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High yield spring-ring micromirror

  • US 6,285,490 B1
  • Filed: 12/30/1999
  • Issued: 09/04/2001
  • Est. Priority Date: 12/30/1998
  • Status: Expired due to Term
First Claim
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1. An improved micromechanical device comprising:

  • a substrate;

    a spring-ring suspended over said substrate;

    at least one address electrode supported over said substrate; and

    a deflectable member supported over said spring-ring and said address electrode by a torsion beam hinge, said deflectable member operable to rotate about said torsion beam hinge in response to a voltage differential between said deflectable member and said address electrode, said spring-ring operable to resist deflection of said deflectable member when deflection of said deflectable member creates contact between said deflectable member and said spring-ring.

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