Inductor with magnetic material layers
First Claim
Patent Images
1. A method of fabricating an inductor comprising:
- selecting a substrate;
depositing a layer of magnetic material on the substrate;
depositing an insulating layer on the magnetic material layer;
depositing an inductor pattern on the insulating layer;
depositing a second insulating layer on the inductor pattern; and
depositing a second magnetic material layer on the second insulating layer.
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Abstract
A spiral inductor fabricated above a semiconductor substrate provides a large inductance while occupying only a small surface area. Including a layer of magnetic material above and below the inductor increases the inductance of the inductor. The magnetic material also acts as barrier that confines electronic noise generated in the spiral inductor to the area occupied by the spiral inductor. Inductance in a pair of stacked spiral inductors is increased by including a layer of magnetic material between the stacked spiral inductors.
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Citations
48 Claims
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1. A method of fabricating an inductor comprising:
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selecting a substrate;
depositing a layer of magnetic material on the substrate;
depositing an insulating layer on the magnetic material layer;
depositing an inductor pattern on the insulating layer;
depositing a second insulating layer on the inductor pattern; and
depositing a second magnetic material layer on the second insulating layer. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of fabricating an inductor comprising:
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selecting a substrate;
depositing a layer of magnetic material on the substrate;
depositing an insulating layer on the magnetic material layer;
depositing an inductor pattern on the insulating layer and above the magnetic material layer;
depositing a second insulating layer on the inductor pattern; and
depositing a second magnetic material layer on the second insulating layer. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A method of fabricating an inductor comprising:
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selecting a substrate;
depositing a layer of magnetic material on the substrate;
depositing an insulating layer on the magnetic material layer;
depositing an inductor pattern on the insulating layer;
depositing a second insulating layer on the inductor pattern; and
depositing a second magnetic material layer on the second insulating layer above the inductor pattern. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A method of fabricating an inductor comprising:
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selecting a silicon substrate;
depositing a layer of magnetic material on the substrate;
depositing an insulating layer on the magnetic material layer;
depositing an inductor pattern on the insulating layer and above the magnetic material layer;
depositing a second insulating layer on the inductor pattern; and
depositing a second magnetic material layer on the second insulating layer and above the inductor pattern. - View Dependent Claims (20, 21, 22, 23, 24)
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25. A method of fabricating an inductor comprising:
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selecting a substrate;
depositing a layer of magnetic material on the substrate;
depositing an insulating layer on the magnetic material layer;
stacking a plurality of sandwich structures on the insulating layer, the method of fabricating the structures comprising;
depositing an inductor pattern on the insulating layer;
depositing an insulating layer on the inductor pattern;
depositing a layer of magnetic material on the insulating layer; and
depositing an insulating layer on the magnetic material layer;
fabricating a conducting path through the structures; and
connecting each inductor pattern serially to the inductor pattern above by the conducting path, such that a current flowing in the serially connected inductor patterns creates a reinforcing magnetic field in the magnetic material between adjacent inductor patterns. - View Dependent Claims (26, 27, 28, 29, 30)
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31. A method of fabricating an inductor comprising:
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selecting a substrate;
depositing a layer of magnetic material on the substrate;
depositing an insulating layer on the magnetic material layer;
stacking a plurality of sandwich structures on the insulating layer, the method of fabricating the structures comprising;
depositing an inductor pattern on the insulating layer and above the magnetic material layer;
depositing an insulating layer on the inductor pattern;
depositing a layer of magnetic material on the insulating layer; and
depositing an insulating layer on the magnetic material layer;
fabricating a conducting path through the structures; and
connecting each inductor pattern serially to the inductor pattern above by the conducting path, such that a current flowing in the serially connected inductor patterns creates a reinforcing magnetic field in the magnetic material between adjacent inductor patterns. - View Dependent Claims (32, 33, 34, 35, 36)
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37. A method of fabricating an inductor comprising:
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selecting a substrate;
depositing a layer of magnetic material on the substrate;
depositing an insulating layer on the magnetic material layer;
stacking a plurality of sandwich structures on the insulating layer, the method of fabricating the structures comprising;
depositing an inductor pattern on the insulating layer;
depositing an insulating layer on the inductor pattern;
depositing a layer of magnetic material on the insulating layer and above the inductor pattern; and
depositing an insulating layer on the magnetic material layer;
fabricating a conducting path through the structures; and
connecting each inductor pattern serially to the inductor pattern above by the conducting path, such that a current flowing in the serially connected inductor patterns creates a reinforcing magnetic field in the magnetic material between adjacent inductor patterns. - View Dependent Claims (38, 39, 40, 41, 42)
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43. A method of fabricating an inductor comprising:
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selecting a silicon substrate;
depositing a layer of magnetic material on the substrate;
depositing an insulating layer on the magnetic material layer;
stacking a plurality of sandwich structures on the insulating layer, the method of fabricating the structures comprising;
depositing an inductor pattern on the insulating layer and above the magnetic material layer;
depositing an insulating layer on the inductor pattern;
depositing a layer of magnetic material on the insulating layer and above the inductor pattern; and
depositing an insulating layer on the magnetic material layer;
fabricating a conducting path through the structures; and
connecting each inductor pattern serially to the inductor pattern above by the conducting path, such that a current flowing in the serially connected inductor patterns creates a reinforcing magnetic field in the magnetic material between adjacent inductor patterns. - View Dependent Claims (44, 45, 46, 47, 48)
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Specification