Light emitting diode with a metal-coated reflective permanent substrate and the method for manufacturing the same
DCFirst Claim
1. A method for manufacturing an LED with a metal-coated reflective permanent substrate, comprising:
- (A) selecting a temporary substrate to grow an LED structure on said temporary substrate;
(B) selecting a permanent substrate with a reflective mirror and bonding said LED structure to said permanent substrate by a metal bonding agent;
(C) removing said temporary substrate using mechanic grinding or chemical etching;
(D) manufacturing a plane LED element with a metal-coated reflective permanent substrate; and
(E) forming two ohmic contact electrodes on said plane LED element.
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Abstract
A method of manufacturing a light emitting diode (LED) includes growing a light emitting region on a temporary substrate, bonding a metal-coated reflective permanent substrate and then removing the temporary substrate. The reflective metal layer also serves as a bonding agent for bonding the permanent substrate. The bonded LED element and permanent substrate are heated in a wafer bonding tool that includes a graphite lower chamber and a graphite upper cover with a stainless steel screw. Because of the different thermal expansion coefficients between stainless and graphite, the stainless steel screw applies a pressure to the bonded structure during the heating process to assist the bonding of the permanent substrate.
156 Citations
13 Claims
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1. A method for manufacturing an LED with a metal-coated reflective permanent substrate, comprising:
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(A) selecting a temporary substrate to grow an LED structure on said temporary substrate;
(B) selecting a permanent substrate with a reflective mirror and bonding said LED structure to said permanent substrate by a metal bonding agent;
(C) removing said temporary substrate using mechanic grinding or chemical etching;
(D) manufacturing a plane LED element with a metal-coated reflective permanent substrate; and
(E) forming two ohmic contact electrodes on said plane LED element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification