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Combined externally pressurized gas-magnetic bearing assembly and spindle device utilizing the same

  • US 6,288,465 B1
  • Filed: 04/28/1998
  • Issued: 09/11/2001
  • Est. Priority Date: 04/28/1997
  • Status: Expired due to Fees
First Claim
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1. A combined externally pressurized gas and magnetic bearing assembly which comprises:

  • a magnetic bearing including a displacement measuring means for measuring a displacement of a rotor, said magnetic bearing being operable to support the rotor at a predetermined position by generating an electromagnetic force according to the displacement measured by the displacement measuring means;

    an externally pressurized gas bearing having a fluid restrictor defined in a bearing stator of the magnetic bearing; and

    a magnetic bearing control means for controlling the magnetic bearing using a feed-back scheme according to the displacement of the rotor measured by the displacement measuring means, said magnetic bearing control means being operable to perform the control using an integral action or a proportional integral action and to affect no control to a high frequency higher than a predetermined value.

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