Metalization outside protective overcoat for improved capacitors and inductors

• US 6,284,617 B1
• Filed: 02/02/2001
• Issued: 09/04/2001
• Est. Priority Date: 11/05/1997
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Khatibzadeh, M. Ali, Arch, John Kenneth, Erdeljac, John P., Hutter, Louis Nicholas
• Primary Examiner(s): TSAI, H JEY
• Application Number:
  US09/776,511
• Publication Number:
  US 20010019865A1
• Time in Patent Office: 214 Days
• Field of Search: 438/3, 438/238-240, 438/390-396, 438/381, 438/393-399
• US Class Current: 438/381
• CPC Class Codes: H01L 23/5223 Capacitor integral with wiring layers
• CPC Class Codes: H01L 23/5227 Inductive arrangements or effects of, or between, wiring layers other inductive arrangements H01L23/645
• CPC Class Codes: H01L 28/10 Inductors
• CPC Class Codes: H01L 28/40 Capacitors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A thick layer of copper is formed on the outside the protective overcoat (PO) which protects an integrated circuit, and forms both an inductor and the upper electrode of a capacitor. Placing this layer outside the PO greatly reduces parasitic capacitances with the substrate in the devices.

Claims

1. A fabrication method, comprising the steps of:

(a.) forming a first circuit portion which includes a first electrode of a capacitor;

(b.) covering said first circuit portion with a protective overcoat;

(c.) forming openings through said protective overcoat including bond pad openings and an opening at said first electrode;

(d.) depositing a capacitor dielectric over exposed portions of said first electrode; and

(e.) forming a second electrode of said capacitor overlying said first electrode, said second electrode at least partially overlying said protective overcoat.