Frequency tunable resonant scanner with auxiliary arms

• US 6,285,489 B1
• Filed: 08/05/1999
• Issued: 09/04/2001
• Est. Priority Date: 08/05/1999
• Status: Expired due to Term

• Current Assignee: Microvision, Inc.
• Original Assignee: Microvision, Inc.
• Inventors: Helsel, Mark P., Wine, David W.
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): Spector, David N.
• Application Number:
  US09/369,230
• Time in Patent Office: 761 Days
• Field of Search: 359/197-204, 359/223, 359/224, 359/290, 359/291, 250/230, 250/234, 310/15, 310/36, 310/40.MM, 348/203, 348/205
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129
• CPC Class Codes: G02B 27/017 Head mounted
• CPC Class Codes: G02B 27/0176 characterised by mechanical features

Abstract

A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from an oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to change the moment of inertia of the oscillatory body and a secondary mass carried by the flexible arm. The shifted combined center of mass changes the resonant frequency of the MEMs device. In another embodiment, an absorptive material forms a portion of a torsional arm that supports the oscillatory body. The mechanical properties of the absorptive material can be varied by varying the concentration of a gas surrounding the absorptive material. The varied mechanical properties change the resonant frequency of the scanning device. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.

Claims

1. A microelectromechanical scanner, comprising:

a substrate;

an oscillatory body carried by the substrate and coupled to the substrate for periodic movement along a movement path by a set of primary arms;

an actuator coupled to the oscillatory body and configured to drive the oscillatory body along the movement path;

a first auxiliary arm separate from the primary arms and interposed between the oscillatory body and the substrate, the auxiliary arm being configured to provide an auxiliary force that opposes the movement of the oscillatory body along the movement path; and

a gimbal ring interposed between the oscillatory body and the substrate, the gimbal ring being configured to support the oscillatory body, the gimbal ring further being coupled to the substrate in a manner that permits pivoting of the gimbal ring about a first pivot axis, wherein the auxiliary arm is coupled between the oscillatory body and the gimbal ring.

2. The microelectromechanical scanner of claim 1 wherein the oscillatory body is coupled to the gimbal ring in a manner that permits pivoting of the oscillatory body relative to the gimbal ring about a second pivot axis substantially orthogonal to the first pivot axis.

3. The microelectromechanical scanner of claim 1 wherein the oscillatory body is coupled to the gimbal ring in a manner that permits pivoting of the oscillatory body relative to the gimbal ring about a second pivot axis substantially orthogonal to the first pivot axis.

4. A microelectromechanical scanner, comprising:

a substrate;

an oscillatory body carried by the substrate and coupled to the substrate for periodic movement along a movement path by a set of primary arms;

an actuator coupled to the oscillatory body and configured to drive the oscillatory body along the movement path;

a first auxiliary arm separate from the primary arms and interposed between the oscillatory body and the substrate, the auxiliary arm being configured to provide an auxiliary force that opposes the movement of the oscillatory body along the movement path; and

a gimbal ring interposed between the oscillatory body and the substrate, the gimbal ring being configured to support the oscillatory body, the gimbal ring further being coupled to the substrate in a manner that permits pivoting about a first pivot axis, wherein the first auxiliary arm is coupled between the substrate and the gimbal ring.

5. A microelectromechanical scanner, comprising:

a substrate;

an oscillatory body carried by the substrate and coupled to the substrate for periodic movement along a movement path by a set of primary arms;

an actuator coupled to the oscillatory body and configured to drive the oscillatory body along the movement path;

a first auxiliary arm separate from the primary arms and interposed between the oscillatory body and the substrate, the auxiliary arm being configured to provide an auxiliary force that opposes the movement of the oscillatory body along the movement path; and

primary arms which are torsional arms that flex torsionally about a respective pivot axis to define the movement path, further including a piezoelectric sensor carried on one or more of the torsional arms and the auxiliary arm.

6. The microelectromechanical scanner of claim 5 wherein the piezoelectric sensor is carried by one or more of the auxiliary arms.

7. The microelectromechanical scanner of claim 5 wherein the piezoelectric sensor is carried by the torsional arm.

8. The microelectromechanical scanner of claim 6 wherein the first auxiliary arm is coupled to the oscillatory body along a first edge, further including a second auxiliary arm coupled to the oscillatory body along a second edge different from the first edge and wherein the piezoelectric sensor is integral to the one or more of the auxiliary arms.

9. A microelectromechanical scanner, comprising:

a substrate;

an oscillatpry body carried by the substrate and coupled to the substrate for periodic movement along a movement path by a set of primary arms;

an actuator coupled to the oscillatory body and configured to drive the oscillatory body along the movement path;

a first auxiliary arm separate from the primary arms and interposed between the oscillatory body and the substrate, the auxiliary arm being configured to provide an auxiliary force that opposes the movement of the oscillatory body along the movement path; and

primary arms that are torsional arms that flex torsionally about a respective pivot axis to define the movement path, and wherein the torsional arms and the auxiliary arms define a resonant frequency suitable for a scanned beam display.

10. A microelectromechanical scanner, comprising:

a substrate;

an oscillatory body carried by the substrate and coupled to the substrate for periodic movement along a movement path by a set of primary arms;

an actuator coupled to the oscillatory body and configured to drive the oscillatory body along the movement path;

a first auxiliary arm separate from the primary arms and interposed between the oscillatory body and the substrate, the auxiliary arm being configured to provide an auxiliary force that opposes the movement of the oscillatory body along the movement path;

a second auxiliary arm coupled to the oscillatory body; and

primary arms which are coupled on a first two sides of the oscillatory body and the auxiliary arm is coupled to a third side on the oscillatory body different from the first two sides.

11. A method of scanning with a MEMs device having a movable mirror that is configured to pivot about a pivot axis, comprising the steps of:

pivoting the movable mirror about the pivot axis;

bending a flexible arm along an axis substantially normal to the pivot axis in response to the pivoting of the movable mirror about the pivot axis;

detecting bending of the flexible arm; and

producing an electrical signal in response to the detected bending of the flexible arm, the electrical signal being indicative of pivotal movement of the movable mirror about the pivot axis.

12. The method of claim 11 further including:

directing a beam of light at the movable mirror when the mirror is pivoting;

and modulating the beam of light in response to the produced electrical signal.

13. The method of claim 11 wherein detecting bending of the flexible arm includes monitoring electrical properties of the flexible arm.