414/222.01, 414/222.13, 414/226.03, 414/940, 414/281
• US Class Current: 414/222.01
• CPC Class Codes: H01L 21/67167 surrounding a central transfer chamber
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: Y10S 414/14 Wafer cassette transporting

Abstract

A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.

Claims

1. A fabrication system, comprising:

a first processing station to perform a first fabrication step on a substrate, the first processing station including a first docking station, a first frame, a first plurality of cassette storage shelves fixedly mounted on the first frame and positioned above the first docking station, and a first cassette mover mounted on the first frame to carry a cassette between the first plurality of shelves and the first docking station;

a second processing station to perform a second fabrication step on the substrate, the second processing station including a second docking station, a second frame, a second plurality of cassette storage shelves fixedly mounted on the second frame and positioned above the second docking station, and a second cassette mover mounted on the second frame to carry a cassette between the second plurality of shelves and the second docking station; and

an interstation cassette mover to transport a cassette between one of the first plurality of shelves and one of the second plurality of shelves.

2. The fabrication system of claim 1, wherein the first processing system performs a first fabrication step.

3. The fabrication system of claim 2, wherein the second processing system is a metrology system.

4. The fabrication system of claim 1, wherein the shelves are arranged in columns above the docking stations, and the interstation cassette mover transports a cassette between a topmost shelf of each of the first and second plurality of shelves.

5. The fabrication system of claim 1, wherein the interstation cassette mover includes a support member positioned in front of the shelves and movable in a path parallel to a cleanroom wall, and an end effector configured to engage the cassette, the end effector vertically movable relative to the support member.

6. The fabrication system of claim 5, further comprising a supporting part mounted between the first frame and the second frame, the support member being movably mounted on the supporting part.

7. An apparatus for storing cassettes, comprising:

one or more docking stations positionable adjacent a cleanroom wall and each including a respective door adapted to seal an opening in the cleanroom wall;

a frame positioned adjacent the cleanroom wall;

one or more cassette storage shelves fixedly mounted on the frame and adjacent the one or more docking stations;

a horizontally-extending guide mounted on the frame; and

a cassette mover including a slider mounted for movement along the guide.

8. The apparatus of claim 7 wherein the one or more cassette storage shelves are disposed above the one or more docking stations.

9. The apparatus of claim 8 further comprising a loading station disposed adjacent the one or more docking stations.

10. The apparatus of claim 7, wherein each docking station includes a docking platform to support a cassette, and the frame is at least partially disposed below the docking platform.