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Black mask, color filter and liquid crystal display

  • US 6,285,424 B1
  • Filed: 11/03/1998
  • Issued: 09/04/2001
  • Est. Priority Date: 11/07/1997
  • Status: Expired due to Term
First Claim
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1. A black mask which comprises:

  • a first and a second antireflection films each comprising oxide, nitride, carbide, oxide nitride, oxide carbide, nitride carbide, or oxide nitride carbide of at least one kind of metal selected from the group consisting of chromium, molybdenum, tungsten, nickel, and germanium, and said films each having a different composition; and

    a screening film comprising at least one kind of metal selected from the group consisting of chromium, molybdenum, tungsten, nickel, and germanium;

    wherein said three films are successively formed on a transparent substrate, and at least one but not all of said three films contains chromium.

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