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Apparatus for storing and moving a cassette

  • US 6,283,692 B1
  • Filed: 12/01/1998
  • Issued: 09/04/2001
  • Est. Priority Date: 12/01/1998
  • Status: Expired due to Fees
First Claim
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1. A fabrication system, comprising:

  • a first processing station to perform a first fabrication step on a substrate, the first processing station including a first docking station, a first frame, a first plurality of cassette storage shelves fixedly mounted on the first frame and positioned above the first docking station, and a first cassette mover mounted on the first frame to carry a cassette between the first plurality of shelves and the first docking station;

    a second processing station to perform a second fabrication step on the substrate, the second processing station including a second docking station, a second frame, a second plurality of cassette storage shelves fixedly mounted on the second frame and positioned above the second docking station, and a second cassette mover mounted on the second frame to carry a cassette between the second plurality of shelves and the second docking station; and

    an interstation cassette mover to transport a cassette between one of the first plurality of shelves and one of the second plurality of shelves.

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